Finger opening port M3 x 0.5 Finger closing port A C 32 25 25 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port 3-3 depth 6 +0.02 0 (A, B, C common view) 6-M3 x 0.5 thread depth 6 (A, B, C common view) 29 9h9 0 0.036 32 1 5 15 10 (35) 7 14.5 2 8 0 0.05 2 3 0 0.02 3 0 0.02 Open: 16 Closed: 10 2-M3 x 0.5 thread depth 6 (Thread for mounting attachment) 12 12 4 4 4 4 12-5-10 11 2 Finger
position 32 B 36 8.5 120 120 9.5 A C 32 Finger opening port M3 X 0.5 Finger closing port M3 X 0.5 25 25 MHZ2 3-3 depth 6 +0.02 0 M3 X 0.5 Finger opening port M3 X 0.5 Finger closing port (A, B, C common view) MHZJ2 6-M3 X 0.5 thread depth 6 (A, B, C common view) MHQ MHL2 Auto switch mounting groove 29 MHR 9h9 0 -0.036 2-4.2 MHK 9.6 4.7 32 1 MHS 4.7 3 10 2-3 (35) MHC2 8 15.5 MHT2 13.4 2 8
L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VQZ 285.5 21 273 No.
L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32
Note 4) When specifying more than one option, indicate them alphabetically. 2.10-32 VQZ100/200/300 Base Mounted Specification Piping specification (1) Manifold base weight (g) Applicable Applicable Piping Series Base model valve Port size station 1(P), 3(R) 2(A) C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) Side Top VV3QZ15-lll VQZ1l5 VQZ100 2 to 20 2 stations:83 Additional station:19
4.7 8.0 12 18 29 48 [kPa] -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -6No.
11.5 15 19 4.5 M22 x 1.5 5 10 20.5 25 17.5 15 27 31.5 24 Note) E and F should be machined in a concentric manner.
Symbol Bore size (mm) A A' B B' D E F GA GB H J R MM FC NN FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 7 M3 x 0.5 3.4 M10 x 1.0 1.6 24 16 32 10 10 12 15 17 5 13 8 6 7 20 7 8 M4 x 0.7 4.5 M12 x 1.0 1.6 28 18 37 15 12 14 20 19 6 15.5 10 6 7 24 9 10 M5 x 0.8 5.5 M14 x 1.0 2.3 36 22 49 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P
3.13.2 Circulating fluid electrical conductivity . 3-19 3.13.3 Circulating fluid discharge pressur . 3-19 3.13.4 Circulating fluid flow rate . 3-19 3.13.5 Status flag . 3-20 3.13.6 Alarm flag. 3-21 3.13.7 Data display . 3-22 3.13.8 Circulating fluid set temperature . 3-22 3.13.9 Operation instruction . 3-23 3.13.10 Data instruction . 3-23 Chapter 4 Communication alarm function . 4-1 4.1
(H) FF FE EE 90 h (H) Address.9 Address.8 90h EEh 15bit 8bit 7bit 0bit (L) FF FE EE 90 h (L) 45 - 11.2 (IN Data) [ID], ID=1 ID=1 bit 7 6 5 4 3 2 1 0 Address 18 19 (1) (GW [IN Data] Address.18, bit0) LEC 1(ON)0(OFF) (2) (GW [IN Data] Address.18, bit1) LEC 0(OFF)1(ON) (3) (GW [IN Data] Address.19, bit0) (GW [OUT Data] Address.2, bit0)1(ON) LEC 1(ON)0(OFF) (4)(GW [IN Data] Address.19, bit1
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60
L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.
Pressure Control Equipment Fitting type One-touch fittings for regulator block 6.5 Symbol Nil L1 Type Straight Elbow X X Fitting size Y Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Semi-standard Description None Oil-free Symbol Nil X17 Y 19 19.5 22 X 3 3 7 X 11.5 11.5 11.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Air Preparation Equipment Industrial Filters Replacement Procedure Actuators
Pressure Control Equipment Fitting type One-touch fittings for regulator block 6.5 Symbol Nil L1 Type Straight Elbow X X Fitting size Y Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Semi-standard Description None Oil-free Symbol Nil X17 Y 19 19.5 22 X 3 3 7 X 11.5 11.5 11.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Air Preparation Equipment Industrial Filters Replacement Procedure Actuators
AXT632-45-14 AXT632-45-16 AXT632-45-17 AXT632-45-18 AXT632-45-19 No.
D-P79WSE D-P74 B 32 A Hs 5 Note) The above drawing is the switch rod mounting example for the D-P79WSE. D-M9/M9W D-M9A/A9 B A Hs Note) The above drawing is the mounting example for the D-M9 and D-A9. Operating Range Minimum Stroke for Auto Switch Mounting Unit: mm Unit: mm Bore size With 2 pcs.
PV SV HRS090 Series 2.4 Setting and checking 2-13 HRX-OM-T004 Chapter 2 Contact input/output communication 32. Select contact output 3 function from the table below with [] key or [] key, and confirm by pressing SEL.
Parameter Configuration using Setup software (MR Configurator2TM)17 5.1 Setup software (MR Configurator2TM) . 17 5.1.1 Installation Method .17 5.2 Basic driver set-up for Initial Test Drive . 17 5.2.1 Start up the Setup software (MR Configurator2TM) .18 5.2.2 System Settings .19 5.2.3 Model Selection .19 5.2.4 Driver ON LINE Check .20 5.2.5 Help Function .20 5.3 Parameter setting (Driver
(mm) TIL19 3/4" 3/4" x 5/8" 19.05 TIL25 1" 1" x 7/8" 25.4 TL0403 4 x 3 4 TL0604 6 x 4 6 TL0806 8 x 6 8 TL1008 10 x 8 10 TL1210 12 x 10 12 TL1916 19 x 16 19 TIL01 1/8" TILB01 1/8" 1/8" x 1/16" 3.18 TIL05 3/16" 3/16" x 1/8" 4.75 TIL07 1/4" 1/4" x 5/32" 6.35 TIL11 3/8" 3/8" x 1/4" 9.53 TIL13 1/2" 1/2" x 3/8" 12.7 1/8" x 0.086" Basic diameter 3.18 +0.2 0.1 +0.2 0.1 1.6 0.15 1 0.1 Tolerance
" A A 5.1 (Pitch) P=10.5 18.5 M5 x 0.8 (A port) Station n L1 L2 3 58 50 Station 20 236.5 228.5 6 89.5 81.5 8 110.5 102.5 10 131.5 123.5 Station 2 47.5 39.5 4 68.5 60.5 5 79 71 7 100 92 9 121 113 11 142 134 12 152.5 144.5 13 163 155 14 173.5 165.5 15 184 176 16 194.5 186.5 17 205 197 18 215.5 207.5 19 226 218 14