8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 2.02570 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 1.25978 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 1.54323 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 1.96211 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 1.96211 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, .86487 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 1.78317 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 2.20462 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 1.98415 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

AF800/900

Otherwise, it may result in a malfunction. 1. Float type auto-drain (N.O.) 1) Use compressor with capacity more than 3.7 kw {400 l/min Be sure to pipe auto-drain under the following conditions. Otherwise, it may result in a malfunction. 1. Float type auto-drain (N.O.) When making drain exhaust piping, use piping with bore size 10 or larger than 10. Length should be shorter than 5 m.

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 1.71960 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 2.35159 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 1.91486 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

PSxx-OMF0005CN

-2No.PS-OMF0005CN-E / 1 1.5 *3) 1 1 [] -3No.PS-OMF0005CN-E () () -4No.PS-OMF0005CN-E () * 5 m -5No.PS-OMF0005CN-E * (RcNPTG) 1/8 79 Nm 1/4 1214 Nm 1.52 2 * () ()() () () -6No.PS-OMF0005CN-E * IP66IP65 () 060 (5 ) * -7No.PS-OMF0005CN-E (ISA2 ) * * (EXH) 5 m 0.2 MPa CE (2 VCA ) () C-R () ()C-R ( ) () AC 10 DC 2 * * 2 0.51.25 mm -10+10 5 -8No.PS-OMF0005CN-E *

2–4

Symbol A B W A B W A B W HS 16.5 18.5 22 24 26.5 30 36 12 16 20 25 32 40 50 5.5 6 2.5 0.5 1 -1.5 -4.5 14.5 15 11.5 9.5 10 7.5 4.5 1.5 (4) 2 (4.5) -1.5 (1) -3.5 (-1) -3 (-0.5) -5.5 (-3) -8.5 (-6.5) 4.5 4 7.5 9.5 9 11.5 14.5 3.5 3 6.5 8.5 8 10.5 13.5 0 0 3.5 5.5 5 7.5 10.5 5.5 6 10 11 12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Bore size (mm) The dimension inside ( ) is for D-A93.

CUJ

Refer to page 2. 11 3.5 2-M3 x 0.5 (port size) M3 x 0.5 (Relief port: 10 See above) (Vacuum port: 11 See above) 3.5 3 C + Stroke B + Stroke A + Stroke (mm) Without auto switch With auto switch A B C A B C Bore size (mm) 24 18 29 23 11.5 16.5 6, 8, 10 4 Series CUJ Construction Double acting !3 w e q !1 r y o e t !2 For 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

H G I J K L A B C D E F M R +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 9 9 16 16 +0.027 0 +0.027 0 +0.027 0 +0.027 0 36 38 55 55 16 18 22 22 9 9 12 15 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 16 30 30 36 44 M4 10 10 13 13 10

HRX-OM-S004

20. 8-1 8.1.2 HRS100/150-A-40. 8-2 8.1.3 HRS100/150-A-46. 8-3 8.1.4 HRS100/150-W-20. 8-4 8.1.5 HRS100/150-W-40. 8-5 8.1.6 HRS100/150-W-46. 8-6 8.1.7 Refrigerant with GWP reference . 8-7 8.1.8 Communication specification . 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100

REC

Z + Stroke RR ZZ + Stroke (mm) A AL B1 CD CX CZ D E F G H H1 I K L MM N Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x 1.25 Up to 700 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 19 25 M10 x 1.25 Up to 700 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 19 32 M10 x 1.25 Up to 1000 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 19 40 M14 x 1.5 Up to 1000 24 21 22 10 15 14

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Seal material and its changed part Seal material Part numbers indicating changed seal material and leakage Compound No. 1349-80 Symbol Nil N1 Leakage Pa m3/s or less Note 1) Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10