Air Slide Table

20 30 125 75 100 40 50 150 10 20 30 125 75 100 40 50 150 3.5 (1) 6 (3.5) 22.5 (20) 28.5 (26) 41.5 (39) 50.5 (48) 3.5 (1) 6 (3.5) 12.5 (10) 18.5 (16) 31.5 (29) 40.5 (38) 3.5 (1) 10 (7.5) 12.5 (10) 18.5 (16) 21.5 (19) 30.5 (28) 11.5 (9) 14 (11.5) 19.5 (17) 18.5 (16) 31.5 (29) 30.5 (28) 11.5 (9) 29 (26.5) 19.5 (17) 24.5 (22) 29.5 (27) 44.5 (42) MXQR6 5.5 5.5 5.5 13.5 13.5 6 30 (27.5) 38.5 (

LEH_C

1 1.5 1 40 40 3 3 3 3 5 5 5 K K 5 (mm) NPN NPN 10 LECP6 ( PNP PNP 4 4 10 LECP1 1 LECP1 ( 1 NPN NPN 6 6 16 16 1P 1P PNP PNP 20 10 20 10 25 14 25 14 AN LECPA ( AP AN LECPA NPN NPN A A 32 22 32 22 AP PNP PNP B B (m) 40 30 40 30 C C 8 8 8 8 A A 1.5 1 1.5 1 10 10 B B 3 3 3 3 15 15 ( C C 5 5 5 20 20 F F 5 () () R R S S A B C / P.42 7.3 (NPNPNP) 12 - 2.1.3 3 10 2 5 1 4 7 6

CXS

New New Compact type Series CXSJ: 6, 10 Smaller and lightweight Overall length Dimensions (mm) Bore size (mm) Height Width Overall length Weight (g) Series Width 57 95 114 170 CXSJ6 CXS6 CXSJ10 CXS10 42 + Stroke 32 13.4 6 58.5 + Stroke 37 16 56 + Stroke 42 15 10 72 + Stroke 46 17 CXSJ CXS standard Height Superior mounting options 2 Symmetric mounting 1 Auto switches can be verified from 4

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

Cylinder with Lock Series CLS

10 10 10 10 RLQ D-A59W 17 17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL MLU D-A3/A44 D-G39/K39 BS1-125 BS1-140 BS1-200 BS1-160 BS1-180 12 13 7 7.5 8 MLGP D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL BS4-125 BS4-125 BS4-160 BS4-180 BS4-200 ML1C 5 5 5.5 6 6 D-G39/K39 11 11 10 10 10 [Mounting screw set made of stainless steel] Since this is a guideline

LEY-OM007

50 60 [mm] bCW 50mm 0 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 10 50mm CCW CW -40 -30 -20 -10 0 10 [mm] -10 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -33- LEC []/ LEC 12: CCW 1: CW 2: CCW 1 LEY*16**:100LEY*25**:100LEY*32**:100 LEY*16*A*150LEY*25*A*200 100 20 550 / LEY16* 535 / LEY25* 530 / LEY32* 1000 () 10 0 CCW CW / P.37 6.1 1 CCW CW 2 3 OFF ON -34- 5. / A

Dual Rod Cylinder Series CXSJ/CXS

15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction flow rate of vacuum suction type (Reference

MY1

MX 6.0 3.0 2.0 18 7 2.1 16 200 10 5.0 3.0 25 10 3 20 40 50 40 50 MTS 15 8.5 5.0 35 14 4.2 25 MY1C 30 14 10 49 21 6 32 100 30 MY 30 60 23 20 68 30 8.2 40 115 35 35 93 42 11.5 50 20 20 CY 150 50 50 130 60 16 63 50 The above values are the maximum allowable values for moment and load.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5 x 0.8 29 42 52 69 M5 x 0.8 15.5 14 89 Series CRBU2 Dimensions: 10 Double vane type Figures below show the intermediate rotation position when A or

Air Slide Table Series MXS

50 35 55 65 N 4 4 4 4 6 6 6 G 15 15 15 17 15 25 35 H 40 40 40 25 36 36 38 NN 2 2 2 3 3 4 5 GA 15 15 15 42 51 61 111 I 10 10 10 10 22 43 52 J 40 40 40 52 60 85 130 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 125.5 179.5 NA 2 2 2 2 2 4 4 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 ZZ 80 80 80 92 112 158 212 MXS12L-10 MXS12L-20 MXS12L-30 MXS12L-40 MXS12L-50 MXS12L-75 MXS12L-100 Regarding

