Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

M5 x 0.8 14 12.5 21.5 19 22 19 19 16 16 14 6 5 7.6 depth 6.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106 97.5 116 126 100 88.5 93.5 103.5 108.5 135 145 40 36.5 110 98.5 113.5 9.5 depth 8 105 115 120 125 83 88 93 98 103 108 118 128 106 111 116 121 126 131 141 151 5.5 9 4.5 20 25 15.5 18 32 50 10 29 40.5 M8 x 1.25 9.5 depth 9 22 22 23 20 8 748

IDX-OM-W014

V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W014 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W014 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W014 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDU Series i-2 i-3 IDX-OM-W014 i i 2 6 WARNING !

IDX-OM-W023

V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W023 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDU Series i-2 i-3 IDX-OM-W023 i i 2 6 WARNING !

Compressed Air Preparation Filter

v*14 v*14 v*14 v*14 *1 The drain guide is either NPT1/8 (applicable to the AFF20, AM20, and AMD20) or NPT1/4 (applicable to the AFF30 to AFF60, AM30 to AM60, and AMD30 to AMD60).

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

23 246 264 42 30 269 Z + Stroke ZZ + Stroke Double clevis(D)/Locking at head end (Hl) Wl Hl/ Rl (mm) Port Cushion valve Stroke range Bore size (mm) +0.3 +0.1 CDH10 U Z RR CZ Z L CX ZZ ZZ CDH10 32 40 50 63 80 100 up to 500 10 13 162 10.5 28 170 23 14 172.5 180.5 up to 500 10 13 171 11 28 184 23 14 182 195 up to 600 14 17 194 15 40 206 30 20 209 221 up to 600 14 17 194 15 40 206 30 20 209

HRX-OM-W032

This function resets the accumulated operation time. 5.16 14 Anti-freezing Circulating fluid is protected from freezing during winter or night.

Process Valve Series VNA

Note 2) VO307 only DZ DIN terminal with light/surge voltage suppressor Accessory Function plate for VO301 (D seal, with thread): DXT060-32-4A Function plate for VO307 (D seal, with thread): DXT152-14-1A 406 Series VNC Specific Product Precautions Be sure to read this before handling.

LUBRICATOR

HOW TO ORDER AL 30 03 BD 1N A 1 3 4 5 2 1 Symbol Description Body size 10 20 30 40 50 60 Meter thread (M5) Rc N NPT F G Thread type Nil 2 M5 M5 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Port size 3 Nil Without mounting option B With bracket 4 Option(Mounting) Nil Polycarbonate bowl 2 Metal bowl 6 Nyron bowl 8 Metal bowl with sight glass C With bowl guard (steel plate) 6C With bowl guard

ZSP1

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Gas Select compatible materials of construction for the gas Operating pressure Vacuum to 125 psig (0.9 MPa) Proof pressure 200 psig (1.4 MPa) Ambient and operating temperature 14 to 160F (10 to 71C) (No freezing) Cv 0.29 0.5 Leak rate 1 x 1010 Pam3/sec Connections Compression, Rc, R, NPT Actuation pressure 60 to 110 psig (0.4 to 0.76 MPa) Actuation port connection M5 x 0.8 Actuation port

Clean Regulator

Applicable tube O.D.: 4 Fitting: KQH04-M5-X17 14 EXH OUT 16.6 IN OUT 864 SRH Series Made to Order Specifications 2 Please contact SMC for detailed dimensions, specifications and lead times.

ZSP1

Refer to pages 16-14-3 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13 for Precautions on every series. Caution If a positive pressure is applied to the switch, such as a vacuum break, the output will turn ON (illuminating the indicator light).

2/3 Port Valve

B(9.5) B(12.7) B(19.1) 1B(25.4) 1 B(31.8) 1 B(38.1) 2B(50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 Caution Warning 1Piping When operation is suspended, surge pressure will be generated between the cylinder and VNA11A.

RB/RBL/RBQ

Dimensions B RB08-X331 RB10-X331 RB14-X331 RB20-X331 RB27-X331 Mounting bolt X T MM L H D Part no. 4.5 drill, 8 counterbore depth 4.4 10 7.5 20 32 M8 x 1.0 15 M4 5.5 drill, 9.5 counterbore depth 5.4 12 9.5 25 40 M10 x 1.0 19 M5 9 drill, 14 counterbore depth 8.6 16 12.5 34 54 M14 x 1.5 25 M8 11 drill, 17.5 counterbore depth 10.8 22 19 44 70 M20 x 1.5 38 M10 13.5 drill, 20 counterbore depth

VS7-6

VS7-8-FG-S AXT510-12 AXT510-21 AXT510-13 AXT510-13 AXT510-13 AXT510-14-2 AXT510-14-2 AXT510-14-2 AXT510-14-1 AXT510-14-1 AXT510-14-1 MY-16N MY-16N MY-14N Description No.

RB/RBL/RBQ

14 16.2 16.2 4 4 MK(2) Note) L, LL and S dimensions of RBL(C)1007/1006 are different from those of RB(C)1007/1006.

IDX-OM-O004E

Specification for Option T 14 . 1 Safety instructions . 14 1 14 . 2 Specifications . 14 1 14 . 3 Remote operation . 14 1 14 . 4 How to connect the power and signal cable . 14 2 14 . 5 Electric wiring diagram . 14 3 i Safety Instructions Safety Instructions Before using the product be sure to read and understand all the important actions highlighted in this manual. i.1 Warning: Before using

7

) Grommet 3 m 2-wire Solid state auto switch CKG1 24 VDC 2-color indicator 5 m 2-wire (34) Relay, PLC Pre-wired connector 0.3 m 2-wire (14) 3 m Grommet 2-wire 5 m 2-color indicator Pre-wired connector 24 VDC 2-wire (14) 0.3 m Reed auto switch DC/AC magnetic field CKP1 3 m 24 VDC 100 VAC 1-color indicator Grommet 2-wire 5 m DNote 1) Refer to page 433 when ordering the auto switch mounting

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Refer to p.3.4-14. Auto Switch Mounting Bracket Part No.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Refer to p.3.8-14. Auto Switch Mounting Bracket Part No.