Size: 1 (M3, M5 Basis), Style: 4 (Flat Elbow), Control Method: 0 (Meter-out), Thread: Rc (Metric M3, M5; Unified 10-32UNF), Port Size: M3 (M3X0.5), Option: None, Lock Nut: J (Round)
Size: 1 (M3, M5 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: Rc (Metric M3, M5; Unified 10-32UNF), Port Size: M3 (M3X0.5)
Size: 1 (M3, M5 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: Rc (Metric M3, M5; Unified 10-32UNF), Port Size: M3 (M3X0.5), Option: None, Lock Nut: J (Round)
Size: 1 (M3, M5 Basis), Style: 4 (Flat Elbow), Control Method: 0 (Meter-out), Thread: Rc (Metric M3, M5; Unified 10-32UNF), Port Size: M3 (M3X0.5)
Danger: Switch ON At normal output Switch OFF
Designation Contact layout Power supply connector Power supply with load voltage for valves (M12 4-pole plug, A-coded) 3 1 Diagnostic information The technical document states detail diagnostic information can be found on the SMC website (URL http://www.smcworld.com) 2 1 4 Ground terminal Functional earth (M3 screw) 2 +24 V for solenoid valve 5 Output connector Output signal interface for
Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Round head screw (M3 x 8), 2 pcs. (2)End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc.
M3 hexagon screw Tightening torque 0.6 Nm Troubleshooting If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation.
SI Unit for VQC/S0700 Series Valves ( EX500-Q 01 ) SI Unit for SV Series Valves ( EX500-S 01 ) M3 28: 4 pcs. ( Plus-minus slot round head screw ) Supply/exhaust block assembly Supply/exhaust block assembly 1.
Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Round head screw (M3 x 8), 4 pcs. (2)End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc.
Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Round head screw (M3 x 8), 4 pcs. (2)End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4x20) with washer, 1 pc.
Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0
Hexagon socket head cap screw Round head Phillips screw With spring washer, M3 x 0.5 x 14 L With spring washer, M3 x 0.5 x 16 L Switch mounting fitting Magnetic field resistant auto switch Mounting bracket kit number Items and number of each item Switch mounting bracket x 1 Switch mounting nut x 1 Round head Phillips screw x 1 Hexagon socket head cap screw x 2 Spring washer x 4 BQP1-
M1 W 10 50 100 L1 10 30 20 0 0 2 4 6 8 10 0 1 2 3 4 5 Work load (W) kg Work load (W) kg Work load (W) kg 300 30 150 L2 200 20 M2 100 L2 mm L2 mm L2 mm W 100 10 50 L2 M2 0 10 30 20 0 1 2 3 4 5 0 2 4 6 8 10 Work load (W) kg Work load (W)kg Work load (W) kg 30 300 150 a=500 a=500 a=500 Horizontal/Lateral a=1000 a=1000 a=1000 20 200 100 a=2000 a=2000 L3 mm L3 mm L3 mm a=2000 L3 100 10 50 W M3
Torque Recommended torque in lbf (N m) Hexagonal wrench width across flats Type Fixing thread size 1.5 5.3 (0.6) MXW 8 M3 x 4 1.5 5.3 (0.6) MXW12 M3 x 4 1.5 MXW16 M3 x 4 5.3 (0.6) 2 MXW20 M4 x 5 7.1 (0.8) 2.5 MXW25 M5 x 6 8.9 (1) 139 MXW Series Long Stroke Slide Table Operation Guide Maximum dynamic load and allowable moments are different depending on work mounting orientation,cylinder
Switch mounting screws (M3 x 0.5 x 10l) Switch spacer 32, 40 50, 63 Manufacture of intermediate strokes BQ-2 Method Spacers installed in standard stroke body. Switch mounting nut Ordering Refer to standard part number and ordering on page 1.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Vertical mounting: 0 (None) The moment load rate must be calculated in accordance with the above formula for all types, M1 to M3. As for Wmax and Mn, refer to the maximum load mass and allowable moment table in the next section. The moment for the inclined mounting must be calculated taking the moment caused by the load into consideration.
Terminal block
Required ventilation rate [m3/min] Heat radiation amount [kW] Differential temp. of 3C Differential temp. of 6C Model between inside and between inside and outside of installation area outside of installation area 7. This product series are constant-temperature fluid circulating machines with built-in tanks.