CP95

C, D, E and CR [First angle projection] Mounting style (C) Mounting style (D) CJ1 CJP CJ2 CM2 CG1 Bore size (mm) E1 EW TG1 FL l1 L I2 d1 CD MR d2 R1 E2 UB CB MB 32 45 48 6.5 6.6 9.5 5.5 32.5 45 26 22 5 12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16

Compact Cylinder

L x 100 L 100 100 (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CQUB32-5 CQUB40-5 M5 x 65 L M5 x 65 L 65 65 -10 -10 x 70 L x 70 L 70 70 -15 -15 x 75 L x 75 L 75 75 -20 -20 x 80 L x 80 L 80 80 -25 -25 x 85 L x 85 L 85 85 -30 -30 x 90 L x 90 L 90 90 10.5 10.5 -35 -35 x 95 L x 95 L 95 95 -40 -40 x 100 L x 100 L 100 100 -45 -45 x 105 L x 105 L 105 105

60

70 90 75.4 90.9 119.4 123.4 152.3 31.3 40 53 55 71 25.3 33 44 46 60 53.3 30 41 50 50 70 2.3 2.3 2.8 2.8 3.2 3 3 3 4 4 12 14 19 22 22 67 79 79 108 6 Series VHS20/30/40/50 Series VHS2510/3510/4510/5510 Specific Product Precautions 1 Be sure to read before handling.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

63 ZPT63H-B16 65 14.5 26 M16 x 1.5 3.5 80 ZPT80H-B8 82 16.5 28 M8 x 1.25 4.5 80 ZPT80H-B10 82 16.5 28 M10 x 1.5 4.5 Y 3.5 80 ZPT80H-A16 82 16.5 28 4.5 Model A 63 ZPT63H-A16 B 65 C 14.5 D 26 E 56 58 80 ZPT80H-B12 82 16.5 28 M12 x 1.75 4.5 80 ZPT80H-B16 82 16.5 28 M16 x 1.5 4.5 1191 Series ZPT ZPT H-A16 (Male thread) 100 125 ZPT H-B (Female thread) 100 125 Width across flats 60 M16 x 1.5 70

MY1

When exceeding the air cushion stroke ranges shown on page 28, the piston speed should be 100 to 200mm/s. 1500 Max. operating frequency (cycle/min) 70 45 25 80 Extended 4.22 6.86 8.34 1.96 Spring force (N) Note 2) The piston speed is 100 to 1000mm/s for centralized piping.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(71) 100 110 95 22 48 4 17 29 14 38 62 (63) 124 (139) 36 1/8 140 (155) 70 (71) 100 140 125 22 48 4 23.5 29 14 38 62 (63) 124 (139) 42.5 1/8 11-4-6 72 Series CRB1 Rotary Actuator Vane Style Rotary Actuator: Replaceable Shaft A shaft can be replaced with a different shaft type except for standard shaft type (W).

CJ2

Refer to pages 6-20-3 to 6-20-6 for Safety Instructions and Actuator Precautions. 6-3-69 70 70 Series CJ2RK Weight (g) Caution on Handling Bore size (mm) 10 16 Basic weight Caution 36 71.5 Additional weight per each 15 mm of stroke 4 6.5 Avoid using the air cylinder in such a way that rotational torque would be applied to the piston rod because this will deform the non-rotating

CP95

32 45 12 5.5 175 170 45 12 10 90 110 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 80 16 10 100 120 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 100 16 12 126 153 60 100 120 75 35 16 205 14 20 140 25 230 110 60 120 20 75 16 6.5 230 220 71 14.5 150 178 6-13-10 10 Series CP95 ISO/VDMA Cylinder: Standard Type Double Acting w/ End of Stroke Cushioning

MG

mm Find the point of intersection for the load weight of 7 kg and the eccentric distance of 70 mm on graph (5), based on vertical mounting, ball bushing, 75 mm stroke, and the speed of 200 mm/s.

