Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) Model LA LB LC LD LE LF LH LT 200 (233) 224 (257) 235 (273.5) 274 (318) 333 (399) CVRA1L50 62 108 4.5 9 44 41 263 (301.5) 316 (360) 375 (441) CVRA1L63 76 127 5 11 55 48 CVRA1L80 92 154 6 13 67 58 CVRA1L100 112 189.5 6 13 87 73.5 ( ) are the dimensions for rotation of 180 and 190.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) Model LA LB LC LD LE LF LH LT 200 (233) 224 (257) 235 (273.5) 274 (318) 333 (399) CVRA1L50 62 108 4.5 9 44 41 263 (301.5) 316 (360) 375 (441) CVRA1L63 76 127 5 11 55 48 CVRA1L80 92 154 6 13 67 58 CVRA1L100 112 189.5 6 13 87 73.5 ( ) are the dimensions for rotation of 180 and 190.

AC Servo Motor Driver (Pulse input type)

Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 250 150 75 300 200 100 375 250 125 Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection *4 PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06 7 7 Machine resonance suppression

Rotary Table/Vane Style Series MSU

Size Single vane Double vane Adjustment range of adjustment bolt (B) 90 145 150 1 25 Adjustment range of adjustment bolt (A) (S): 10 (D): 5 180 140 90 230 240 90 (S): 10 (D): 5 3 30 180 225 90 360 375 7 50 180 355 90 510 580 20 60 22.5 180 505 Allowable Load Positioning pin hole Adjustment bolt (A) Adjustment bolt (B) Do not permit the load and moment applied to the table to exceed the allowable

MNB

150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700 276 276 701 to 750 32 40 50 63 80 100 36 23 12.5 12.5 12.5 12.5 12.5 12.5 75 75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 151 to 200 ZZ Bore size (mm) 1 to 50 244 259 289 303 363 383 51 to 100 256 271 301 315 375

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Applicable cable O.D. 3.5 to 7 3 4 2 stations 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Stations n 148 137.5 120 14 90 123 112.5 96 13.5 66 L1 L2 L3 L4 L5 173 162.5 144 14.5 114 198 187.5 168 15 138 223 212.5 192 15.5 162 248 237.5 216 16 186 273 262.5 240 16.5 210 298 287.5 264 17 234 323 312.5 288 17.5 258 335.5 325 312 12 282 360.5 350 336 12.5 306 385.5 375 360 13 330 410.5

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Size Single vane Double vane Adjustment range of adjustment bolt (B) 90 145 150 1 25 Adjustment range of adjustment bolt (A) (S): 10 (D): 5 180 140 90 230 240 90 (S): 10 (D): 5 3 30 180 225 90 360 375 7 50 180 355 90 510 580 20 60 22.5 180 505 Allowable Load Positioning pin hole Do not permit the load and moment applied to the table to exceed the allowable values shown in the table below

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Cross section 0.23mm2 Pg.7 R P Applicable cord O.D. 3.5 to 7 3 1 : AC 93.5 86 M plug connector (M) R P 69.5(74.5) 300 (Lead wire) 86(87) 3 1 82.5(83.5) 98.5 Indicator light Cover dia 1.5 Cross section 0.23mm2 : AC Dimensions n: Stations (Max.20) Equation L1=20n+8 L2=20n+26 L n 2 48 66 87.5 98 18 368 386 412.5 423 19 388 406 437.5 448 20 408 426 450 460.5 15 308 326 350 360.5 16 328 346 375

VQZ1000/2000/3000

P 1 < >: AC Dimensions Formula L1 = 20n + 10, L2 = 20n + 32 n: Stations (Maximum 20 stations) L n 2 50 72 100 110.5 3 70 92 112.5 123 4 90 112 137.5 148 5 110 132 162.5 173 6 130 152 175 185.5 7 150 172 200 210.5 8 170 192 212.5 223 9 190 212 237.5 248 10 210 232 262.5 273 11 230 252 275 285.5 12 250 272 300 310.5 13 270 292 312.5 323 14 290 312 337.5 348 15 310 332 362.5 373 16 330 352 375

5-Port Solenoid Valve

197.2 216.2 235.2 254.2 273.2 292.2 311.2 330.2 349.2 368.2 387.2 406.2 425.2 444.2 463.2 482.2 501.2 520.2 539.2 L2 94 113 132 151 170 189 208 227 246 265 284 303 322 341 360 379 398 417 436 455 474 493 512 L3 160.5 173 198 210.5 235.5 248 273 285.5 310.5 323 348 360.5 385.5 398 423 435.5 460.5 485.5 498 523 535.5 560.5 573 L4 150 162.5 187.5 200 225 237.5 262.5 275 300 312.5 337.5 350 375

