ZMA

Number of stations Port and silencer location R L B 01 1 station Right side Left side Both sides 10 10 stations (max.) Note) Right and left side are viewed from the front side of VAC port. Thread type Common EXH port size 04 1/2 Nil T F Rc NPTF G 06 3/4 S Silencer dedicated for ZZMA (ZZM-SA) Indicate the ejector model no. below the manifold base no.

Digital Flow Switch

Number of pages has been increased from 16 to 28. VZ Edition B Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

KK

/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 167

Rotary Actuator/Vane Style Series CRB1

(When double solenoid is mounted) Solenoid B Solenoid A C2 (When double solenoid is mounted) B3 (When the needle is fully open) B2 2 x metering valve with silencer (EXH) ASN2-M5 (CVRB1BW50) ASN2-01 (CVRB1BW80, 100) Note 1) Solenoid valve in external appearance is for VZ 140-1G.

JXCx-OMU0024

(Maximum 16 records from the previous alarm, and maximum 8 records from the previous error.) Caution When it actually sets up or when failure is found, it is also necessary to refer to the manual of the actuator and the controller.

MHx-OMY0001

(Nm) L(mm) MHM-16D M6x1 5.2 11.5 MHM-25D M8x1.25 12.5 12.4 MHM-32D M10x1.5 24.5 13.5 MHM-50D M12x1.75 42 16 3.

VFS4000-OMY0001

No.VFS4000-OMY0001 / / VFS4000 . 1,2 1 . 3,4 2 1) . 5 2) . 6 3 . 7 4 . 7 5 1) DIN . 8 2) . 9 3) . 912 6 . 12 7 . 12 8 . 13 9 . 13 10 . 13 11 . 14 . 15 . 16 No.VFS4000-OMY0001 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical

Vacuum Pad with Ejector

Repair 16 10.1 Maintenance and Repair Precautions 16 10.2 Pad replacement 17 10.3 Ejector assembly replacement 18 10.4 Silencer assembly replacement 19 10.5 Supply (P) port one-touch fitting replacement 19 10.6 Ejector Body Assembly, Blanking Plate Assembly, Check Valve Replacement 20 11. Specification 22 12. Circuit examples 24 13.

Electromagnetic Digital Flow Switch

Check the power supply voltage, turn off the power supply, and then turn it on again. 16 LFE Series Made to Order Please consult with SMC for detailed specifications, delivery times, and prices.

Compact and

Piping diameter ZU05mA 0.5 90 48 7 13 14 3.9 18.6 ZU07mA 0.7 11 16 28 4.3 19.1 The piping diameter for each port should be the standard size of One-touch fitting.

AFF

6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AM AFF2B 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253

AME

16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 , , 1 4 3 8 , AME250 1 2 3 8 1 2 , AME350 3 4 14-20-40 5 Super Mist Separator Series AME AME450 to AME850 Dimensions Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket 2-port size

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 5.5 6 6 7 7 9 9 9 11 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 10 10 10 10 10 10 10 10 10 1 8 1 4 3 8 AMG150 , , 1 4 3 8 , AMG250 1 2 3 8

AMH

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMH150 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122

PFxx-OMK0003CN

PF-OMK0003CN-E / / PFMV5## 2 10 12 13 14 14 16 17 18 19 19 20 22 -1No.

SL5200

available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02 2PW Delivery pressure Option Ports Delivery pressure Code 0.5 to 10 psig (0.0034 to 0.07 MPa) Sub-atmospheric (A): 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Code Range options 1) Specification Code Ports 2 ports 3 ports Standard (Cv: 0.07) Code Specification Standard Sub-atmospheric 2PW 3PW No code 01

AW20-B to AW60-B

Note 15) Without a valve function Note 16) The combination of metal bowl: 2 and 8 is not available. Note 17) For pipe thread type: NPT. This product is for overseas use only according to the new Measurement Law. (The SI unit type is provided for use in Japan.) Cannot be used with M: Round pressure gauge (with color zone). Available by request for special.

Manifold with Stainless Steel Plate: S, Model: 51S6 (EX600), SI Unit: 0 (without SI Unit), SI Unit Output Polarity, End Plate: without SI Unit, I/O Unit Stations: None, Wiring Type: All Double Wiring, Valve Stations: 16 (16 Stations, All Double Wiring), Port Size: 01 [4(A)/2(B) Port: 1/8; 1(P)/3(EB), 5(EA) Port: 1/4], Thread Type: N (NPT), Option: P (Trim Plate)

Manifold with Stainless Steel Plate: S, Model: 51S (EX260), SI Unit: EAN (Negative Common, PNP; EtherNet/IPâ„¢; 32 Outputs; M12 Connector), Wiring Type: All Double Wiring, Valve Stations: 16 (16 Stations, All Double Wiring), Port Size: 01 [4(A)/2(B) Port: 1/8; 1(P)/3(EB), 5(EA) Port: 1/4], Thread Type: F (G), Option: P (Trim Plate)