CLA

ZZ StrO ke ~ 131 71 339 65 12.5 80 ~ 148 72 358 65 14.0 81 367 P PG PH PL PW S W X V oLD LH LS LT LX LV r 40 7/16 20 27 50 30 63 % 16 31 80 37 81 51 244 43 11.2 59 F 90 58 266 52 11.2 66 ~ 'f, 106 58 290 52 11 .2 66 'I, 42 11 20 45 153 8 27 13 9 40 207 3.2 42 70 'I, 46 10 21 50 168 0 27 13 9 45 222 3.2 50 80 'I, 48.5 13 23 60 182 0 34 16 11.5 50 250 3.2 59 93 \I, 55 15 23 70 208 0 44 16

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'v8 sl8-24 7t't6 .98 .125 3/16 114 3ta-24 9/16 1 . 1 7 .125 1t4 1te 7t16-20 7116 1.O4 .189 1t4 114 7t16-20 9/16 1.25 .189 1t4 3/8 7t16-2016 .189 1t4 1t2 7 t16-20 718 1.54 . 1 8 9 5/16 1t8 1/2-20 1/2 . 1 4 .220 5/r 6 'l 14 1t2-20 9/16 1.32 .220 5/16 318 'lt2-20 1 1 / 1 6t.!

EX510-GPR1.eng

ON 48 16 16 16 4 COM A-D is not LIT ON ON OFF ON Reserve No.4 No.5 No.6 Output point COM A COM B COM C COM D RUN LED goes off Check the power for input and controlling GW is supplied. 5 OFF 64 16 16 16 16 OFF OFF OFF OFF OFF OFF ON 0 Check the power for output (24 VDC) is supplied. Check the power supply voltage for output is above 20 V.

AW

) Note 16) Note 16) Note 16) Note 16) Note 16) Note 16) Note 16) Note 7) Only the AW10 has a pressure setting of 0.05 to 0.7 MPa.

Clamp Cylinder with Lock

There may be the case it will vary substantially depending on an ambient environment. 16 Series CLK2 Auto Switch Mounting Bracket / Part No.

Speed Controller with One-touch Fittings Series AS In-line Type 1

Flow Rate and Effective Area AS3001F AS2051F AS4001F AS2001F AS1001F Model Metric size 4 6 6 8 3.2, 4, 6 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 5/32" 3/16", 1/4" 3/16" 1/4", 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Inch size Controlled flow (Free flow) 100 130 230 290 460 420 660 920 1050 1390 Air flow /min (ANR) 1.5 2 3.5 4.5 7 6.5 10 14 16 21 Effective area (mm 2) Note) Flow rate values

VM

Description Brass, NBR NBR Material Material Note Valve seat Body O-ring Valve q w e r Dimensions VR1210 VR1220 20 3-1/4 3-1/8 16 OUT 21 38 OUT 20 16 SMC IN IN 29 16 SMC IN IN 6.6 mounting hole 21.2 5.5 mounting hole 50 17.2 38 5-7-3 61 Series VR1210/1220 How to Order 01 VR2110 Option X3 Secondary tank connection board 1 4 Rc N.O.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

-04 FH54 -06 FH54 -08 FH54 -10 FH54 -12 FH541-16 FH640-03 FH64 -04 FH64 -06 FH64 -08 FH64 -10 FH64 -12 FH641-16 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 5 213 57 275 156 80 50 1.8 96 105 2 x M8 x 1.25 19 0 236 61 340 175 60 65 2.5 120 136 2 x M10 x 1.5 15 0 1 0 1 32 (1 1/4B) 32 36 46 16 20 25 32 36 46 60 70 16 20 25 32 36

Intrinsically Safe Valve

" One-touch fitting (EA) 5 1 (P) 3 (EB) 5/16" One-touch fitting 53-SY7000 4-position dual 3 port valves (N.C.