MGC

52 30 M5 x 0.8 25 161 82 37 28.5 50 53 112 16 38 12 21 M6 x 1 32 50 105 80 60 35 Rc1/8 20 188 92 44 33 60 63 132 20 47 12 25 M8 x 1.25 38 60 125 95 70 40 Rc1/8 20 241 104 55 40.5 70 73 162 25 58 14 26 M8 x 1.25 50 75 150 115 82.5 45 Rc1/4 Without Rear Plate Long Stroke Bracket Mounting Stroke Bracket mounting stroke Stroke range (mm) Bore size (mm) Bore size (mm) Bore size (mm) Y R Z 20

CLQ

75 80 85 90 95 100 60 65 70 75 80 85 90 95 100 105 M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

70 MY1CW50 MY1CW50 MY1CW50 MY1MW40 MY1MW40 MY1MW40 (1300) (1300) (1300) (1300) 60 60 1.

Fieldbus system EtherCAT compatible SI Unit

or 1342 22, 38, 70 or 1342 IO-Link master Class B EX600-LBB1 1 (4 ports) 22, 38, 70 or 1342 22, 38, 70 or 1342 1: Not available for EX600-SEC1/2 compatibility mode. 2: The allocated bytes of the IO-Link master can be changed by the IO-Link master size setting switch. -80No.EX-OMA1023 Details of I/O map of the IO-Link master unit I/O map of the IO-Link master unit is described below.

HRX-OM-W058

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Differential temp. of 3 oC Differential temp. of 6 oC Heat Radiated between inside and between inside and Model kW outside of installation outside of installation area area HRS018-A-20--R Approx. 4 70 40 HRS030-A -20--R Approx. 6 100 60 3.2 Installation HRS-R Series 3-6 HRX-OM-W058 Chapter 3 Transport

HRX-OM-O021

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Differential temp. of 3 oC Heat Differential temp. of 6 oC Radiated between inside and Model between inside and outside kW outside of installation of installation area area HRS050-A-20 Approx.10 140 70 The water-refrigerated thermo-cooler discharges heat by using facility water.

HEC_W-E

circuit Detects abnormal current/voltage or heat or fanlock. 3 Low recirculating fluid level Level sensor Detects lowering of recirculating fluid level in reservoir. 4 Detection of breakage of temp. sensor Controller internal circuit Detects breakage and short circuit of temp. sensor and cables. 5 Excessive temp. increase Controller internal circuit Detects temp. input value not less than 70

K35-OMW0031

HART Communication 30 h Pistonrod Retract end Moving area Output current value Total time (h) Display time (h) Piston movement 0% 5% ~5% ~4.8mA 3.125 3 10% 5~10% 4.8~5.6mA 0.625 0 10~30% 5.6~8.8mA 2.5 2 30% 30~50% 8.8~12mA 6.25 6 50% 50~70% 12~15.2mA 2.5 2 70% 70~90% 15.2~18.4mA 7.5 7 90% 95% 90~95% 18.4~19.2mA 1.875 1 100% 95%~ 19.2mA~ 5.625 5 Extended end (Set point by calibration) Total

DOC1023125

(Becomes close to the trapezoidal acceleration as the setting value reaches 0) Acceleration and deceleration ratio 10 10 10 10 to 100 EQFS251 to 50 EQFS321 to 70 EQFS401 to 70 Torque when held *2 50 70 70 Sets the torque when stopped after the positioning operation. (Unit: %) H 140 80 80 Sets the position loop P constant.

LEY-OM007

90.00 0.50 No.00[mm] 100[mm] 1AREA 100[mm]-0.5[mm]=99.5[mm] INPON [mm] c 100 0 [mm/s] b INP ON OFF INP [mm] k 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 [mm] 2AREA AREA1 2 180[mm] 290[mm] AREAON 100[mm]-0.5[mm] = 99.5[mm] [mm] c 2[mm] j 1[mm] j 100 0 [mm/s] b ON AREA OFF INP ON OFF INP [mm] k 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 [mm] 2 -25- -IN INPAREA a b c d e f

5 Port Solenoid Valve

Prior to the shipment of a SMC product to another country, assure that all local rules goveming that export are known and followed. ollowed. ollowed. ollowed. 3 VP4*50*-OMC0001-B VP4* * * *50/VP4* * * *70/VVP4* * * *0 Series Precautions for 5 Port Air Operated Valve 1 1 1 1 Be sure to read before handling. 10.