Compact Manifold Regulator Series ARM5

V L4=50+T+X 50 SMC H H L L O O S S U U C C P P K K 8 U 57 (at handle locked) DIN rail part no.

3

D-DN

Single Axis Electric Actuator Serriies LJ1S Slider Guide

C D B A 89 Standard Motor Slider Guide Series LJ1S20 Motor Output Slide Screw 100W 20mm/20mm lead Horizontal Mount How to Order Stroke LJ1S202 1 F 2 SC Cable entry direction Top entry Cable length Power supply voltage Cable entry direction Left entry 1 2 F R L T B Axial Right Left Top Bottom 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 2 3 4 5 2m 3m 4m 5m Axial entry Right entry Bottom entry

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Shock absorber specifications cannot be changed by replacing or adding parts. 50 to 500 80 245 80 245 10 to 60 1.96 3.83 15 1.96 4.22 15 Spring force N Extended Compressed Weight g Minimum Strokes for Auto Switch Mounting (mm) Applicable auto switch models Number of auto switches mounted 1 pc. 2 pcs. 5 10 5 10 5 5 D-A9, D-A9V D-F9, D-F9V D-F9W, D-F9WV D-F9BA 2 Series MXP Table Deflection

DOC1023126

Rod side EQY*D is excluded.

Process Valve

Coil rated voltage CE-compliant Nil Q CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical entry: D or DZ only Note) Electrical entry: D or DZ only 4 Note 1) 4 Note 1) 5 6 Note 1)

Air Slide Table/Long Stroke Type Series MXY

8.5 114 42 33 n QL Model 50 100 150 200 250 200 250 300 350 400 50 300 350 400 100 150 Stroke MXY6 2 3 3 4 54 39 34 59 MXY8 2 44 2 3 4 5 5 39 64 54 34 59 MXY12 2 2 67 3 3 4 4 5 5 37 62 42 47 72 52 77 224 Series MXY Air Slide Table Long Stroke Type Auto Switch Proper Mounting Position (Detection at Stroke End) Reed Auto Switch D-A90(V), D-A93(V), D-A96(V) (mm) Lead wire entries

HEC_001W-E

I C o n s t a n t M O D E < 5 0 C 150 sec 7-9 Operation 6. D Constant Setting range : 0.0 to 99.9sec Min. increment : 0.1sec Indicated content : D constant(Ex. : 0.0sec) Function : Sets differential time used for PID control. When 0 is set, this function becomes invalid. D C o n s t a n t M O D E < 0 . 0 s e c 7.

MXH Series Compact Slide

D-A9 V D-F9 V D-F9 WV W B Dimension inside ( ) is for model D-A9 V.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Proper Auto Switch Mounting Position (Detection at stroke end) MX A B MTS MY MY3A D-A9, D-A9V (mm) D-F9W, D-F9(W)V (mm) D-M9, D-M9V (mm) CY A B Operating range Bore size 16 25 40 63 A B Operating range Bore size 16 25 40 63 B Operating range Bore size 16 25 40 63 A 088.5 084.5 26.5 084.5 22.0 26.5 2 06.5 3.0 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Rotary Table

Output Power Current Load Load Current Applicable voltage consumption voltage current leakage load drop D-M9N D-M9NV D-M9NW D-M9NWV NPN DC28V type or less At 10mA DC512 0.8V or 100A or Relay 10mA 40mA less less at PLC 24V or less or less IC circuit D-M9P D-M9PV D-M9PW D-M9PWV DC24V (4.5 to 28V) At 40mA 2V or less PNP type D-M9B D-M9BV D-M9BW D-M9BWV DC24V DC24V 2.5 to 4V 0.8mA or less (DC10

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

MRQ

3m 0.5m D-A7l, A80, D-A7lH, A80H D-A73C, A80C 54 12 Reed switch D-A79W D-J79, J79W 53 49 11 11 12 2 wire 3 wire 56 Solid state switch D-F7 4 wire 56 14 Write "L" at the end of the part number for 3 meters of lead wire.

Thermo-con

Alarm output connector (ALARM) D-sub 9 pin (pin) Holding screw: M2.6 Pin No.

LX Series Compact Electric Actuators

: LXF: LXFH5BD 30 Screw LXFH5SA 30 Slide LXFH5SB 20 I LXP82BC 60 50 220 Linear ball bearing LXP82BD 60 50 90 Ball Screw 60 50 160 6 0 ' .

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600 m

Rotary Table

Part number of special angle adjustment tool Size Part number 10 P8910195 20, 30 P8910295 50 P8910495 Table 11. Special tool dimensions [mm] Part number A B C D E P8910195 50 10 16 10 12 P8910295 60 12 18.2 11 14 P8910495 80 15 24 17 19 Special tool Fig. 7 -33- Piping Figure 8 and Table 12 show locations and sizes of piping ports. Ports can be selected from two sides.

Rotary Cylinder Series MRQ Size: 32, 40 1

Reed switch: D-A7/A8 Solid state switch: D-F7/J7 ( ) Series MRQ An air cushion is also available.

Speed Controller with One-touch Fitting

TMH Electroless nickel plated ASD Easy to use AS Larger knob Push-lock type AS-FE Easy to lock KE Body size D [mm] 1 9.4 Unlock Lock AS-FG D 2 12 (Port size 1/8) AS-FP 13 (Port size 1/4) 3 16.6 AS-FM 4 18.8 AS-D AS-T ASP ASN AQ ASV Improved tube insertion/removal AK Max.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

type D-Z7 type Note 1) Note 1) D-Z8 type D-A9 type D-F9 type D-Y6 type D-Y7 type Note 1) Vertical outlet types cannot be mounted.