°C), Applicable tube material: FEP, PFA, modified PTFE, nylon, soft nylon, polyolefin, polyurethane, soft polyurethane, hard polyurethane, soft polyolefin, antistatic soft nylon, antistatic polyurethane, Grease-free, FITTING, MALE ELBOW, INSERT FITTING, STAINLESS STEEL, 909, 14 lb

EX600-SEN_eng

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status.

EX245-FPS1_2_3_eng

Security label -20 C to 60 C Ambient temperature OFF The strength of the Fibre-Optic communication is more than 2 dB. 3 3 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration) 49 m/s2 PROFINET connector for Port1 (XF1) Push Pull connector EX245-FPS1: SCRJ EX245-FPS2: RJ45 Flashing The strength of the Fibre-Optic communication is more than 0 dB but less than 2

EX600-AX_AY_AM_eng

URL http://www.smcworld.com -10 V to 10 V -20 mA to 20 mA for 2 hours each in direction X, Y and Z respectively (De-energized) 24 VDC Class2, 2 A 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 0 V to 10 V 0 mA to 20 mA Content Content Content 0 V to 10 V 0 mA to 20 mA 0 V to 10 V 0 mA to 20 mA

PFG3x.eng

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 2: This function is available for models with analogue output.

Low Profile 2/3-Port Solenoid Valve

When the product fails to operate correctly, return the valve without any modification. -11- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

CYV_EN

Model Selection 2 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

Heat Resistant Solid State Auto Switch

(between lead wire and case) Ambient temperature Sensor unit: 0 to 150 oC, Amplifier unit: 0 to 60 oC Enclosure Sensor unit: IP67, Amplifier unit: IP63 (IEC60529) Standards CE, RoHS -17No.D-S-OMS0002-B Dimensions -18No.D-S-OMS0002-B Revision history A: Modified errors in text. B: Add the note.

Membrane Air Dryer

Includes 1 L/min [ANR] of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator. -6- Revision history A: Changes to Maintenance and Checks B: Correction of specification column 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any

EXxx-OMK0006

Please refer to the individual catalog for dimensions when other manifolds are connected. n m L 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 Wiring (for power supply, communication and input) and piping are installed on only one side of the product

Fieldbus system (SI unit – PROFIBUS DP compatible)

Please refer to an individual catalog for the size when other manifolds are connected. n_m L 0 1 2 3 4 5 6 7 8 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 n_m L 9 10 11 12 13 14 15 16 L1 139.5 150 160.5 171 181.5 192 202.5 213 L2 278.8 299.8 Wiring (for power supply, communication and input) and piping are done on only one side.

A_HEC-OM-I009

Fine Control of -9.99 to 9.99 C (0.01 C) 0.00 2 External Sensor 3 PB Range Sets PB (Proportional Band) range used for PID control. 0.3 to 9.9 C (0.1 C) 0.6 (2.0) Sets integral operation range of PID control. 0.3 to 9.9 C (0.1 C) 1.0 4 ARW Range (2.2) ARW: Anti Reset Windup 150 5 I Constant Sets integral time used for PID control. 1 to 999sec (1sec) (50) Sets differential time used for PID

0.01

AT IDF IDU IDF FS IDFA IDFB IDH Tightening torque (Nm) Material ID 2 to 3 Resin 12 to 14 Metal IDG 4. Check the arrow mark on the case which shows the flow direction to connect the IN and OUT ports correctly. If connected in reverse, the element could break. IDK AMG AFF Maintenance Warning AM AMD Other Tube Brands Caution 1. Follow the maintenance procedures in the operation manual.

ITV

threads 1.6 12 (99) (11) SMC PREGULATOR E ITV2090 Rc(PT)1/4 VAC port OUT 2 G ATM (Atmospheric pressure) OUT (Set pressure) VAC (vacuum pressure) 19 n36 Flat bracket P3020114 (optional) 2-Rc(PT)1/4 Atmosphere port, OUT port 4-M X 0.8 thread depth 6mm through Mounting hole OUT 2 G 15 19 R3.5 25 7 n36 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc(PT)1/4 Atmosphere port, OUT port (7) 36 1.12-14

ITV0000

(mm) 10 9 8 7 6 5 4 3 Manifold stations n L1 L2 2 180 165 150 135 120 105 90 75 60 235.5 223 198 185.5 173 160.5 148 123 110.5 8 Series ITV0 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage. These instructions indicate the level of potential hazard by labels of "Caution", "Warning" or "Danger".

GA342

Impact/Vibration resistance Note) 150/50 m/s2 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF . (Value in the initial stage.)

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

VS3115-D VS3110-G VS3110-D SCA006SCA001SCAD001SCAD001SCA006SCA001SCAD001SCAD001AC DC Solenoid capsule assembly r t AXT338-6 Spring Piano wire AC DC AZ832-16 Part No. for Mounting Bolt and Gasket y NBR AXT333-14 AXT338-15 Gasket u Resin AXT333-16 Plug for cap AC AXT333-7-11 i DC AXT333-32-8 Stopper BG-VS3010 Resin : Enter the operating voltage.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Coil rated voltage Terminal type VT Coil insulation type Class B or equivalent (130C) (3) Shock/Vibration resistance (m/s2) 150/50 (4) VP Note 1) If it is low temperature, dry air should be used.

Hand Valve Series VH 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-11 132 300 223 M15 x 1.5 15 151 150 48 25 4-Rc 3/4, 1 3 (R) 40 5-8-12 7 Hand Valve Series VH Dimensions: Panel Mounted VH21-02 VH31-02/03 ( ): Long handle type 4 (B) 2 (A) 25 25 (32) 25 4 (B) SA 1 (P) 3 (R) 1 (P) 74 62 62 49 VA 2 (A) SA 49 4-5.5

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 100 kPA to 0 0.14 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 0.22 100 kPA to 0 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.O. Note 1) SY123/SY1243 4 and SY123/SY1243 4A: Supply pressure to 1(R) port and exhaust air from 3(P) port. Note 2) Value for DC.