XL-OMY0002

30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AFF125A-30 IDF120D-3 AMD910-30 220 30.0 AT220C-40 AFF220A-40 IDF150D-3 50 Hz area 60 Hz area IDF1D-1 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF22C1-3 IDF37C1-3 IDF55C-3 IDF75C-3 IDF120D-3 IDF120D-3 IDF150D-3 AMD1010-40 AMH150-03 AMH150-03 AMH250-03 AMH250-03 AMH350-04 AMH350-04 AMH450-06 AMH450-06 AMH550-06 AMH550-10 AMH650-14 AMH850-20 AMH850-20 IDG10-03 IDG20-03 IDG30-03

Nozzle Type Ionizer

mA Residual voltage: 1 V or less (Load current at 40 mA) Max. applied voltage: 26.4 VDC Max. load current: 40 mA Residual voltage: 1 V or less (Load current at 40 mA) Error signal Output signal Maintenance signal Effective static neutralization range 20 to 500 mm Ambient temperature (Operating/Stored) 0 to 55C Ambient humidity (Operating/Stored) 35 to 65% RH (No condensation) Housing ABS

33

0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSE024-A-20/23-(T) [50 Hz] [60 Hz] 3000 3000 Ambient temperature Ambient temperature Cooling capacity [W] Cooling capacity [W] 25C 2500 2500 25C 2000 2000 1500 1500 35C 35C 1000 1000 40C 500 500 40C 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature

One-touch Fittings

28.4 6 14 1/4 KQ2Y10-02GS 17 15.9 15.6 17 20.6 28.6 20.6 44.6 15.6 40 28.4 7.5 24.5 3/8 KQ2Y10-03GS 17 15.9 15.6 17 20.6 29.5 20.6 45.1 15.6 40 28.4 7.5 25 1/2 KQ2Y10-04GS 22 15.9 15.6 17 20.6 33.5 20.6 47.8 15.6 40 28.4 7.5 47.4 Connection thread (With sealant) 10 Release button dimensions 12 1/4 KQ2Y12-02GS 17 18.5 18.2 17 23 29.9 23 48.3 17 57.4 45.4 9 27.6 3/8 KQ2Y12-03GS 17 18.5

VVX31/32/33

33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

UZ Without auto switch L 40 150 CM2X With auto switch CDM2X C73 Number of auto switches L 40 150 2 pcs. 1 pc.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X 32, 40, 50, 63, 80, 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder. How to Order B 40 30 D CQ2X Without auto switch With auto switch CDQ2X A73 B 40 30 D Number of auto switches With auto switch (with built-in magnet) Auto switch type 2 pcs. 1 pc. "n" pcs.

Multistage Ejector (N)ZL Series

40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100

Air Suction Filter

ZFA100 Port size Symbol Model A B 18 20 28 ZFA200 1 8 1 4 Manifold Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 ZFA200 1 8 1 4 Number of manifold stations Symbol Single unit Note) Model 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10

Suction Guard (Produced upon receipt of order) FHG Series

Reset button 508 Suction Guard FHG Series Dimensions A 135 170 10 A I 10 Port size: 20, 24 Port size: 04 to 16 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 10 10 B H L L M C D M Cap C D Cap Air breather Air breather (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer

Manifold Regulator Modular Type ARM2500/3000 Series

A C D E F G H B Composition of assembly Set nut (1349172) AP100 ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Inlet pressure (MPa) Set nut (131532) ARM3000 136414 75.5 8 41 40 6.5 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

AMPSeries

3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

AMP

10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.

Exhaust Cleaner for Clean Rooms AMP Series

3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Serial Transmission System Series EX250 Series EX500

Enclosure IP65 Enclosure Weight (g) IP65 [For M8: 20] [For M12: 40] [8 point integrated type, for M8: 55] Note) Weight (g) 100 (Input unit + end block) Note) Not including the DIN rail weight.

Rotary Actuator NCRA1 Series Single Rack and Pinion

40 '-140'F(5-60'C) Tube bqe nm (inch) 300%),soe),63(2 AirYolume (inch3) N,lodel Botdion 90": l ,'tgo' 1@' lgAlBllv3o 0.45 0.85 l{cRAlo50 1.95 2.n 415 r{cRAl0A3 3.66 7.32 4.09 l,rc8AloS0 13.49 7.51 14.22 ircRA101n 15al 31.61 17.57 *Kinelic rEgy is ttle n|ar abobd enqgD, wfi oplimum djustnnt of tle cr.hion Series:NCRAI NCRAAJ/3o, t'lCRAlOsO NCRATO$,80, {n r{cRAloso lo.2-2 irc8A106s 10.2-3

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Note 2) With indicator light and surge voltage suppressor ; clean air Note 3) Inrush 3.1W (10ms after energization), Holding 0.3W Note 4) Large-capacity with latching type coil is not available. 6 How To Order Series VQ100 How to Order Valve VQ1 1 0 5 F Series VQ Compact 3 port valve Manual override B Non-locking recessed type Locking tool type Type of valve actuation * 1 *Option Normal

IDX-OM-W038

N.C 3 N.O 1 2 7 6 5 4 N.O PE L N TB PLC GFCI ILS M C TC M C PLC THS M C OLR PTC CM PLC PTC C01 CM IDH6-10 TC IDH6 / IDHA6 TS M C F H SSR FM PRS P FM 1 IDH6/IDHA6 IDH6 / IDHA6 IDH6/IDHA6 IDH6 / IDHA6 CM FM OLR PRS ILS PTC PTC() MC THS TB TC TS SSR H F GFCI PLC 64 IDH Series IDX-OM-W038 . 6.4 6.3 IDH6 / IDHA6 1 65 IDH Series 6.4 IDX-OM-W038 7 7 7-1 / IDH Series 7-17-