Compact Cylinder with Air Cushion Series RQ

A A1 E1 L1 MM U1 NZ L 0.2 0.4 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 20 I-G02 Y-G02 20 8 8 IY-G02 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 8 8 34 +0.058 0 +0.4 +0.2 25 I-G03 Y-G03 25 10 10 IY-G03 41 10.5 20 30 M10 x 1.25 12.8 14 10.5 20 30 M10 x 1.25 12.8 14 20 25.6 10 10 41 +0.5 +0.3 0.3 0.5 0.3 0.5 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 32, 40 I-G04

High Vacuum L Type Valve

Valve specifications Model XLFV-16-2 XLFV-25-2 XLFV-40-2 XLFV-50-2 XLFV-63-2 XLFV-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 50 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures

RLQ

A A1 E1 L1 MM RR1 U1 NZ L CNS 42 56 16 20 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 I-G04 I-G05 Y-G04 Y-G05 +0.5 +0.3 42 56 14 18 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 36 41.6 +0.058 0 -0.3 -0.5 +0.058 0 +0.5 +0.3 44 50.6 +0.070 0 Knuckle pin and snap ring are included. -0.3 -0.5 +0.070 0 CLS CLQ MLGP Knuckle Pin (Common with double clevis pin) Rod End Nut RLQ MLU d d Dd9 ML1C C m

HRX-OM-Y120

Communication example Slave Address : No.1 Read 16 pieces data from register 0030h.

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

to 8 stations Type u, 9 to 16 stations SY3000-43-2NASY3000-43-3NAType D, 9 to 16 stations Type u, 2 to 8 stations 8 Dust cup VZ3000-63-2 9 Round head combination screw SY3000-23-4 M326 Matt nickel plated 10 Gasket SX3000-57-4 SX5000-57-6 11 DIN rail VZ1000-11-1SY3000*-OMJ0003-A -24- Specific Product Precautions 18 Be sure to read before handing.

MXU

6 Note Nickel plated Nickel plated Nickel plated 6, 10 Nickel plated 16 Cylinder tube Chromium molybdenum steel Hexagon socket head cap screw 6, 10 Electroless nickel plated 16 Clear chromated 6, 10 16 Chromium molybdenum steel Carbon steel Magnetic material Synthetic rubber Brass NBR NBR NBR NBR Hexagon socket head plug Rod end nut Head cover w Magnet Piston e !

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures

VCC

VCC VCC TQ L1 = n / 2 x 30 + 16 L2 = n / 2 x 30 + 32 n = Number of valves (cleaning valve + gate valve + other valves) n: Stations (mm) 2 n 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 34 36 38 40 L1 L2 76 106 136 166 196 226 256 286 316 346 376 406 436 466 496 526 556 586 616 46 92 122 152 182 212 242 272 302 332 362 392 422 452 482 512 542 572 602 632 62 651 VCC Series Dimensions SUS316L

Vacuum Regulator

SET side tubing O.D. 6, 8, 10 1/4" , 5/16" , 3/8" 6, 8 1/4" , 5/16" 135 g (IRV10-C08) 125 g (IRV10A-C08) 250 g (IRV20-C10) 250 g (IRV20A-C10) Weight (Without accessories) Standard connections Single sided connections Note 1) Use caution it varies depending on the pressure in vacuum pump side.

Compact Cylinder with Air Cushion and Lock Series RLQ

A A1 E1 L1 MM RR1 U1 NZ L 42 56 16 20 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 42 56 14 18 22 28 30 40 M14 x 1.5 M18 x 1.5 12 16 14 20 I-G04 I-G05 Y-G04 Y-G05 36 41.6 +0.5 +0.3 +0.058 0 -0.3 -0.5 +0.058 0 44 50.6 +0.5 +0.3 +0.070 0 Knuckle pin and snap ring are included. -0.3 -0.5 +0.070 0 Knuckle Pin (Also used as double clevis pin) Rod End Nut d d Dd9 C m m l L t t H B Material: Carbon