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

9 M18 x 1.5 9 H M18 x 1.5 10 H Width across flats 16 45 Width across flats 16 Width across flats 37 28 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 G G 10 10 F F E E Y Y 3 3 18 34 C C A A B D B D Dimensions (mm) Dimensions (mm) A B C D E F G H Y A B C D E F G H Y Model Model ZPT40HBJ25-01-A18 ZPT63HBJ25-01-A18 72 127.5 83 138.5 50-01-A18 50-01-A18 107 162.5 118 173.5 40 41 28 43 20.5

Thermo-chiller

) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)

HRS100/150

Cooling Capacity HRS100-A-20/40(50 Hz) HRS100-A-20/40(60 Hz) 14 14 12 12 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 40C Ambient temperature 32C Ambient temperature 40C 8 8 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature

DOC1001322

, SiC 10, Carbon 10, PP 10 3-phase 380 to 415VAC(50/60Hz) Allowable voltage range 10%(No continuous voltage fluctuation) Power supply 3-phase 460 to 480VAC(60Hz) Allowable voltage range +4%,-10%(Max. voltage less than 500V and no continuous voltage fluctuation) Rated current A 40 Electrical system Applicable earth leakage breaker Sensitivity current mA 30 Rated operating current 5 A 22 Rated

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5 CY1R50 25 110 8.6 10 M8 x 1.25 15 Rc 1/4 159 48 42 60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 48 70 47 10 60 121 188 94 32 8-15-42 42 Series CY1R Magnetically Coupled Rodless Cylinder Direct Mount Type Centralized Piping Type: 10, 50, 63 CY1RG Bore size

3 Port Solenoid Valve Series SYJ300/500/700

Type 42 Applicable solenoid valve SYJ314SYJ314MSYJ324SYJ324MHow to Order SS3YJ3-42-05 -M5 Type 42 Type S42 Pilot valve is on the A port side. Valve mounting direction ( ) Stations Pilot valve is opposite the A port side. Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

IZT40/41/42

40 42 40 41 42 40 41 IZT40 IZT41 IZT42 Standard, AC type D 1 6H R F IZTB 40 16 Bar w q e r t y u i y Plug position q Model t One-touch fitting Symbol Model 40 Standard, AC type 42 Dual AC type Symbol Metric size 4H 4 Straight 6H 6 Straight 8H 8 Straight AH 10 Straight 4L 4 Elbow 6L 6 Elbow 8L 8 Elbow AL 10 Elbow Symbol Position Nil Without plug Q High-voltage cable side R Opposite side of

MHZ

Model MHK MHS Gripping force (1) Bore size (mm) JIS Symbol Double acting Opening/ Closing stroke (Both sides) (mm) Gripping force per finger Effective value (N) Weight (2) (g) Action Model MHC External Internal MHT 28 60 130 250 460 28 60 130 255 465 28 60 130 255 460 6 10 16 20 25 6 10 16 20 25 6 10 16 20 25 6.1 17 40 66 104 3.3 9.8 30 42 65 1.9 6.3 24 28 45 4 4 6 10 14 4 4 6 10 14 4 4 6

MHZ

16 20 25 6 10 16 20 25 6 10 16 20 25 3.3 9.8 30 42 65 1.9 6.3 24 28 45 4 4 6 10 14 4 4 6 10 14 4 4 6 10 14 6.1 17 40 66 104 MHZJ2-6D MHZJ2-10D MHZJ2-16D MHZJ2-20D MHZJ2-25D MHZJ2-6S MHZJ2-10S MHZJ2-16S MHZJ2-20S MHZJ2-25S MHZJ2-6C MHZJ2-10C MHZJ2-16C MHZJ2-20C MHZJ2-25C Double acting MHY MHW Single acting type, Normally open Normally closed Normally open MRHQ Misc.

Thermo-chiller/Rack Mount Type

Applicable model HRR012/018--10-T/MT*1 HRR012/018/024/030--20-T HRR012/018/024/030--20-MT1 Pump Rated flow (50/60 Hz)2, 3 L/min 7 (0.36 MPa)/10 (0.42 MPa) 10 (0.42 MPa)/14 (0.40 MPa) 10 (0.32 MPa)/14 (0.32 MPa) Maximum pump head (50/60 Hz) m 50 50 50 Output W 350 550 Circuit protector A 15 15 (10 A for standard) Recommended earth leakage breaker capacity A 15 Cooling capacity4 W The cooling