For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

The DIN rail is approximately 30mm longer than the length of manifold. 1.25 L dimensions L=12.5n+10.5 1 6 2 9 3 12 4 15 5 18 6 21 7 24 8 27 9 30 10 33 11 36 12 39 13 42 14 45 15 47 16 50 17 53 18 56 19 59 20 62 Station No. 85.5 123 160.5 198 235.5 273 310.5 348 385.5 423 460.5 498 535.5 573 598 635.5 673 710.5 748 785.5 L DIN rail mounting bracket VVQZ100-DB-5 This bracket is used for mounting

NCY2 series

Magnetic Holding Power (lbs. force Series NCY2B Cylinder Theoretical Output 06, 410 100 o'15, 025,032, Q40 ^1100 3rooo I s00 I eoo g 7oo i m o 90 80 70 60 50 40 z 3 E .9 !

NCY2 series

Magnetic Holding Power (lbs. force Series NCY2B Cylinder Theoretical Output 06, 410 100 o'15, 025,032, Q40 ^1100 3rooo I s00 I eoo g 7oo i m o 90 80 70 60 50 40 z 3 E .9 !

EX120/121/122

specification Environmental resistance Release 2.0 Ver. 1.10 Version Note 1) 156 k/625 kbps 2.5 M/5 M/10 Mbps 750 kbps 28.5 kbps Communication speed 125 k/250 k/500 kbps 28.5 kbps 29.4 kbps Specified file Note 2) EDS file 32/32 (1 station, remote I/O stations) Occupied area (Number of inputs/outputs) SCS1: 0/16 SCS2: 0/8 SSL1: 0/16 SSL2: 0/8 16/16 0/16 0/16 0/16 Terminal resistor Not applicable 15

ZK2-C

NO.ZK2-OM00801-B // ZK2-ZSV-A A 2 9 10 11 14 14 15 16 16 17 17 20 20 20 F0 22 F1 OUT1 23 F2 OUT2 25 F3 27 F4 28 F6 30 F11 31 F80 32 F81 33 F90 34 F96 36 F98 37 F99 39 40 B 43 44 45 51 52 52 -1NO.ZK2-OM00801-B (ISO/IEC)(JIS)1)2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Rotate the pressure gauge cover 15 degree counterclockwise to pull out the pressure gauge cover. AW20(K) AW30(K) AW40(K) AW60(K) 2) Remove the pressure gauge. Rotate two mounting screws counterclockwise with Phillips head screw driver to remove the pressure gauge and two mounting screws.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i 48 Series PF2D Dimensions: Remote Type Sensor Unit PF2D504-11/520-13 60 70 176 40 15 A Model PF2D504 PF2D520 9.52 12.7 62 52 42 A Internal circuits and wiring examples z to , are the terminal numbers. 4-4.5 Display unit (PF2D30/31) Sensor unit 52 1 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 8 4 Load + 12 to 24 VDC White 7 3 Black 5 1 Blue 18

Smooth Cylinder Series CQSY

, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

Compact Guide Cylinder End Lock Type SeriesMGP

Bore size (mm) Bore size (mm) DL DM HR LL MO DB Over 25 to 75st 98 Over 75 to 175st 118 Over 25 to 75st 13.5 Over 75 to 175st 33.5 Over 175st 25st or less 25st or less Over 175st 22 22 9.5 21 15 15 84.5 140 16 0 55.5 32 32 26 23 11.5 25.5 21 19 91 98 118 140 16 0 7 27 49 40 40 24 23 13 27 21 19 50 97 114 134 161 20 0 17 37 64 50 25 25.5 11 25 21 19 63 102 114 134 161 20 0 12 32 59 63

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

Magnetic Holding Power (lbs. force Series NCY2B Cylinder Theoretical Output 06, 410 100 o'15, 025,032, Q40 ^1100 3rooo I s00 I eoo g 7oo i m o 90 80 70 60 50 40 z 3 E .9 !

Pulse Valve

Tightening Torque for Piping Size Wrench tightening angle Tightening torque 1 (25A) 10 to 15 50 to 100 Nm Procedure for installing the valve on the tank Connection thread Proper tightening torque [Nm] Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 28 to 30 Rc1 36 to 38 Rc1 1/2 40 to 42 5.

Micro-Mist Separator with Prefilter Series AMH

:l 3/86 female thread Maintenance l--I space ~ Drain H I I Dimensions with mounting bracket Model Port size A B C D E F G I J 1 K 1 L 1 MI N I 01 P I 01 RI s B AMH850 11 /2 , 2 460.5 42 348 220 57.5 220 10 463.51 180 I 30 I 15 I 24 I 13 1120 1184 1 220 1110 1 18 I 6 6 SeriesAMH Made to Order Specifications ICD With Differential Pressure Gauge (GD40-2-01) I@ With IN-OUT Flange For ease of

Aluminum High Vacuum Angle Valve

Inrush current flow time (Reference) 200V Current XLA 100V XL XL XLQ XM XY 0 5 15 10 20 25 30 Time (second) DXSA XVD XGT CYV 459 A XL Series Glossary 1 Shaft Sealing Method 2 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing. The two major bellow types are: Formedbellows and Welded-bellows.

AFF

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Selection of air quality by purpose For these cases, degree of quality is 15 4 +3 5 specified as 1, 4, and 2 respectively. 40 5 +7 25 Refer to Guide (1). Refer to Guide (2). Refer to Guide (3). Refer to below piping system chart. Refer to Guide (4) page 14-14-4.

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 18 Stations, A B Port Size: N7T (1/4" One-touch Fitting)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 20 Stations, A B Port Size: C6 (ø6 One-touch Fitting)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: N7N (1/4" One-touch Fitting NPT)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 9 Stations, A B Port Size: N7N (1/4" One-touch Fitting NPT)

Piping: 42 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: 01 (Rc1/8)