Adapter Material: Brass, Standard, Vacuum Inlet Direction: Vertical, Pad Diameter: ø32, Pad Styles: Flat Style, Material: Conductive Silicon Rubber, Vacuum Entry: Male Thread M6X1

Adapter Material: Brass, Standard, Vacuum Inlet Direction: Vertical, Pad Diameter: ø40, Pad Styles: Bellows, Material: Conductive Silicon Rubber, Vacuum Entry: Male Thread M6X1

Adapter Material: Stainless Steel, Vacuum Inlet Direction: Vertical, Pad Diameter: ø32, Pad Styles: Bellows, Material: Silicon Rubber, Vacuum Entry: Male Thread M6X1

Adapter Material: Stainless Steel, Vacuum Inlet Direction: Vertical, Pad Diameter: 4x10, Flat, Pad Styles: Flat Style, Material: Conductive NBR, Vacuum Entry: Male Thread M6X1

Adapter Material: Stainless Steel, Vacuum Inlet Direction: Vertical, Pad Diameter: ø20, Pad Styles: Bellows, Material: Silicon Rubber, Vacuum Entry: Male Thread M6X1

Adapter Material: Stainless Steel, Vacuum Inlet Direction: Vertical, Pad Diameter: ø32, Pad Styles: Bellows, Material: NBR, Vacuum Entry: Male Thread M6X1

Pad Diameter: ø16, Pad Styles: Deep Style, Material: Conductive NBR, Vacuum Entry: Male Thread M6X1

Pad Diameter: ø10, Pad Styles: Deep Style, Material: Conductive NBR, Vacuum Entry: Male Thread M6X1

Cooling Capacity: 002 (220 W), Power Supply: 6 (24 VDC)

Information

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 200 3 400 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) 06, 08 08, 10 1.0 300 06 04 2 4 50 100 200 0.5 1 2 100 0.0 0 0 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) Number of needle rotations (turns) ASG520F

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

12.5 10 3.5 AS2001F-03-3 AS2001F-06-3 44.8 6.3 21.8 49.1 43.6 13.5 5/32" 9.3 40.7 5.2 20.7 48 42.5 12.7 11.6 6 AS2001F-05-3 AS2051F-06-3 12.5 53.2 6.7 25.7 53.5 48.1 17 3/16" 11.4 50 6.2 21.6 48.9 43.4 16.5 12.8 6 14 10 3.5 17 15.5 13 3.5 AS2001F-07-3 AS2051F-08-3 59.8 8.1 27 54.8 49.4 18 1/4" 13.2 52.2 7.1 22.5 49.8 44.3 17 8 15.2 AS2051F-05-3 AS3001F-06-3 59 7.4 31.3 60.1 54.7 17 3/16"

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 05, 06, 07, 08, 09, 10 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

13.7 1/4" 28 21 4 9.3 14 10 12.5 3.5 AS2001F-06-3 AS2001F-03-3 44.8 6.3 21.8 49.1 43.6 9.3 40.7 13.5 12.7 20.7 48 42.5 5/32" 5.2 29 28 6 11.6 AS2051F-06-3 AS2001F-05-3 53.2 6.7 25.7 53.5 48.1 11.4 50 17 16.5 21.6 48.9 43.4 3/16" 6.2 49 34 14 10 3.5 12.5 6 12.8 17 13 15.5 3.5 AS2051F-08-3 AS2001F-07-3 59.8 8.1 27 54.8 49.4 13.2 52.2 18 17 22.5 49.8 44.3 7.1 1/4" 54 37 8 15.2 AS3001F-06-3

AZ1000

slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Code Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Connections (Inletq, Outletw) Bonnet option 01 02 06

Nozzle Type Ionizer

Repair Parts Emitter assembly IZN10E-NT Body assembly IZN10E A002 06 01 Nozzle type Symbol Type 01 Energy saving static neutralization nozzle 02 High flow rate nozzle 11 Female threads for piping One-touch fitting Symbol Type 06 6: Metric size 07 6.35 (1/4"): Inch size 16 6: Metric size (Elbow) 17 6.35 (1/4"): Inch size (Elbow) Emitter assembly Cartridge assembly IZN10E A003 Input/Output

99

{Rc3/4} FGH200-06 {Rc3/4} FGH300-06 {Rc3/4} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-10 {Rc1} FGH200-10 {Rc1} FGH300-10 {Rc1} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (

Compact manifold regulator ARM5 Series

ARM5B R 06 A Individual Supply Type 3. Semi-standard 1.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

12.5 10 3.5 AS2001F-03-3 AS2001F-06-3 44.8 6.3 21.8 49.1 43.6 13.5 5/32" 9.3 40.7 5.2 20.7 48 42.5 12.7 11.6 6 AS2001F-05-3 AS2051F-06-3 12.5 53.2 6.7 25.7 53.5 48.1 17 3/16" 11.4 50 6.2 21.6 48.9 43.4 16.5 12.8 6 14 10 3.5 17 15.5 13 3.5 AS2001F-07-3 AS2051F-08-3 59.8 8.1 27 54.8 49.4 18 1/4" 13.2 52.2 7.1 22.5 49.8 44.3 17 8 15.2 AS2051F-05-3 AS3001F-06-3 59 7.4 31.3 60.1 54.7 17 3/16"

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled flow (Free flow) Flow rate (l/min (ANR)) 100 180 230 260 390 660 790 1580 1710 460 920 Effective area (mm 2) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Note) Flow rate values are measured at 0.5 MPa and 20C. 15-9-75 2 How to Order AS 2 2 1 1 F 01 06

Ozone Resistant

5000 6000 1000 2000 3000 4000 4000-06 2550 3050 4050 4050-06 3050 4050 4050-06 2060 2560 3060 4060 4060-06 5060 6060 425 625 825 925 3000 210 1020 300 400 500 600 AWM Mist separator regulator VQZ AWD Micro mist separator regulator SQ AS Speed controller VQD SY Flow control valves SYJ SX 3-port solenoid valve (2) VQ VQ VQZ AS Speed controller SY SYJ Regulator AR Pressure control valves Filter