3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(PT)1/8 Rc(PT)1/4 Rc(PT)3/8 SYJ 01 02 03 Configuration VK N.C.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

ZPT HJ-01-A18 (With buffer) 63 80 Hexagon width across flats 14 1/8 (Rc, NPT, NPTF) 1/8 (Rc, NPT, NPTF) Hexagon width across flats 14 Hexagon width across flats 27 Hexagon width across flats 27 M18 x 1.5 M18 x 1.5 Width across flats 16 Width across flats 16 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 Model A 40 ZPT40HJ25-01-A18 D 118.5 40 ZPT40HJ50-01-A18 42 98 153.5 B 42 C 63 Model

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1/8 Rc 1/4 Rc 3/8 Rc 1/2 Piping port size Lock Specifications 215 25 20 330 32 550 40 860 63 1340 80 2140 50 3450 100 Bore size (mm) 5390 Holding force (Max.)

VP300/500/700

1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) Mounting Screw Tightening Torques M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm VP300-17-1 VP344 SF4--50 VP500-17-1 VP544 VP700-17-1 VP744 How to Order Sub-plate VP 00 2 1 Series Port size Thread type VP744 3/8 1/2 VP544 1/4 3/8 VP344 1/8 1/4 3 5 7 P F N T VP344 VP544 VP744 Rc G NPT NPTF Symbol 1

VQC

Proper tightening torque (Nm) Tightening torques for piping Connection thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.

Vacuum Ejector Series ZM

Vacuum 1/8 (Rc, NPTF, G) Vacuum port (V) 1/8 (Rc, NPTF, G) Vacuum port (V) (Side entry style is equipped with plugs.)

Process Pump Series PA3000/5000/PAX1000 Series PB1000

3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10 Process Pump Automatically Operated Type with

1

13 15 12.5 12.5 7 13 9 14 14 16 18 48 54 70 33 33 37 RB0806 RB0806 M4 x 0.7 3 3 10 10 50 56 3 3 6 6 6 6 5 5 37 38 3.5 M5 x 0.8 M12 x 1.5 41 46 54 56 62 81 8 10 10.5 13.5 15 18 21.5 28 4.5 4.5 5.5 5.5 7.5 7.5 9 9 22 25 30 23 24 4.3 4.3 5.6 5.6 6.6 6.6 8.6 8.6 10 12 13 15 20 20 22 22 8 8 9.5 9.5 11 11 14 14 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Bore size (mm) DB M5 x

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

6 cassette Solenoid on opposite A port Nil 1(P) port: Rc 1/8 3(R) port: Rc 1/8 Solenoid on same side as A port 2(A) port: Rc 1/8 S Valve stations Type S42 (Solenoid on same side as port A) 01 1 station 1(P) port: Rc 1/8 3(R) port: Rc 1/8 20 20 stations 2(A) port: Rc 1/8 4-13-7 8 Series VKF300 Dimensions: Manifold Body ported Common SUP, Common EXH/Top Ported Type 20 Manifold Grommet: G

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

1/8 Rc 1/4 Rc 3/8 01 02 03 SY Type of actuation SYJ (A) 2 N.C.

E-P HYREG ® Series VY1 1

AV Tightening Torque when Piping Connection thread Applicable torque (Nm) M5 x 0.8 1.5 to 2 1/6 rotation 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 AU Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1 Rc 1 1/4 Rc 1 1/2 Rc 2 AF Model Connection R AN120 AN110 AN200 AN300 AN400 AN500 AN600 AN700 AN800 AN900 Effective area (mm2) AR Courtesy of Steven Engineering, Inc

Refrigerated Thermo-chiller

Connection thread Proper tightening torque (Nm) Piping Tightening Torque M5 1.5 to 2 Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 1 1/4 40 to 42 Rc 1 1/2 48 to 50 Rc 2 48 to 50 5. Confirm the leakage of fluid. Confirm that the hose or tubing is not pulled out and that there is no leakage in the fitted parts.

E-P HYREG ® Series VY1

AV Tightening Torque when Piping Connection thread Applicable torque (Nm) M5 x 0.8 1.5 to 2 1/6 rotation 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 AU Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1 Rc 1 1/4 Rc 1 1/2 Rc 2 AF Model Connection R AN120 AN110 AN200 AN300 AN400 AN500 AN600 AN700 AN800 AN900 Effective area (mm2) AR M5 x 0.8 1 8 1 4 3 8 1 2 3 4 5 35

Compact Cylinder

Auto switch mounting groove Z 125 to 200 4 surfaces Port thread type Nil Rc NPT G Body option TN TF Standard (Rod end female thread) Rod end male thread Nil M Cylinder stroke (mm) Refer to the next page for standard strokes.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

F Nil Rc G N T NPT NPTF Brackets are not installed.

VK300

Solenoid direction Port size Opposite side of A port Nil 1 8 Rc G NPT NPTF 01 Rc Nil C4 4 cassette F N T Same side of A port S C6 6 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station CE-compliant VV061 20 20 stations Q CE-compliant Nil P port: Rc 1/8 R port: Rc 1/8 VV100 Note) Applicable only for DIN terminal

MNB

Brass Cushion ring @8 9-6-12 13 Series MNB Cylinder with Lock Double Acting, Single Rod Dimensions Basic style (B): MNBB Cushion valve GA Rc BP unlocking port B GD GC GB Rc 1/8 BC element B2 C Rc P Head side cylinder port Width across flats Rc P Rod side cylinder port Width across flats B1 MM CL GR W GR CL1 C e D E GL GL1 W MLGC T 16 CNG 4-J MB GF 4-J VA H1 16 N K F GE V Q Effective thread

MNB

(PT)1/8 B C element Rc(PT)P GA GC GD Rc(PT)BP unlocking port Front cylinder port Unlocked when pressurized W GR GL GL 1 GE Rc(PT)P ??

Vacuum Module Series ZX

(Rc, NPTF, G) 1 The common exhaust port (EXH.) is also used as the pilot pressure exhaust (PE) port of pilot valve.

Modular Type Filter Regulator Series AW

1/16 Note 2) Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Relief pressure Ambient and fluid temperature Nominal filtration rating Drain capacity (cm3) Bowl material Bowl guard Construction Weight (kg) Set pressure + 0.05MPa Note 3) [at relief flow rate of 0.1L/min (ANR)] 5 to 60C (with no freezing) 5m 25 Polycarbonate 2.5 8 45 45 Standard Option Relieving type 0.40 0.09 0.72