Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

CNG

7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!

IDX-OM-W034

References 6 1 Specifications . 6 1 6 2 Refrigerant with GWP reference . 6 2 6 3 Dimensions . 6 2 6 4 Electrical Circuit . 6 4 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 5 Chapter 7 Specification for Option K 7 1 Safety instructions . 7 1 7 2 Specifications . 7 1 Chapter 8 Specification for Option L 8 1 Safety instructions . 8 1 8 2 Specifications . 8 1 8 3 Specification

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Example: In case of 6 stations of air suction filter ZFA (single) ZFA100-01 6 pcs. (Brackets for 6 stations) ZZFA1-06 1 pc.

IDX-OM-W022

. 6 1 6 2 Refrigerant with GWP reference . 6 3 6 3 Dimensions. 6 4 6 4 Electrical Circuit . 6 5 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 7 Chapter 7 Specification for Option C 7 1 Specifications . 7 1 7 2 Precautions for the installation and handling of the product . 7 1 Chapter 8 Specification for Option K 8 1 Safety instructions . 8 1 8 2 Specifications . 8

Programless controller (with stroke study) Step motor (servo 24 VDC)

Brown 12 Vcc B-4 Black 13 GND A-4 U Actuator cable type Red 7 A B-5 Black 6 A A-5 Nil Robotic type cable Orange 9 B B-6 Black 8 B A-6 S Standard cable 3 Controller side Electric actuator side (2) Actuator cable (8-20m) signal Terminal no.

IDX-OM-W011

. i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-

A_HEC-OM-I009

Specifications -6-1 6.1 Specification table -6-1 6.2 Performance chart -6-2 1) Cooling capacity -6-2 2) Heating capacity -6-2 3) Pump capacity -6-3 7 Preparation for Operation -7-1 7.1 Preparation for circulating fluid -7-1 7.2 Power supply -7-2 7.3 Grounding -7-2 7.4 Supply circulating fluid and drain -7-2 7.5 Check repair -7-3 7.5.1 Daily check -7-3 7.5.2 Check after seismic vibration and

IDX-OM-W025

6 1 Specifications . 6 1 6 2 Refrigerant with GWP reference . 6 1 6 3 Dimensions . 6 2 6 4 Electrical Circuit . 6 3 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 4 Chapter 7 Specification for Option A 7 1 Safety instructions . 7 1 7 2 Specifications . 7 1 7 3 Air piping . 7 1 7 4 Air flow capacity . 7 1 7 5 Compressed Air and Refrigerant Circuit / Operation Principles

IDX-OM-W035

6-3 . 6-2 6-4 . 6-3 6-5 . 6-4 7 K 7-1 . 7-1 7-2 . 7-1 8 L 8-1 . 8-1 8-2 . 8-1 8-3 . 8-2 8-4 . 8-2 9 R 9-1 . 9-1 9-2 . 9-1 9-3 . 9-1 9-4 . 9-3 9-5 . 9-3 10 S 10-1 . 10-1 10-2 . 10-1 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 11-6 . 11-4 12 V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 12-4 . 12-2 13 13-1 . 13-1 -2 IDX-OM-W035 i i i-1 (

Mist Separator Regulator

Part number for 0.2 MPa: GC3-4AS-D (Rc, NPT type) / GC3-P4AS-D-X30 (NPT, Z type). -11- 6.

Ｍ icro Mist Separator Regulator

Semi-standard: 6 Semi-standard: 6C Piping port thread ty pe Piping port thread ty pe (9) Part No. (9) Part No. Rc G Rc G C2SF-6-A C2SF-6C-A NPT C2SF-6(Z)-A NPT C2SF-6C(Z)-A Option symbol Semi-standard symbol J 6J CJ 6CJ Semi-standard: CJ Semi-standard: J Piping port thread ty pe Piping port thread ty pe (9) Part No. (9) Part No.

VQ20/30

Seal VCW20-15-6 Note) Please order separately. 17-6-7 2/3 Port Process Valve Precautions 5 Be sure to read before handling. For detailed precautions on every series, refer to main text.

VEX1

6 1 2 3 6 6 Pilot valve Construction Manual button Port P3 Port P1 Port P2 Feed back flow passage Component Parts Port 3 (R) No.

IDX-OM-W023

35010 Rc3/4 Rc1 10mm 1 2 kg 44 47 71 kW 7.5 11 15 1ANR 2065% 2 3 30mA 4() IDU Series 6-1 6 2 IDX-OM-W023 6 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDU Series 6-2 GWP 6 3 IDX-OM-W023 6 6-3 A B E D Q Guige Guige G C Guige Guige [AC200V] [AC200V] Guige Guige F 10 (10) (820

MXF

M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ H G 33.5 (mm) 6 Z M J NN H G N ZZ Model 5H9 +0.030 0 depth 5 MXF20-30 91 91 57 4 30 29 4 104 MXF20-50 113 113 77 4 45 36 4 126 MXF20-75 162 162 125 6 45 40 6 175 MXF20-100 211 211 175 6 60 59 6 224 8-6-13 14 Series MXF Proper Auto Switch Mounting Position (Detection at stroke

MXW

6 !7 !8 !

Digital Gap Checker

Spacer 1 Stations Part no. 2 ISA-16-2 3 ISA-16-3 4 *1 ISA-16-4 5 ISA-16-5 6 *1 ISA-16-6 w Seal for extra station ISA-15 e Threaded plug with seal ISA-12-m 1 pc. Piping Part no. Rc1/8 ISA-12-A G1/8 ISA-12-C q Joint screws (2 pcs.) ISA-161 e Threaded plug with seal ISA-12*1: Spacers are included for 4 and 6 stations. Bracket ISA-14 DIN rail ISA-5-m L Stations Part no.

CLS

Brake piston Locking spring Air pressure Eccentric cam shaft Brake shoe holder Locked state (When air is exhausted) Unlocked state (When air is supplied) 9-9-10 11 Series CLS Cylinder with Lock Double Acting, Single Rod Construction @7 @4 @8 @6 %8 @2 %9 @7 !0 i o @1 @0 @3 y u !1#1 @9 #4^2^7^5^1 ^3 ^6 ^4 8%2 %3 %4 %6 q !9 w %7 $1 $2 $3 $6 $8 $9 $0 #3 #0 @5 #2 $5 $4 %0 %1 t y !2 !1 !

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS