PSE550/300

Applicable pressure sensor PSE531 PSE541 PSE561 PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) pressure range 5%R.D.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

PSxx-OMU0002CN

DC1224 V10% DC1224 V 10 DC(+) DC(-) 8 DC1224 V10% DC1224 V10% DC(+) DC(-) 9 ( ) 10 11 -71No.PS-OMU0002CN-D No. / 5 m / 12 1015 10 SI (kPaMPa) ( ) 13 SI kPa,MPa 14 15 16 FUNC 17 -72No.PS-OMU0002CN-D No. 4 m 4 m FUNC (Er13) 18 10 10 () 19 () / ( ) () -73No.PS-OMU0002CN-D 80 mA 7 F.S.(3.5F.S.) 1 1F.S. 1 -74No.PS-OMU0002CN-D ZSE20A() ZSE20AF() ISE20A() 0.0-101.0 kPa -100.0100.0

PSxx-OML0002CN

DC1224 V10 DC12 24 V10 9 DC(+) DC(-) / / 10 ( ) 11 / 5 m / 12 1015 10 "-M" (kPaMPa) ( ) "-M" 13 SI kPa,MPa -53No.PS-OML0002CN-G No. 14 15 16 FUNC 17 4 m 4 m FUNC 18 10 10 () 19 () ( ) () / -54No.PS-OML0002CN-G 80 mA 7 F.S.(3.5F.S.)1 1 F.S. -55No.PS-OML0002CN-G ZSE30A() ZSE30AF() ISE30A() 0.0-101.0 kPa -100.0100.0 kPa -0.1001.000 MPa 10.0-105.0 kPa -105.0105.0 kPa -0.1051.050

Clean Air Module

/8 Restrictor (36.5) Clean air filter Note) One-touch fitting 12 103 85 13.2 34.8 3 (41) 111 59 71 80.4 41 59 59 Rc 3/8 (NPT 3/8) 521 3.5 (3.5) Note) This port is unavailable.

Coolant Valve

SGC SGH Large valve capacity VNC VNC Av factor 30 x 10-6 to 1600 x 10-6 (VNC1 to VNC7) Cv factor 49 to 100 (VNC8 to VNC9) VNH VND VCC TQ 617 Coolant Valve: Air Operated/External Pilot Solenoid VNC Series [Option] Note) CE-compliant: For D or DZ only How to Order Thread type Seal material Bracket (Valve size: 1/2/3/4) A B Rc G NPT NPTF Nil F N T NBR seals FKM seals None With bracket (VN-16

PFxx-OMP0001CN

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

47 49 61 63 69 74 73 78 95 100 6 8 6 8 8 10 8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread after

PSxx-OMM0006CN

DC1224 V10 DC1224 V10 9 DC(+) DC(-) / / 10 ( ) 11 / 5 m / 12 1015 10 "-M" (kPaMPa) ( ) "-M" 13 SI kPa,MPa -57No.PS-OMM0006CN-E No. 14 15 , 16 FUNC 17 4 m 4 m FUNC 18 10 10 () 19 () ( ) () / -58No.PS-OMM0006CN-E , 80 mA 7F.S.(3.5F.S.) 1 1F.S. 1 -59No.PS-OMM0006CN-E (M8(3 )62 ) ZSE40A() ZSE40AF() ISE40A() 0-101.3 kPa -100.0100.0kPa -0.1001.000 MPa 10.0-105.0 kPa -105.0105.0kPa

PSxx-OMM0002CN

DC12~24V10% DC12~24V10% DC(+) DC(-) 9 / / 10 () 11 /5 m / 12 10~15 10 "-M" (kPaMPa) ( ) "-M" 13 SI kPa,MPa -47No.PS-OMM0002CN-F No. 14 15 16 () 17 () ( ) () / -48No.PS-OMM0002CN-F 80mA 10 1 1dight 1 -49No.PS-OMM0002CN-F ISE80() ISE80H() ZSE80() ZSE80F() -0.11MPa -0.12MPa 0-101kPa -100100kPa -0.1051.1MPa -0.1052.2MPa 10-111kPa -110110kPa 2 MPa 4 MPa 500 kPa 0.001 MPa

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

14.2 18.5 10 23 21 39.2 15.2 32.1 13.2 6 34 17 34.4 25.2 17.7 15.2 17 8 36 12 18.5 36.4 41.1 36.1 35.6 30.6 27.2 18.5 18.5 10 38 21 18.3 44.5 35.3 13.2 6 R 1/4 63 17 39.3 27.8 15.2 8 65 18.5 41 29.5 21.3 49.9 44.9 44.4 39.4 18.5 10 67 21 43.1 31.5 20.9 12 69 22 44.3 32.8 19 14 23 13.2 6 58 17 39.3 27.8 15.2 8 60 18.5 41 29.5 R 3/8 19.8 47.4 42.4 42.4 37.4 18.5 10 62 21 43.1 31.5 20.9 12

SI Unit

Value range: 10 10, in 1 ms increments Unit: ms F_WD_Time 150 A CRC signature, which is calculated automatically via all F-Parameters and ensures error-free transmission of the F-Parameters.

Digital Flow Switch (Remote type monitor unit)

If an instantaneous flow of 10 L/min continues for 5 minutes, the accumulated flow will be 10 5=50 L. Accumulated flow external reset A function to reset the accumulated flow to zero by using an external signal. Accumulated pulse output A type of output where a pulse is generated every time a predefined accumulated flow passes.

XL-OMY0002

15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD-63,XLD-80,XLD-100 S 1 SUS304+ 4 1) S S O 2) S O FKM 5 O 6 S O 2 FKM 9 S SUS304 10 11 XL-OMY0002 6. 6-1.

LECA6_C

(P.48) 5() ()() () 6 10 - 3. 3.1.

High Vacuum L Type Valve

AS568-030-XN1 Note2) Refer to Chapter 4, Construction and Dimensions" (P. 10) for the part indication numbers.

ZQ-OM01601

DC24V10% DC24V 10% DC(+) DC(-) 8 / / 9 ( ) 10 , 5 m / / 11 1015 10 "-M" (kPaMPa) ( ) "M" 12 SI kPa,MPa 48 - No. 13 14 () 15 () / ( ) () 49 - 80mA 3.5 F.S.1 1F.S. 50 - 100.0-100.0 kPa 105.0-105.0 kPa 500 kPa 0.1 kPa DC24 V 10(p-p)10() 40 mA NPN PNP OUT1OUT2 80 mA DC26.4 V 2 V (80 mA ) 2.5 ms (20,100,500,1000,2000 ms ) 0.2F.S.1 digit 1 0 3 1/2 7 LED () 2% F.S

Rotary One-touch Fittings Series KS/KX

(inch) Thread UNF NPT UNF, M5, M6 10-32 UNF, M5, M6 Weight (g) H (Hex.)

AME

167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650 AME850 1 2 1 2 1 2 1 Please refer to page 14-20-57 for Made to Order Specifications. 14-20-41

2/3 Port Valve

12 55 63 74 1 4 1 2 1 1 2 VND50D-32A VND60D-40A VND70D-50A Flange/32F, 40F, 50F Port size VX VN VQ Model Pilot port Rc(PT) Applicable flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 VND50D-32F VND60D-40F VND70D-50F 4.2-41 VND Precautions Be sure to read before handling.