3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300 Note 4) When specifying more than one option, indicate them alphabetically. 2.10-32 VQZ100/200/300 Base Mounted Specification Piping specification (1) Manifold base weight (g) Applicable Applicable Piping Series Base model valve Port size station 1(P), 3(R) 2(A) C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) Side Top VV3QZ15-lll VQZ1l5 VQZ100 2 to 20 2 stations:83 Additional station:19
Brown Brown White White Pink Pink Gray Gray Sky blue Sky blue Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.
Qty. 2 HYCB32H-PS 19 is a non-replaceable part, so it is not included in the seal kit. HYCB32-PS HYCB40-PS HYCB50-PS HYCB63-PS 32 40 50 63 !5 !6 !7 !8 19 @1 Cushion seal Resin Qty. 2 HYCB40H-PS External seal: Rod seal, the tube gasket and needle scraper are made from FKM. Seal kit includes !5, !6, !7, !8 and @1. Order the seal kit based on each bore size.
Qty. 2 HYCB32H-PS 19 is a non-replaceable part, so it is not included in the seal kit. HYCB32-PS HYCB40-PS HYCB50-PS HYCB63-PS 32 40 50 63 !5 !6 !7 !8 19 @1 Cushion seal Resin Qty. 2 HYCB40H-PS External seal: Rod seal, the tube gasket and needle scraper are made from FKM. Seal kit includes !5, !6, !7, !8 and @1. Order the seal kit based on each bore size.
32.2 8 M5 x 0.8 21.5 10 4 M A L 17 4 4 4 10 14 18.5 16 1/8 1/4 7 12 H Connection threads 8 22 12 5 M5 x 0.8 (R) 6 18.5 10 10 12 14 18.5 19 25.5 23.5 30.5 25.5 26.5 25 7 14 14 13 24 23 23 46 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 (R) Applicable tubing 8 20.5 26 18 14 10 23 41 29 17 M L A 19 22 H 12 24 58 46 Connection threads Reference dimension for R threads after installation Male Elbow: KPQL
Construction Back portion of 125 to 250 head covers (1) (4) (5) (6) (7) (8) (9) (10) (11) (2) (33) (12) Air supply port Air exhaust port Top portion of 320 head cover (13) (14) (15) (16) (17) (27) (28) (29) (30) (33) Cross-section portion of 320 rod end (3) (18) (19) (20) (21) (22) (23) (24) (25) (26) (31) (34) (35) (32) No. Name Material / Surface treatment No.
LEKFS series slider type / Common precautions . 19 3.1 Design / selection . 19 3.2 Handling . 19 3.3 Mounting . 20 3.4 Precaution on maintenance . 21 3.5 How to detach and attach the dust seal band . 22 3.6 Replacement of belt . 23 4.
7 32 7 34 6 6 NS 52.5 + Stroke 68 + Stroke 32 20 11 15.5 20 15 10 + Stroke 15 4 x M5 x 0.8 Depth 8 20 Note 1) Refer to Specific Product Precautions for mounting of the Compact Slide and a workpiece.
Select a bore size in accordance with Model Selection on page 18 and 19. 2. Displacement may increase after an impact load has been applied.
a (sfo) valw & R9. to Manitold: NxT 3+17-2 (rnorudd in Kit) &32 x 3v. " IN$TALLANOX: loptional) Valv/Fg./Spsd Conlrol lo Manitoldr NXT 33317.3 (Ord6r sopa|aisly) &32 x 3 94 " Th inlrfca rgulalor is moo.led bstvn lhe meitold and vd$ unirs as show. in lh illuslrarth. xot,l{rnG SINGLEINTERFACEAEO. TIOT'BLE NTEBFACE AEG. G!ug.!: (For usswirh sPR0101only) optlon PslG Pan No. .fr[.-'l.
4.7 8.0 12 18 29 48 [kPa] -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -6No.
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60
L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.
11.5 15 19 4.5 M22 x 1.5 5 10 20.5 25 17.5 15 27 31.5 24 Note) E and F should be machined in a concentric manner.
Symbol Bore size (mm) A A' B B' D E F GA GB H J R MM FC NN FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 7 M3 x 0.5 3.4 M10 x 1.0 1.6 24 16 32 10 10 12 15 17 5 13 8 6 7 20 7 8 M4 x 0.7 4.5 M12 x 1.0 1.6 28 18 37 15 12 14 20 19 6 15.5 10 6 7 24 9 10 M5 x 0.8 5.5 M14 x 1.0 2.3 36 22 49 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P
3.13.2 Circulating fluid electrical conductivity . 3-19 3.13.3 Circulating fluid discharge pressur . 3-19 3.13.4 Circulating fluid flow rate . 3-19 3.13.5 Status flag . 3-20 3.13.6 Alarm flag. 3-21 3.13.7 Data display . 3-22 3.13.8 Circulating fluid set temperature . 3-22 3.13.9 Operation instruction . 3-23 3.13.10 Data instruction . 3-23 Chapter 4 Communication alarm function . 4-1 4.1
(H) FF FE EE 90 h (H) Address.9 Address.8 90h EEh 15bit 8bit 7bit 0bit (L) FF FE EE 90 h (L) 45 - 11.2 (IN Data) [ID], ID=1 ID=1 bit 7 6 5 4 3 2 1 0 Address 18 19 (1) (GW [IN Data] Address.18, bit0) LEC 1(ON)0(OFF) (2) (GW [IN Data] Address.18, bit1) LEC 0(OFF)1(ON) (3) (GW [IN Data] Address.19, bit0) (GW [OUT Data] Address.2, bit0)1(ON) LEC 1(ON)0(OFF) (4)(GW [IN Data] Address.19, bit1
Pressure Control Equipment Fitting type One-touch fittings for regulator block 6.5 Symbol Nil L1 Type Straight Elbow X X Fitting size Y Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Semi-standard Description None Oil-free Symbol Nil X17 Y 19 19.5 22 X 3 3 7 X 11.5 11.5 11.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Air Preparation Equipment Industrial Filters Replacement Procedure Actuators
Pressure Control Equipment Fitting type One-touch fittings for regulator block 6.5 Symbol Nil L1 Type Straight Elbow X X Fitting size Y Size 4 6 5/32 1/4 Symbol C4 C6 N3 N7 Semi-standard Description None Oil-free Symbol Nil X17 Y 19 19.5 22 X 3 3 7 X 11.5 11.5 11.5 Fitting size 4, 5/32 6 1/4 Fitting size 4, 5/32 6 1/4 Air Preparation Equipment Industrial Filters Replacement Procedure Actuators
AXT632-45-14 AXT632-45-16 AXT632-45-17 AXT632-45-18 AXT632-45-19 No.