Digital Pressure Switch ( compatible) Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5F 5 cores, 2 m, waterproof Front protective cover ZS-27-01 R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 -9No.PS-OMV0006-D Summary of Product parts Names of individual parts Operation light: Displays the switch operating condition.
Remarks Bracket A ZS-46-A1 Self tapping screws: Nominal size 3 x 8L (2 pcs) Bracket B ZS-46-A2 Self tapping screws: Nominal size 3 x 8L (2 pcs) Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5F 5 cores, 2 m, waterproof Front protective cover ZS-27-01 R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 One-touch fitting
Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-3L 3 cores, 2 m Front protective cover ZS-27-01 R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 One-touch fitting 4 mm straight ZS-46-C4H One-touch fitting 6 mm straight ZS-46-C6H One-touch fitting 1/4 inch straight ZS-46-N7H One-touch fitting 4 mm elbow ZS-46-C4L One-touch
Please note that when the product is shipped from the factory, gases such as N2 and air may leak from the valve at a rate of 1 cm3/min (when pressurized). LVD LVQ 2. When operated at a very low flow rate, the series LVD with flow rate adjustment may vibrate, etc. depending on the operating conditions.
Applications Pressure feed of chemical liquids Water trap Fluid temperature control Fluid outlet Discharge of chemical liquids N2 Mounting to the piping and/ or fluid passage Fluid inlet LQ series Male connector LQHB series Bore through connector LQ series Male connector LQHB series Bore through connector LQHB series Bore through connector Temperature sensor Fluid LQ series Male connector
Plug Part Number Bore size Part number Port thread type Quantity1 12 (10 x 2) 16 (12 x 2) P-M3 M3 8 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) P-M5 M5 8 P-R1 Rc1/8 8 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) P-N1 NPT1/8 8 P-G1 G1/8 8 P-R2 Rc1/4 8 80 (56 x 2) 100 (71 x 2) P-N2 NPT1/4 8 P-G2 G1/4 8 *1 1 set includes 8 pieces.
Plug Part Number Bore size [mm] Part number Port thread type Quantity 12 (10 x 2) 16 (12 x 2) P-M3 M3 8 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) P-M5 M5 8 P-R1 Rc1/8 8 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) P-N1 NPT1/8 8 P-G1 G1/8 8 P-R2 Rc1/4 8 80 (56 x 2) 100 (71 x 2) P-N2 NPT1/4 8 P-G2 G1/4 8 * 1 set includes 8 pieces.
Applications Pressure feed of chemical liquids Water trap Fluid temperature control Fluid outlet Discharge of chemical liquids N2 Mounting to the piping and/ or fluid passage Fluid inlet LQ series Male connector LQHB series Bore through connector LQ series Male connector LQHB series Bore through connector LQHB series Bore through connector Temperature sensor Fluid LQ series Male connector
Example) IS10E-30N03-6PRZ Left Right Symbol Description Nq Body size 20 30 40 Pressure switch with piping adapter Nw Pipe thread type Nil Rc N2 NPT F2 G + 23 E (13) 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 + Ne Port size (5000) (3000) (500) C (23) 0.1 0.3 a Set pressure range Nil 0.1 to 0.4 MPa 61 0.1 to 0.6 MPa + 0.2 0.4 Port size MPa B Nil 0.5 m L 3 m Z 5 m + Semi-standard b Lead wire length
Trichloride Carbon Dioxide CO2 BCl3 Boron Trifluoride Germane BF3 GeH4 Halocarbon114 Hydrogen C2ClF4 H2 Halocarbon115 Hydrogen Sulfide C2ClF5 H2S Halocarbon116 Hydrogen Selenide H2Se C2F6 Acetylene Hydrogen Bromide HBr C2H2 Halocarbon134A Hydrogen Chloride HCl C2H2F4 Ethylene Helium He C2H4 Halocarbon125 Hydrogen Fluoride HF C2HF5 Dimethylsilane Krypton Kr C2SiH8 HalocarbonR218 Nitrogen N2
