NCA1

G Across flat A A 1/16 Radial float H 1 Spherical motion E D B C E Dimensions H 1 1/2 2 1/4 2 1/4 Part No. NCA1-AC325 NCA1-AC800 NCA1-AC1000 A 3/4-16 1-14 1 1/4-12 B 1 3/4 2 1/2 2 1/2 C 2 5/16 2 15/16 2 15/16 D 5/16 1/2 1/2 E 1 1/8 1 5/8 1 5/8 F 31/32 1 3/8 1 3/8 G 7/8 1 1/4 1 1/4 Pivot Pins CP DD CL CD CL CD Dimensions Dimensions CL 2 5/8 3 1/8 4 1/8 CP 2.72 3.22 4.25 Part No.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Size: 1 to 7 Size: 10 to 50 Counterclockwise A port Counterclockwise B port A port B port B port Clockwise Clockwise Positioning pin hole Positioning pin hole 5 5 Adjustment bolt A d nd Adjustment bolt A (For counterclockwise rotation end adjustment) Adjustment bolt B (For clockwise rotation end adjustment) (For counterclockwise rotation end adjustment) n n e e 5 22 n . 2 atio io .5 2 Adjustment

PFxx-OMU0002

[October 2017] B: Contents revised in several places. [July 2018] C: Contents revised in several places. [August 2019] D: Contents revised in several places.

Compact Slide Series MXH

B W 7.5 (5) (mm) D-A9, D-A9V D-M9W, D-M9 D-M9WV, D-M9V Bore size (mm) A A W B W B A W B 6 12.5 3.5 (6) 16.5 7.5 2.5 16.5 5.5 2.5 10 11.0 2.0 (0.5) 3.5 15.0 2.0 7.5 15.0 0 7.5 16 18.0 2.0 (0.5) 4.0 22.0 2.0 8.0 22.0 0 8.0 20 26.0 4.5 (2) 6.5 30.0 0.5 10.5 30.0 2.5 10.5 Note 1) Negative figures in the table W indicate an auto switch is mounted inward from the edge of the cylinder body.

MGQ

B 19.5 25 29.5 C 6.5 7 14.5 A 8 8 8 8 10 10 Model MGQ32 MGQ40 MGQ50 MGQ63 MGQ80 MGQ100 Detailed figure of a section Detailed figure of b section a a a b MGQ32 to 50 MGQ63 to 100 8-20-10 11 Compact Guide Cylinder Series MGQ Proper Auto Switch Mounting Position (Detection at stroke end) Minimum Stroke for Auto Switch D-Z7/Z80 D-Y5/Y6/Y7(V) D-Y7W(V) 1 pc. 2 pcs. 5 10 5 5 10 15 Auto switch D-Z7

5 Port Solenoid Valve Series SV

Labels are attached to indicate A and B side functions, using the same color as the manual override. A side manual override: Orange A side passage symbol: Orange A B A B B side passage symbol: Green B side manual override: Green Pull the lever forward with a screw driver, etc.

MXH

B MY CY 22 (20) MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A CX D-A9V D-M9V D-F9WV D-X 20( ): Denotes the values of D-M9V, D-F9WV. 5(7) B W Data D-A9, D-A9V D-F9W, D-M9 D-F9WV, D-M9V Bore size (mm) A A W B W B A W B 6 12.5 3.5 (6) 16.5 7.5 2.5 16.5 5.5 2.5

PSxx-OMS0004CN

(0500KPa) (1~5V) 01 R1/8(M5) 28 (4~20mA) 02 R1/4(M5) M12 3m ZS-37-A 1 M12 3m ZS-37-B 1 ZS-28-CA-4 1 Rc1/4 ZS-31-X175 1 Rc1/8 ZS-31-X188 1 -8No.PS-OMS0004CN-D M12 C3604+AI203(96)FKM (Nm) R1/8 35 R1/4 812 -9No.PS-OMS0004CN-D PSE570ZS-37-AZS-37-B ZS-37-A ZS-37-B 1 DC(+) 2 N.C. 3 DC(-) 4 -10No.PS-OMS0004CN-D PSE20 PSE30 PSE31 PSE570PSE573PSE574PSE570--28 PSE573--28 PSE574--28 PSE570PSE573

