Cylinder with Lock Series CNS

30 15 31 19 35 1/2 85.5 25 303 87.5 20 23 110 427 M14 x 1.5 M12 x 1.75 M30 x 1.5 28 30 30 15 31 19 35 1/2 93.5 25 343 95 20 28 110 473 M14 x 1.5 M12 x 1.75 M30 x 1.5 35 35 35 17 36 22 39 3/4 104 25 396 109 25 35 120 536 M16 x 1.5 M12 x 1.75 M36 x 1.5 With rod boot (mm) Stroke range (mm) Bore size (mm) l ZZ1 h 125 140 160 450 0.2 stroke 133 to 1000 496 0.2 stroke 133 to 1000 557 0.2 stroke

Air Cylinder

JM-045 JM-10 JM-10 JM-045 JM-045 *Components include in a seal kit.

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Non-lube type N Auto switch Air-hydro type (Except 10) H Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below. Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.)

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Non-lube type N Auto switch Air-hydro type (Except 10) H Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below. Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.)

ZL3-OM00601

Piping 10 3.5. Wiring 12 4. Solenoid Valve 13 5. Vacuum Pressure Switch 14 6. Vaccum release flow adjusting needle 15 7. Structural Drawing and Replacement of Parts 16 8. Maintenaunce 20 9. Specifications 21 10. Pneumatic Circuit 24 11. Exhaust Characteristics,Flow Characteristics, And Time required to reach the specified vacuum 25 11.1. Exhaust Characteristics 25 11.2.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

4 M A L 17 4 4 4 10 14 18.5 16 1/8 1/4 7 12 H Connection threads 8 22 12 5 M5 x 0.8 (R) 6 18.5 10 10 12 14 18.5 19 25.5 23.5 30.5 25.5 26.5 25 7 14 14 13 24 23 23 46 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 (R) Applicable tubing 8 20.5 26 18 14 10 23 41 29 17 M L A 19 22 H 12 24 58 46 Connection threads Reference dimension for R threads after installation Male Elbow: KPQL, KPGL Applicable tubing

PFxx-OMX0002

Product number Suitable screws Tightening torque Thread depth PF3A703H Equivalent to M4 1.5 Nm 10 7 PF3A706H Equivalent to M5 3 Nm 10 8 PF3A712H Equivalent to M6 5.2 Nm 10 9 Prepared by the user.

Low Friction Cylinders Metal Seal Type

to 25: 0.005 to 0.7 5 to 3000 MQMLH 0.01 to 0.7 High speed/frequency Features 1 Application Examples (Metal Seal Type) /10, 16, 20, 25, 30, 40 /6, 10, 1 6, 20, 25 For pressure controling with fine pressure variations Applicable models: MQQT/MQML Scrubber resistance enables to cover the range of a driving were not available with the general cylinder.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body) Model/Specifications AS220M-02 AS120M AS220M-01 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Tubing side Rc 1/8 6, 10, 15, 20, 25 20, 25, 32, 40 Applicable cylinder bore size (mm) 1.5 MPa Proof pressure 1.0 MPa Max. operating pressure 0.1 MPa Min. operating pressure 5 to

Series VCL

54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70

30

M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 H 5 5 6 6 6 7 7 7 8 10 10 11 B C 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 JC20-8-100 JC20-8-125 JC32-10-100 JC30-10-125 JC25-10-150 JC40-12-125 JC40-12-150 JC40-12-175 JC40-14-150 JC50-16-150 JC63-16-200 JC63-18-150 DA00207 DA00169 DA00141 DA00142 DA00140 DA00145 DA00146 DA00143 DA00148 DA00151 DA00150 DA00153 13 13

Cylinder

.. 24 17.5 4.5 M22x l .5 19 5 24 I ~ 17 13.5 , 10.5 ~ 10. 23.5 20 . 15 3Q,5 27 17 3.5 M15x l.S 12 4 10 . 24 5 19 14.5 11.5 15 10 25 20.5 15 31.5 27 ~. .. ~ '. ar. ' Panel Mount Type: CJPB NN Exhaust ~ Bore4>6:CO.5 \ \ 4>10. 1S:Cl ~, .. " ~.

VM

0.03 10 10 15 10 5 0.05 0.03 JIS Symbol How to Order 01 VR320 0 01 Port size Precautions Rc 1 8 NPT N01 1 8 Be sure to read before handling.

VDW

Series VXP 1 2 3 10 N.C.

IZx-OMP0064

Detecting port Installation Detection range distance mm mm 10 45 25 100 50 180 M3 screw Unit: mm A B 10 20 20 40 25 45 30 55 40 65 50 75 Mount a metal plate directly beneath the ionizer so that the metal plate faces the ionizer. Offset voltage may vary depending on the installation environment.

XLF Series

Specifications Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the

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Bore size(mfn) Standard stroke(mm) MGOftl Slide bearing MGor12, rc 10, 20, 30, 40, 50 MGOr2o,2s 20, 30, 40, 50, 75, 100 25, 50, 75, 100 MGOL Ball bush bearing MGOr32,40, 50, 63, 80,1OO . intermediate stroke As to intermediate stroke (5, 10, 15, 20, 30, 35 )' spacer of 5, 10' 15,20mm width will be used (Example) MGOM50-10 is produced by installing 1smm spacel in MGQM50'25 Consult factory when

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

PROFIBUS DP Compatible Fieldbus System

Contents Safety Instructions 3 Product Summary 8 System configuration 8 EX500 GW unit Model indication and How to order 9 Summary of Product parts 9 Mounting and Installation 10 Installation 10 Wiring 10 Setting 18 Specification 22 Specifications 22 Dimensions 24 SI unit Model indication and How to order 25 Summary of Product parts 26 Mounting and Installation 27 Installation 27 Setting 29

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

10 25 Ball screw specifications Shaft length [mm] Stroke + 284.5 Lead [mm] 50 25 10 Impact/Vibration resistance [m/s2] *5 50/20 Actuation type Ball screw Guide type Linear guide Operating temperature range [] 5 to 40 Operating humidity range [%RH] 90 or lessNo condensation 4.58 Actuation unit weight [kg] specifications 0.43 0.05 Other inertia [kgcm] Other *6 Friction coeffcient 0.8 Mechaincal