SS Viton (Option: Teflon, Kalrez) Teflon Dimensions BP1000 2.12 (53.8) Max. 4.9 (124.5) Max. 5.6 (142.2) (Option: panel mount) 2.25 (57.2) 0.69 (17.5) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 2.00 (50.8) Flow Characteristics BP1000 30 0.21 28 0.19 Back pressure (MPa) Back pressure (psig) 26 0.18 24 0.17 22 0.15 20 0.14 18 0.12 16 0.11 0 20 40 60 80 100 Flow rate (slpm, N2
Parts Body Diaphragm Nozzle Seat Seal Hastelloy C-22 Hastelloy C-22 316L SS 316L SS Viton (Option: Teflon, Kalrez) Teflon Flow Characteristics Dimensions inch (mm) BP1000 BP1000 30 0.21 28 0.19 Back pressure (MPa) Back pressure (psig) 26 0.18 5.6'' MAX. (142) P OPTION 24 0.17 5.0'' MAX. (127) 22 0.15 1.50'' (38.1) 20 0.14 2.25'' (57.2) 18 0.12 16 0.11 0 20 40 60 80 100 Flow rate (slpm, N2
CX>erOtno PrOSSU'B Qcera,tnQ TEMPROl"IQB -1o-ecn: \oltrout rreezno Mn ooerathQ 1l'n8 1.0 ncarcl to i:i-1.0 .i to ll'dM "'1lhn looo rrrce to tre hard 150< I /rn==i: I 1 111 I I 11 :1 I 11 l i -&
to 4 Valve size 5 to 7 Electrical entry Symbol Table (1) Applicable Fluids VNAA (Valve material: NBR seal) VNAB (Valve material: FKM seal) VNAC (Valve material: EPR seal) GS Grommet with surge voltage suppressor G Grommet Model E Grommet terminal Air (Standard, Dry) Argon Helium EZ Grommet terminal with light/surge voltage suppressor Carbon dioxide (CO2) (Less than 0.7 MPa) Nitrogen gas (N2
Carbon dioxide (CO2, 0.7 MPa or less) Carbon dioxide (CO2, 0.7 to 1 MPa ) Nitrogen gas (N2) Argon Helium Water (standard, up to 60C) Water (up to 99C air operated type only) Flow rate characteristics (Air, Water) Turbine oil Spindle oil Fuel oil Class 3 (C fuel oil) To find the flow rate of air or water, refer to the table of flow rate characteristics on page 10 to 16.
Mounted Plug-in Unit VQ4000 Series Manifold Specifications Porting specifications Maximum applicable stations Applicable valve Weight [kg] (Formula) 4(A), 2(B) port location Series Base model Type of connection Port size 1(P), 5(R1), 3(R2) 4(A), 2(B) C6 (For 6) C8 (For 8) C10 (For 10) C12 (For 12) 1/4 3/8 N7 (For 1/4") N9 (For 5/16") N11 (For 3/8") F, L kit: 0.32n + 0.75 S, T kit: 0.32(n2
Fitting size (1/4) Orifice size (3) Application Introducing the full amount of supply pressure (Clean air / N2) all at once when returning the vacuum chamber to the atmosphere will cause particulates to get into the chamber. To prevent this, after slowly introducing the initial air supply and setting the pressure, switch to the main valve circuit to supply the full amount.
Suction rate 24 N2/min Leakage frOm adsorption 350, 0.96 1.50 2.33 3.83 6.00 9,34 " ... , m 0.82 1.28 2.00 3.28 5.12 8,01 Tube length " " lm, lube diajIoB/6 area between work and pad. Pad dia 1610 "'Nil 001 Ejectorl average suction rate 0'1= (Yz X) x 24Ni!
LQ1T22-SN (Union tee) 879 SRF Series Specifications SRF10 SRF30 SRF50 Model Proof pressure Maximum operating pressure Set pressure range 1.0 MPa 0.5 MPa 0.02 to 0.4 MPa 0.5 MPa Deionized water (Pure water), N2 5 to 60C 10 cm3/min or less (fluid: water) 0.24 Maximum operating pressure (pilot pressure) Fluid Ambient and fluid temperature Valve leakage Tubing Integrated fittings With nut 0.08
F(N) F(N) Stroke 105 15 9 110 115 14 120 8 125 130 13 140 150 7 12 175 5 200 11 0 1 2 Rotation angle Linear motion Number of Auto Switches Mounted 02 0S 0 S2 SS S0 1 Nil 2S 20 2 n2 nS n0 n Combinations of made-to-order products No. 1 to 4 are available. Please contact SMC for further information. 11-10-19