Vacuum Unit Series ZK2

With exhaust interference prevention valve Note 23, 25) W Exhaust interference prevention valve Note) Refer to page 31 when mounting single unit to DIN rail. 2

VFS4000-OMY0001

0.450.6 Nm M3 0.81.2 M4 1.42.5 13 No.VFS4000-OMY0001 11 1 2 3 14 No.VFS4000-OMY0001 EXH.

EXxx-OMP0004CN

SI () SI SI SI () ()SI SI SI IP67 M12/M8 SI ( ) SI SI ()SI CE -6No.EX-OMP0004CN-I SI SI PLC PLC SI IP -7No.EX-OMP0004CN-I EX260-SMJ 1 1 M12 32 /PNP() 2 M12 32 /NPN() 3 M12 16 /PNP() 4 M12 16 /NPN() MJ CC-Link -8No.EX-OMP0004CN-I 1 (BUS OUT) CC-Link () 1 (M12 5 A code) 2 (BUS IN) CC-Link (IN ) 1 (M12 4 A code) 3 SI 1 (M12 5 B code) 4 (M3

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

200 0.1MPa 0.1MPa 0 0 20 20 40 40 60 60 Gripping point L mm Gripping point L mm 4 Series MHS2 2 Finger Air Gripper Dimensions (mm) 1in = 25.4mm MHS2-16D to 25D 2-3.4, counter bore dia. 6.5 Counter bore depth SC (mounting hole) WA, depth 1.5 AA RA 3 AB RA VA, depth VB B NA RB NB RB XA, depth XB O Q 2-M4 x 0.7, thread depth 8 (mounting threads) 20 20 (Open DO) (Closed DC) FX FY FZ CB 7 4-M3

Stopper Cylinder Adjustable Mounting Height Type Series RSG

Correct mounting Incorrect mounting Auto switch Auto switch mounting screw M3 x 0.5 x 14l Auto switch mounting band (with brackets) 1. Wrap the mounting band around the cylinder tube, and place it in the approximate auto switch mounting position. 2.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

SY3 60 X90 5 7 Operating pressure range 100kPa to 0.7 Pilot pressure range 0.25 to 0.7 Manual override External pilot port M3 x 0.5 Make entries in the same way as for standard models. Specifications and performance are the same as those of standard models.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5 18 6 148 137.5 123 12.5 7 160.5 150 133.5 13.5 8 173 162.5 144 14.5 9 185.5 175 154.5 15.5 10 198 187.5 165 16.5 3 135.5 125 102 17 4 148 137.5 112.5 18 5 148 137.5 123 12.5 6 160.5 150 133.5 13.5 7 173 162.5 144 14.5 8 185.5 175 154.5 15.5 9 198 187.5 165 16.5 10 210.5 200 175.5 17.5 L1 L2 L3 L4 L1 L2 L3 L4 31

High Vacuum L Type Valve

Step 7 Reassembly of bonnet assembly (No.2) 3 Bolt 1 2 4 Bonnet assembly Port 1(P) Bolt size, Tool, Tightening torque of bolt (Nm) valve Bolt size Hex Tightening torque size wrench XLFV-16 M3 3 0.7 -25 M5 4 1.5 -40 M6 5 2.5 -50 M8 6 6.1 Body -63 M10 8 15 -80 Turn ON the solenoid valve to supply air pressure of 0.4MPa (G) to the port 1(P).

Wireless System

Round head screw (M3 x 8) 4 pcs. r Seal Cap (10 pcs.) Enclosed parts Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs. Be sure to mount a seal cap on any unused I/O connectors. Otherwise, the specified enclosure cannot be maintained.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

RSH/RS1H

How to change the positional relationship between the transfer and piping directions The positional relationship between the transfer and piping directions can be changed in 90 increments (or 180 increments in case of 20). 20 Loosen the fixing screw (M3) beside the rod cover and pull up the guide rod.

mb1

(Drill through) Note) Dd9 L l d m H B C CJ1 D Cotter pin 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 3 4 4 44 60 82 36 51 72 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 4.5 5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 CJP CJ2 Note) When

CM2

31 31 32 37 28 28 29 34 24.5 24.5 25.5 30.5 30 30 31 36 28.5 28.5 29.5 34.5 26.5 26.5 27.5 32.5 51 to 100 50 50 51 56 56 56 57 62 53 53 54 59 49.5 49.5 50.5 55.5 55 55 56 61 53.5 53.5 54.5 59.5 51.5 51.5 52.5 57.5 101 to 150 75 75 76 81 81 81 82 87 78 78 79 84 74.5 74.5 75.5 80.5 80 80 81 86 78.5 78.5 79.5 83.5 76.5 76.5 77.5 81.5 151 to 200 101 106 107 112 104 109 100.5 105.5

70astamb1

(Drill through) Note) Dd9 L l d m H B C CJ1 D Cotter pin 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 3 4 4 44 60 82 36 51 72 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 4.5 5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 CJP CJ2 Note) When

VQ5000

Junction cover + + 1 3 2 4 Terminal block Marking A side B side 6 mm Connection M3 screw 5 How to Order Manifold T1 03 SD VV5Q 5 1 Option 08 Symbol Option None Exhaust cleaner for Rc 1: D side exhaust Exhaust cleaner for Rc 1 1/2: D side exhaust Exhaust cleaner for Rc 1: U side exhaust Exhaust cleaner for Rc 1 1/2: U side exhaust Series Nil CD1 CD2 CU1 CU2 SB SD SU 5 VQ5000 Note) Note)

EXxx-OMO0027

Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Round head screw (M3 x 8), 4 pcs. (2)End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc.

Low Friction Cylinders Series MQ

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10.5 M5 x 0.8 M3 x 0.5 10 11.5 M6 x 1.0 M4 x 0.7 16 13.5 M8 x 1.25 M5 x 0.8 20 16.5 M10 x 1.25 M6 x 1.0 25 22.5 M14 x 1.5 M8 x 1.25 30, 40 Clevis pin d Dd9 m m l t L t Applicable bore size (mm) Applicable retaining ring Part no.

AMD

(MPa) Pressure drop (MPa) 0.1 MPa 0.1 MPa Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow rate (m3/min (ANR)) 1 2 AMD450 AMD850 1 2 1 B B 0.1 MPa 0.1 MPa Pressure drop (MPa) Pressure drop (MPa) Max. flow line 0.1 MPa 0.1 MPa Max. flow line Air flow rate (l /min (ANR)) Air flow rate (m3/min (ANR)) 14-20-24 4 Micro Mist Separator Series AMD Construction AMD150 to AMD650

High Power Cylinder Series RHC

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39

Tie-rod Type Hydraulic Cylinder

CHS CH2 Auto Switch Mounting Heights (mm) CHA CHA D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT D-B5/B64 D-B59W D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT Related Products D-M9V/M9WV D-M9AV D-A9V Bore size (mm) D-M9/M9W D-A9A D-A9 D-A5/A6 D-A59W D-G39/K39 D-A3 D-A44 DHs Hs Ht Hs Hs Hs Ht Hs Ht Hs Ht 40 31 31 36 31 38 33.5 39.5 33.5 38 72.5 82.5 50 36.5 36.5 40 36.5 43 39 44 39 43.5 78 88 63 40 40 45