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

Compact Rotary Actuator

o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i s a s s e m b l e D i s a s s e m b l i n g p r o c e d u r e A s s e m b l e p r o c e d u r e T r o u bl e s hoo t i n g Safety Instructions These safety instructions are intended to prevent

FSQ seies

;ffi|-w- Series RSDO Auto Switch Mounting Position (Stroke End) / Mounting Height (i32 60 D-A7, D-A8 D-A7, D-A8 A= @ ,BE6E-D-A7H, D-A8OH D-F7, D-J79 D.F79W, D-J79W D-A7H, D-A8OH D-F7, DJ79 D-F79W, D.l79W Connector type D-A73C, D-A80C D-J79C Connector type D-473C, D-A80C D-J79C D-A79W, D-F7;WV D-F7 trV D-A79W, D-F/SWV D-F7E]V Auto switch mounting position Auto switch mounting height 27.O 37.5

CC-Link-E

Pi n assi gn of bus adapt or si de connect or I t em Pi n assi gn I t em Socket assi gn SLD SLD 4 4 3 D B D B CCLi nk I N CCLi nk O U T 3 2 5 D G D G D A 1 2 D A N . C.

Air Cylinder RSQ Series Stopper Cylinder

;ffi|-w- Series RSDO Auto Switch Mounting Position (Stroke End) / Mounting Height (i32 60 D-A7, D-A8 D-A7, D-A8 A= @ ,BE6E-D-A7H, D-A8OH D-F7, D-J79 D.F79W, D-J79W D-A7H, D-A8OH D-F7, DJ79 D-F79W, D.l79W Connector type D-A73C, D-A80C D-J79C Connector type D-473C, D-A80C D-J79C D-A79W, D-F7;WV D-F7 trV D-A79W, D-F/SWV D-F7E]V Auto switch mounting position Auto switch mounting height 27.O

Cylinder with lock

1 34 FLAT WASHER (8) In case of 80,100 13 HEXAGON SOCKET CAP BOLT 4 35 BUMPER A 1 14 HEXAGON SOCKET CAP BOLT 2 36 BUMPER B 1 15 WEAR RING A 2 37 WEAR RING B 1 16 PISTON SEAL A 1 38 ROD END NUT 1 17 ROD SEAL A 1 39 MAGNET (1) In case of CP96ND* 18 GASKET 1 40 ROD SEAL B 1 19 ELEMENT 1 41 PISTON SEAL B 1 20 RELEASE BOLT 1 42 CUSHION SEAL A 1 21 SEAL WASHER 1 43 CUSHION SEAL B 1 22 HEXAGON

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

Bag Filter

T2 T1 I 8 x D FGD FGE H G FGG P.C.D B E F FGA C A (mm) Applicable model G H I Part No.

IZx-OMR0035

Filter holder C D B A A B Filter Filter holder Hooks 27 Doc. No.: IZ-OMR0035 5. Performance Performance data shown in this chapter is based on an electrified plate (dimensions: 150 x 150 mm, electrostatic capacity: 20pF) defined by ANSI standard (ANSI/ESD STM3.1-2006).

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

Lubrication Equipment

1 Urethane resin Urethane resin NBR NBR 1.17-9 Large Flow Style Lubricator AL800/900 Option Specifications Dimensions Metal bowl AL800/900 AC AV Metal bowl with level gauge AU AF AR IR VEX Model Metal bowl Metal bowl with level gauge Model Port size AW D A B C E B B 275 280 307 312 11/4 / 11/2 100 100 283 288 59 63 125 125 AL800 AL900 AL800 AL900 AMR 2 AWM Option Specifications/1000cm 3 Tank