New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

SYJ300/500/700

M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to

100

ANR)] 200 100 400 300 600 500 700 0 Time to Reach Vacuum (Representative value) ZL1 Series ZL3/ZL6 Series ZL3m ZL6m (Tank capacity: 1 L) (Tank capacity: 1 L) 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure in tank [kPa] Vacuum pressure in tank [kPa] ZL6H ZL6M ZL3H ZL3M Time to reach vacuum [S] 1 2 3 4 5 6 0 Time to reach vacuum [S] 1 2 3 4 5 6 7 8 9 10 0

air-filter-e

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

Air Preparation Equipment

, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 Micromesh 65 x L250 Refer to pages 256 and 257 for the replacement element type.

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Rotary Actuator

Size Current model [kg] Reduction rate [%] CRA1 [kg] Angle adjustable type 30 50 63 80 100 0.3 10 0.27 Size: 50, 63, 80, 100 Size: 50, 63, 80, 100 1.5 13 1.3 D50 to 100 50 to 100 Rotating angle 2.5 12 2.2 90, 180, 100, 190 90, 180, 100, 190 4.3 10 3.9 8.5 14 7.3 With solenoid valve Size: 50, 63, 80, 100 Size: 50, 63, 80, 100 Mounting interchangeable with the current model 50 to 100 50 to

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

kPa 100 kPa 100 kPa to 100 kPa Black OUT + 12 to 24 VDC (Analog output) For positive pressure 0.1 MPa 1 MPa 0 0 to 1 MPa Load Blue DC () 1 0.6 A C B Pressure Dimensions PSE54M3 M5 PSE54R04 R06 ZSE ISE ZSP PS B 10 10 A ISA B PSE With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 IS A ISG (mm) (mm) PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 ZSM A A 11.5 10.8 6 4 B 3.5 3 B 20 18 Common Dimensions PSE54

7

9 100 12 100 12 100 15 100 15 100 Note 1) Power consumption: The value at ambient temperature of 20C and when the rated voltage is applied.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

For analog voltage output of 0 to 10 V Can be changed Can be changed 10 5 At the time of shipment At the time of shipment Analog output [V] Analog output [V] 1 0 105 10 0 105 10 10% of the rated flow range 1 100 1 100 10% of the rated flow range 100% of the rated Max. value of 100% of the rated flow range Max. value of the display range flow range the display range Flow [L/min] Flow [L/min

MY1

MY1MW16 MY1MW16 MY1MW16 MY1MW16 1 0.1 MY1MW16 MY1MW16 MY1MW16 0.3 0.2 100 200 300400500 1000 1500 0.05 0.5100 200 300400500 1000 1500 100 200 300400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Maximum Load Weight: MY1MW MY1MW: m3 MY1MW: m2 MY1MW: m1 30 100 200 20 40 50 100 10 30 50 20 40 4 5 30 MY1MW63 MY1MW63 MY1MW63 MY1MW63 3 10 Load weight (kg) Load weight

Mechanically Jointed Rodless Cylinder Series MY2

20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Cylinder with Turntable Series MGT

P = 0.5 MPa MGF 100 P = 0.5 MPa Larger than 75st Larger than 50st Load mass m (kg) Load mass m (kg) MGZ 40 50 100 25st 50st 30 25, 50st MGT 20 50 40 10 30 5 4 3 20 2 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 30 40 50 100 200 300 400 10 400 Eccentric distance l (mm) Eccentric distance l (mm) Allowable side load F (N) F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 DMGTM

Compact Manifold Regulator Series ARM5

(ANR) Flow rate l/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow rate l/min (ANR) Flow rate l/min (ANR

PF2A/PF2W

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load Weight Allowable Moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

MY2

speed mm/s Piston speed mm/s 5 Model Selection Series MY2 Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2HT40 MY2HT40 MY2HT40 40 40 40 30 30 30 MY2HT25 20 20 20 MY2HT25 MY2HT25 MY2HT16 10 10 10 MY2HT16 MY2HT16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000

Single Axis Electric Actuator Serriies LJ1S Slider Guide

L1 0 10 30 20 Transfer load m (kg) 300 L2 200 Mer m 100 L2 0 10 30 20 Mer Transfer load m (kg) m 300 a = 500 a = 1000 200 a = 2000 L3 100 m Mey a 0 10 30 20 Transfer load m (kg) Refer to page 145 for deflection data. 92 Standard Motor/Horizontal Mount Specification Series LJ1S30 Dimensions/LJ1S303SC Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12 x 1.75 thread depth 15 20

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) L2 Y Size (mm) 10 X L1 3 to 8 5 ( 8 Y) to (Y 1) Size 10 15 3 to 14 9 (14 X) to (X 1) 3 to 9 6 ( 9 Y) to (Y 1.5) Y = L1 = 15 20 5.5 to 18 10 (18 X) to (X 1.5) 3 to 10 7 (10 Y) to (Y 1.5) L2 = 20 30 7 to 20 10 (20 X) to (X 1.5) 5 to 13 8 ( 13 Y) to ( Y 2) X = 30 40 7 to 22 10 (22 X) to (X 1.5) 7 to 15 9 (15 Y) to (Y 4.5) Symbol: A11 The long shaft can be further