MU

(#1+#4+#11) MUG32SMU32, #4 (#1+#4+#11) MUG40SMU40, #4 (#1+#4+#11) MUG50SMU50, #4 (#1+#4+#11) MUG63SMU63, #4 (#1+#4+#11) Front flange MUF25SMU25, #3 (#1+#3+#11) MUF32SMU32, #3 (#1+#3+#11) MUF40SMU40, #3 (#1+#3+#11) MUF50SMU50, #3 (#1+#3+#11) MUF63SMU63, #3 (#1+#3+#11) Single clevis Double clevis Double clevis Single clevis Double clevis MUD25SMU25, #6 (#1+#6+#11) MUD32SMU32, #6 (#1+#6+#11)

VQ5000

106 46.8 59.2 9 9 U side 83.5 55.5 M5 ground screw 19 34.5 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port B 2 A 4 6 Indicator light B 2 A 4 A B 5 SMC SMC SMC SMC SMC A B B B B B B 2 A 4 Manual override A B 4 A L2 L1 58.5 P = 41 B 2 A 4 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P = 41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 17 22 51 69 117 D side 107.8 179 (Single, Double, 3 position, Rubber type) 184.5

Manifold Specifications

Symbol Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Symbol 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS3 C8 06 51 1 Thread type Series VZS3000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Rc 1 4 02 Stations Embedded type One-touch fitting Applicable tubing

E-P HYREG ® Series VY1

VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F

Manifold Specifications

VVZS3000-4-1 VVZS2000-4 14.4 x 12 x 1.2 7.5 x 4.5 x 1.5 VVZS2000-11-n (1) q Description Material Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS2000-11-1-1 (2) Assembly part no.

CP95

4 4 6.5 26 146 190 46 32.5 15 4 40 24 35 16 G 1/4 14 M6 x 1.0 6.5 M12 x 1.25 13 27 16 105 4 4 4 9 30 163 213 52 38 17 4 50 32 40 20 G 1/4 15.5 M8 x 1.25 8 M16 x 1.5 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 M16 x 1.5 16 31.5 16 121 6 4 9 12 37 194 259 75 56.5 24 5 80 40 45 25 G 3/8 19 M10 x 1.5 10 M20 x 1.5 21 38 16 128 8 4 11.5 14 46 218 300 95

CP95

4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

AS-F q !

E-P HYREG ® Series VY1 1

4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

MM 28 28 H 5 5 GB 5 5 GA 8 8 F 4 5 D 15 15 A 10 16 Bore size With air cushion With air cushion type is not available for 21-/22-CJ2.

IZx-OMP0064

0.1MPa 0.1MPa 0.2MPa 8 8 0.3MPa 0.2MPa Discharge time [s] Discharge time [s] 1 s s 0.4MPa 0.3MPa 0.4MPa 0.5MPa 6 6 0 0 0.5MPa 50 500 50 500 4 4 2 2 0 0 0 500 1000 1500 2000 0 300 600 900 1200 1500 mm mm Installation distance [mm] Installation distance [mm] 1) Without air purge For IZS41-1120/J/V-F 2) With High speed static neutralization cartridge With air purge, For IZS41-1120-F 2 6 0.3

Precision Regulator Series IR1000/2000/3000

In this way fine pressure variations are detected by the nozzle/flapper type pilot mechanism, and precise pressure adjustment is performed. q o !4 o SRP !5 !5 i SUP side passage OUT side passage SRF SUP side passage OUT side passage ARX20 VCHR IN q IN q w Bleed ITV !1 !3 !2 Bleed e w y IC PVQ OUT(2) SUP(1) OUT(2) SUP(1) u !0 !2 !

Stainless Steel One-touch Fittings Series KG

C A MS-5ALHU-3 MS-5ALHU-4 4.5 5.0 11.8 12.6 1.1 1.4 3.0 3.1 1.6 1.8 8 8.8 10.8 2.5 14.6 2.4 3.7 MS-5ALHU-6 7.0 MS-5ALHU-6 Hose nipple: MS-5H-4, -6 Effective orifice(mm 2) Weight (g) F E Part No. L B D MS-5H-4 MS-5H-6 15.5 16.5 6.5 8.5 2.1 4.0 2.5 3.7 7 8 7 8 1.8 2.5 Hose elbow: MS-5HLH-4, -6 B Effective orifice(mm 2) Weight (g) Part No.

KG

(mm) Note) D1 D2 L I Q M Nylon Urethane KGUD04-01 1 8 17 25 43.5 47 50.5 53.5 21 39.5 41 13 10.4 4.2 4.2 9.7 16 10.4 12.8 4 1 4 KGUD04-02 14 1 8 1 4 KGUD06-01 KGUD06-02 26 46.5 47.5 11.7 17 13.4 10.6 12.8 12.8 15.2 6 29 17 Reference dimensions after R thread installation.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

4 L-Bracket !5 !5 w e r !2 !4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.

Speed Controller with

Construction L-Bracket w e r t w e r t q Component Parts No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q o !0 !1 i y u q o !0 !1 i y q w e Component Parts No. Description Material Note 1 Body A PBT 2 Knob POM 3 Body B PBT 4 Needle PBT 5 Needle guide Brass Electroless nickel plating 6 U-seal HNBR 7 Spacer PBT1 Component Parts No.

Booster Relay Series IL100

9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !4 q Component Parts Replacement Parts No. Description Material Note 1 Body Aluminum alloy Silver baking finish Model Order no. Contents IL201 KT-IL201 Set of left nos. u, i, o, !2, !3, !6, !7, !8, !9 IL211 KT-IL211 Set of left nos. u, i, o, !0, !2, !3, !6, !7, !

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

3 Port Solenoid Valve Metal Seal Series VZ200 1

4 !

Precision Regulator

0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !