KK/KK13

6 18.5 36 10 -10L 18.5 23.0 21 18.0 17 26.5 12.8 4.5 40.2 6 KK4P-06L 11.4 19.6 17 10.1 20 14 15.2 6 41.4 8 -08L 19.8 21.3 18.5 17.5 23 25.2 1/4 18.5 7.5 42.8 10 -10L 27.5 25.7 21 24.7 26.5 17 44 -12L 29.6 28.0 29.0 20.9 9 12 22 28.5 49.9 KK6P-12L 39.7 40.3 38.1 19 31 1/2 26.5 13 16 53.5 -16L 25 58.7 48.7 21 34 Mounting plate thickness 7mm or less Bulkhead type with One-touch fitting H1 H2

Electric Actuator with Integrated Guide

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

Rotary Actuator/Vane Type

0 w y t q With auto switch (With auto switch unit and built-in magnet) * Refer to page 99 when the auto switch unit is needed separately. e Shaft type r Size o Electrical entry/Lead wire length 10 15 20 30 40 Nil Grommet/Lead wire: 0.5 m M Grommet/Lead wire: 1 m L Grommet/Lead wire: 3 m CN Connector/Without lead wire C Connector/Lead wire: 0.5 m CL Connector/Lead wire: 3 m * Connectors are

C95

16 3 4 4 4 4 4 10 12 16 16 20 20 30 35 40 45 45 55 34 40 45 51 65 75 3.3 4.3 4.3 4.3 4.3 6.3 41 48 54 60 75 85 6.6 6.6 9 9 11 11 10.5 11 15 15 18 18 32.5 38 46.5 56.5 72 89 10 10 10 12 16 16 142 160 170 190 210 230 32 40 50 63 80 100 22 25 27 32 36 41 5.5 5.5 6.5 6.5 10 10 CP95 C95 C92 CA1 Counter pivot ES Counter pivot E CS1 Bore (mm) Bore (mm) d2 CK S5 K1 K2 L3 G1 L1 G2 EM G3 CA H6 R1 CN

Table of Contents

P411020-5 P411030-5 P411040-5 P411050-5 Model CRB1LW50 CRB1LW63 CRB1LW80 CRB1LW100 Connector/Without lead wire CN Connectors are available only for auto switch types R73, R80, T79. Lead wire with connector part nos.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P411020-5 P411030-5 P411040-5 P411050-5 Model CRB1LW50 CRB1LW63 CRB1LW80 CRB1LW100 Connector/Without lead wire CN Connectors are available only for auto switch types R73, R80, T79. Lead wire with connector part nos.

Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

JXCx-OMU0004

CN . 17 5.1 . 17 5.2 . 17 (1) . 17 (2) . 18 (3) . 18 6.

Vacuum Pad

H2 H2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-A5ZP2V-A8ZP2V-AG1Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H1 Vacuum generator side L2 L33 H1 M2 H1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H2 H2 L1 L1 L1 H2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator side where the tool is applied. 2 The place

Vacuum Pad

H2 H2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-A5ZP2V-A8ZP2V-AG1Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H1 Vacuum generator side L2 L33 H1 M2 H1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H2 H2 L1 L1 L1 H2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator side where the tool is applied. 2 The place

Vacuum Pad

H2 H2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-A5ZP2V-A8ZP2V-AG1Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H1 Vacuum generator side L2 L33 H1 M2 H1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H2 H2 L1 L1 L1 H2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator side where the tool is applied. 2 The place

Vacuum Pad

H2 H2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-A5ZP2V-A8ZP2V-AG1Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H1 Vacuum generator side L2 L33 H1 M2 H1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H2 H2 L1 L1 L1 H2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator side where the tool is applied. 2 The place

KJ

(inch) H2 (Width across flats) T D Note) B E Mounting hole M Weight (g) H1 (Width across flats) Min. port size Model KQ2LE01-00 KQ2LE03-00 KQ2LE05-00 KQ2LE07-00 KQ2LE09-00 KQ2LE11-00 KQ2LE13-00 1 8 1/2-20 UNF 1/2-20 UNF 9/16-18 UNF 9/16-18 UNF 3/4-16 UNF 7/8-14 UNF 1-12 UNF 13.5 13.5 15 15 20 23 26 9.6 10.4 11.4 13.2 15.2 17.9 21.7 27 26 32 29 53 85 105 2.5 3 3.5 4.6 6 7 9.6 15.5 16 16.5

Free Mount Cylinder Series CU

Cn is rounded down to the nearest whole number, using no more than three significant figures.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Free mount type Shaft type Double vane Double shaft with single flat (size 10 to 30) Long shaft key, Short shaft with single flat (size 40) W Electrical entry/Lead wire length Grommet/Lead wire: 0.5 m Grommet/Lead wire: 3 m Connector/ Lead wire: 0.5 m Connector/ Lead wire: 3 m Connector/Without lead wire Nil L C CL CN Pattern Vane type Standard Simple Specials/Made to Order S D Single vane

Hydraulic

H N GA F Rc P Rc P 2-NN Width across flats B1 H1 D I 4-LD LH MM A K NC Width across flats NA Y X NB LT Y X S + Stroke LS + Stroke ZZ + Stroke LX LZ (mm) Effective thread length (mm) Stroke r-ange (mm) Bore size (mm) A B1 B2 D F GA GB H H1 H2 I K LD LH LS LT LX LZ MM N NA NB NC 20 to 800 18 13 26 10 16 12 8 41 5 8 30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 15.5 25 to 800 22 17 32 12 16

58

Y-14A Y-16A H2 H1 L1 A H I type single knuckle I-12A I-14A I-16A Bore size (mm) 125 140 160 NT-12 NT-12 NT-16 18 18 21 181 186 198 100 105 110 65 65 76 125 125 140 29 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Electrostatic Sensor Monitor

The descriptions for OUT2 are the same as those for OUT1, under the conditions that [P_1] should be replaced by [P_2], [P1H] should be replaced by [P2H], [n_1] should be replaced by [n_2], [n1H] should be replaced by [n2H], [H_1] should be replaced by [H_2] and [H1] should be replaced by [H2]. Absolute setting is assigned when window comparator is set.

F

Applicable Connection Model T H1 H2 L1 L2 Mounting M Minimum Tube OD Thread UNF (Width (Width Hole Hole Applicable Connection Model T (M) H1 H2 L1 L2 Mounting M Effective Tube OD mm Thread (Width (Width Hole Orifice (mm 2) Inch Rc(PT) Across Flats) Across Flats) Diameter Rc(PT) Across Flats)Across Flats) Nylon/Ureth 1/8 1/4 KQE01-35 1/2-20 17.46 17.46 31.5 15 14 15.5 2.5 3.2 14 KQE23-02 M12x1

LX Series Compact Electric Actuators

dimensions T-slot B dimensions LXSH _ B .150 6 I 370 277 277 8 47 65 $efie$ [)( tleclnh Arlualors 0inol|$im$ Slido $ffi||l Iy0[ LxsHnsE E;IEI9' With brake Brake electrical circuit verro*,14\ I Y"tto*ld Without brake Nole) Conlact protecUon circuit i5 rcquired when connecting F-Ms Thread 10 Deep F/2 l)xc 25 t\rotor Photo micro sensor wire(3oomm) [ ] shows lhe localion al which ongtn pornr sw cn