Compact and Lightweight

Applicable model Stations Contents2 Screw Accessories ZH2-TB101-A 1 M3 x 20 2 pcs. ZH2-TB102-A 2 M3 x 35 2 pcs. Hexagon nut (M3) 2 pcs. ZH05DA ZH07DA ZH10DA ZH2-TB103-A 3 M3 x 50 2 pcs. ZH2-TB104-A 4 M3 x 65 2 pcs. Flat washer (for M3) 2 pcs. ZH2-TB106-A 6 M3 x 95 2 pcs. ZH2-TB108-A 8 M3 x 125 2 pcs. ZH2-TB201-A 1 M4 x 30 2 pcs. ZH2-TB202-A 2 M4 x 50 2 pcs.

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

x 0.5 (port size) 6 3.5 M2.5 x 0.45 effective depth 5 Element 3 Width across flats 8 Width across flats 3.5 9 10 7 4 9h9 19 7 2.5 2-3.3 through 2-3.3 through 19 + Stroke 13 + Stroke 6.5 + Stroke 3 13 7 Single acting 3 3 Built-in magnet/CDUJB6 [5.3] [Auto switch] Element [Approx. 24] 24 + Stroke 18 + Stroke 11.5 + Stroke 3 Single acting Rod end male threads M3 x 0.5 Width across flats 5.5

S Couplers

If a socket without check valve is used, the check valve of the plug will not open. 343 KKA Series Flow Rate Characteristics Air Plug: With check valve Socket: With check valve Plug: With check valve Socket: With check valve 50 10 KKA9 Series (KKA9P-12F+KKA9S-12F) 45 9 KKA6 Series (KKA6P-04F+KKA6S-04F) 40 8 Flow rate m3/min (ANR) Flow rate m3/min (ANR) 35 7 30 6 KKA8 Series (KKA8P-10F+KKA8S

VK3000

(-Q) models Mounting Screw Tightening Torques Mounting Screw Tightening Torques Caution Body ported Base mounted Caution Manifold gasket Screw assembly VK3000-6-1A VK3000-6-2A M3: 0.6 Nm M3: 0.6 Nm Note) Mounting direction is not flexible.

IP8101 Series

Contents of LCD Display 19 Initial Adjustment 20 Change of Parameters for Initial Operation 20 Initial Adjustment 20 1.Selection of calibration mode 20 2.

VCB

Port size VCB2 VCW20-12-01A 34 40 25 30 12.8 12.8 5 4.5 6 13 1/8, 1/4 VCW30-12-02A 42 52 30 40 19 19 6 5.5 7 19 1/4, 3/8 VCB3 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-02A 42 52 30 40 23 23 6 5.5 7 19 1/4, 3/8 VCB4 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-06A 56 65 44 53 28.2 28.2 6 5.5 7 26 3/4 2 mounting screws (for mounting bracket) are included

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L CQ-M5 x 30L x 35L x 40L x 45L

Compact Cylinder/Guide Rod Type Series CQM

Hs A B A W CQS CQ2 RQ CQM Auto Switch Mounting Height (mm) MU Proper Auto Switch Mounting Positions (mm) D-M9 D-M9V D-M9W D-M9WV Auto switch model Auto switch model D-A9V D-M9V D-M9WV D-M9AVL D-A9 D-A9V D-M9AL D-M9AVL Bore size Bore size Hs 17 19 22.5 24.5 27 30.5 36.5 40 50 60 Hs 19 21 24 26 29 32.5 42 42 52 62 B 0.5 0 3.5 5.5 5 7.5 10.5 13.5 18 23 W 1.5 2 1.5 3.5 3 5.5 8.5 11.5 16 21 A

Refrigerated Thermo-chiller

Example of the conventional measurement units (Reference) Unknown 6.0C 20C 26C 1.2 m3/h Fluorinated fluid Density : 1.80 x 103 kg/m3 : Unknown : 6.0C (6.0 K) : 20C (293.15 K) : 26C (299.15 K) : 20 l/min : Fluorinated fluid Density : 1.80 x 103 kg/m3 Heat generation amount Q Circulating fluid temperature difference T (= T2 T1) Circulating fluid outlet temperature T1 Circulating fluid return

