Fieldbus system Analog unit 1024 3 12 0400 1024 5.25 2.625 10.5 0072 114 1 4 0 0 0 0 0 0 0 0.75 3 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 Sign MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 Sign MSB AD value LSB -30No.EX-OMN0038-C (3)Scaled data format In the scaled data format, AD values corresponding to the output signal range can be optionally set
Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.
HEB HED Technical Data Related Products Temperature range setting: 68 to194F (20 to 90C) Cooling capacity:2 kW/8 kW/15 kW/30 kW Temperature stability: 0.54F (0.3C) More effective energy-saving through use of an inverter pump Power consumption Inverter type 0.5 kWh/h Facility water 0.32 gpm (1.2 L/min) International standards: SEMATECH S2-93, S8-95 SEMI Standard S2-0703, S8-1103, F47-0200
Magnet: Built-in, Mounting: Double Clevis, Bore Size: 1 1/2", Stroke A: 4", Stroke B: 4", Auto Switch: B54--Reed, DC Volt >5 <24, AC Volt <200, LED, Lead Wire or Prewired Connector: 3m, Number: 4 pcs., Stroke Options: Dual Stroke, Single Rod
Magnet: Built-in, Mounting: Foot, Bore Size: 1", Stroke A: 4", Stroke B: 4", Auto Switch: G5NT--Solid State, With Timer, 3 Wire NPN, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), Stroke Options: Dual Stroke, Single Rod