SX

A: Orange B: Green Stations n 10 stations 11 12 13 14 15 16 17 stations M3 Terminal screw 298 323 335.5 348 360.5 385.5 398 410.5 L1 L2 L3 L4 287.5 312.5 325 337.5 350 375 387.5 400 272 288 304 320 336 352 368 384 (Rail mounting hole pitch 12.5) 13 17.5 15.5 14 12 16.5 15 13 1-6-105 106 SX3000: PC Wiring System Compatible (Flat ribbon cable type/Plug-in) SS5X3-45GUStations DC4 C6 (Pitch)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SI unit 3 stations 4 5 6 7 8 9 10 11 12 13 14 15 16 stations Stations L1 148 173 198 223 248 273 298 323 335.5 360.5 385.5 410.5 435.5 460.5 L2 137.5 162.5 187.5 212.5 237.5 262.5 287.5 312.5 325 350 375 400 425 450 L3 120 144 168 192 216 240 264 288 312 336 360 384 408 432 L4 14 14.5 15 15.5 16 16.5 17 17.5 12 12.5 13 13.5 14 14.5 L5 90 114 138 162 186 210 234 258 282 306 330 354 378 402

Series VQ Base Mounted Metal Seal/Rubber Seal

SY SYJ SX VK VZ VF VFR VP7 VP4 VQ VQ4 VQZ VQD VZS VFS VS VS7 < >: AC type and TV approved type Dimensions (mm) L n Equation L1=16n+53, L2=16n+73 n: Station (Max. 24) 24 437 457 487.5 498 23 421 441 462.5 473 22 405 425 450 460.5 21 389 409 437.5 448 20 373 393 412.5 423 19 357 377 400 410.5 18 341 361 387.5 398 17 325 345 375 385.5 16 309 329 350 360.5 15 293 313 337.5 348 14 277 297 325

MNB

150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700 276 276 701 to 750 32 40 50 63 80 100 36 23 12.5 12.5 12.5 12.5 12.5 12.5 75 75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 151 to 200 ZZ Bore size (mm) 1 to 50 244 259 289 303 363 383 51 to 100 256 271 301 315 375

Shock Absorbers and Rate Controls

51 1.25 .563 .3t5 ADASI O 1.06 .31 8.87 9.81 .251 1.25 .500 t ( -)0J .37 5 ADAS I 5 1.06 I0,87 t.t5 -f0t .37 5 ADA52O r.06 .31 12.87 13.81 .251 1.25 .500 .25 .563 .37 5 ADA525 1.06 .3i 14.87 15.81 .251 1.25 .500 :15 .563 .375 All d mensions in inches. I W"at* e*mWr>Ns 4glv. ADASOOM Series ADA505M --+ ADA525M Metric L + Stroke 0o) Itllx.

Guide Cylinder Series MGG

For dimensions, refer to pages 372 to 375.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

AC Formula L1 = 20n + 8 L2 = 20n + 26 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 48 66 87.5 98 68 86 112.5 123 88 106 137.5 148 108 126 150 160.5 128 146 175 185.5 148 166 187.5 198 168 186 212.5 223 188 206 237.5 248 208 226 250 260.5 228 246 275 285.5 248 266 287.5 298 268 286 312.5 323 288 306 337.5 348 308 326 350 360.5 328 346 375

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

19n + 11 L2 = 19n + 23 n: Stations (Maximum 20 stations) Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 49 61 87.5 98 68 80 100 110.5 87 99 125 135.5 106 118 137.5 148 125 137 162.5 173 144 156 187.5 198 163 175 200 210.5 182 194 225 235.5 201 213 237.5 248 220 232 262.5 273 239 251 275 285.5 258 270 300 310.5 277 289 312.5 323 296 308 337.5 348 315 327 350 360.5 334 346 375

155

For cutting For cutting VND Flow Flow For cutting For cutting For jig For jig Machine bed washing Machine bed washing VCC Machine bed washing 1 cycle 1 cycle 375 Coolant Blow System / Related Equipment Coolant Blow System / Related Equipment Coolant pump Coolant valve Series SGC W Pressure Switches P.393 Nozzles for Blow P.390 Coolant line pressure control Industrial Filters P.391 2-color

Series IDG

performance conditions Standard performance Inlet air pressure 0.3 to 0.85MPa (43.5 to 123psi) 0.3 to 1.0MPa (43.5 to 145psi) 5 to 55C (23 to 131F) 5 to 50C (23 to 122F) 5 to 55C (23 to 131F) Inlet air temperature Note 1) Ambient temperature IDG10 5 to 50C (23 to 122F) Outlet air atmospheric pressure dew point 20C (-4F) IDG30 JIS symbol 12.5 (0.44) 625 (22.07) 62 (2.19) 125 (4.14) 250 (8.82) 375