VK300

x 26 Round head combination screw M3 x 26 Round head combination screw Manifold gasket Manifold gasket Applicable base Applicable base VK300-45-1 Sub-plate VV3K3-40 (-Q) (S) 42 (-Q) VV5K3-40 (-Q) (S) 41 (-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41

EXxx-OMY0004

Appendix B: F-Parameters . 102 19. Appendix C: i-Parameters . 103 20. Appendix D: Diagnostic messages for parameter errors for PROFIsafe .. 104 21. Appendix E: Checklists . 105 22. Appendix F: Safety Characteristics. 109 23. Appendix G: EX245-FPS Timing Values . 110 24. Appendix H: Cybersecurity . 111 3 No.EX##-OMY0004 1.

DOC1003626

3.13.2 Circulating fluid flow rate . 3-19 3.13.3 Circulating fluid discharge pressure . 3-19 3.13.4 Circulating fluid electrical conductivity . 3-19 3.13.5 Status flag . 3-20 3.13.6 Alarm flag. 3-21 3.13.7 Data display . 3-22 3.13.8 Circulating fluid set temperature . 3-22 3.13.9 Operation instruction . 3-23 3.13.10 Data instruction . 3-23 Communication alarm function . 4-1 4.1 Communication

MLGC

86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 160 50 140 30 40 37 16 17 depth 12 37 95 10.5 M10 x 1.5 depth 20 142 19 22 110 194 80 170 35 45 42 19 Data P GD GK GL GQ GR H I J K L M N O Q R S Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 M5 x 0.8 54 4 4 35 105 50 25 M6 x 1 14 26 M10 x 1.5 depth18 95 9 70 4 103 M5 x 0.8 62 7 7 40 125 60 32 M8 x 1.25 14 31 M10 x 1.5 depth18 95 9

Compact Cylinder

OA (4 positions) (The same four-place size) K 2 x 4 x RA (RB) M B + Stroke L E A + Stroke Width across flats K M: Rod end male thread D H Hexagon width across flats B1 Rod end nut H1 C X L1 Rod End Male Thread (mm) Bore size (mm) B1 C D H H1 K L1 X 17 17 19 19 6 6 7 7 16.5 16.5 19.5 19.5 16 16 20 20 M10 x 1.25 M10 x 1.25 M12 x 1.25 M12 x 1.25 14 14 17 17 26 26 30 30 19 19 22 22 32 40 50 63

Series MXP Precision Air Slide Table

Contents 10 MXP10-PS 12 2 pieces of No.19 MXP12-PS 16 MXP16-PS MXPJ6 Description Material Note Parts list No.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 42 52 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 56 65 Two mounting screws (for mounting

Compact Cylinder

17 16.5 16 M10 x 1.25 6 14 26 19 19 19.5 20 M12 x 1.25 7 17 30 22 19 19.5 20 M12 x 1.25 7 17 30 22 Basic Style (mm) Bore size (mm) A B C D E F H I J K L M N OA OB Q RA RB T Z 32 40 50 63 51 44 12 16 46 8.5 M8 x 1.25 59 2 14 7 32.5 5.5 M6 x 1.0 9 14.5 11 5 1 15 52 45 12 16 52 9.5 M8 x 1.25 67 3 14 7 38 5.5 M6 x 1.0 9 14.5 11 5 1 17 53 45 16 20 64 10.5 M10 x 1.5 82 2 17 8 46.5 6.6 M8 x 1.25

MLGC

86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 37 40 160 50 140 30 16 17 depth 12 37 95 10.5 M10 x 1.5 depth 20 19 22 142 110 42 45 80 35 194 170 19 Data J K L H I GR O GK GL GQ N S P GD M Q R Bore size (mm) 20 25 32 40 M8 x 1.25 depth14 80 5.5 60 3.5 93 35 4 4 25 26 M5 x 0.8 54 50 14 105 M6 x 1 M10 x 1.5 depth18 95 9 70 4 103 40 7 7 32 31 M5 x 0.8 62 125 60 M8 x 1.25 14 M10 x 1.5 depth18 95 9