Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. Barrel Perfluoro is a registered trademark of Matsumura Oil Co.,Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates. Chemraz is a registered trademark of Greene, Tweed & Co.

3 Position Cylinder Series RZQ ø32, ø40, ø50, ø63 How to Order 100 M9BW RZQ 32 200 A Mounting bracket Number of auto switches Nil A Both ends tapped 2 pcs. Bore size B S Through-hole 1 pc. 32 32 mm L n Foot style "n" pcs. 40 40 mm F Rod side flange style

Indicator light Load voltage Auto switch model Lead wire length (m) Wiring (output) Type Special function Electrical entry Applicable load Pre-wired connector 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) REA DC AC In-line Perpendicular M9NV M9PV M9BV J79C M9NWV M9PWV M9BWV M9NAV M9PAV M9BAV M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA F79F P4DW 5 V, 12 V 3-wire (NPN) 3-wire (PNP) IC circuit REB Grommet

Made to Order Specifications:

F6N,F6P,F6B Water resistant Grommet (Perpendicular) Y7G,Y7H Normally closed Direct mounting style Grommet (In-line) F9G,F9H With timer Y7NW,Y7PW,Y7BW Grommet (In-line) Grommet (Perpendicular) Magnetic field resistant Y7NWV,Y7PWV,Y7BWV 2-color indication M9NW,M9PW,M9BW Grommet (In-line) Grommet (Perpendicular) M9NWV,M9PWV,M9BWV 2-color indication Band mounting style Y7BA Grommet (In-line) M9NA

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

Auto switch model Load voltage Lead wire length (m) 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Applicable load Pre-wired connector Indicator light Type Special function Electrical entry Wiring (Output) Perpendicular In-line DC AC M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA P3DW A96 A93 A90 M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9PAV M9BAV A96V A93V A90V 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Indicator light Auto switch model Lead wire length (m) Electrical entry Type Special function 1 (M) Tie-rod mounting Band mounting 0.5 (Nil) 3 (L) 5 (Z) M9N M9P M9B J51 G39C K39C M9NW M9PW M9BW M9NA ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? ? $ $ $ $ $ $ $ $ ? ? ?

ø 40, ø 50, ø 63, ø 80, ø 100 CE2 Series Stroke Reading Cylinder with Brake Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the counter operation manual for details. Note)

Indicator light Load voltage Lead wire length (m) Applicable load Auto switch model Tie-rod mounting Band mounting Wiring (Output) Special function Type Electrical entry Pre-wired connector 1 (M) DC AC 0.5 (Nil) 3 (L) 5 (Z) M9N M9P M9B G39C K39C M9NW M9PW M9BW M9NA*1 G59 G5P K59 G39 K39 G59W G5PW K59W G5BA*1 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Grommet 24V 12 V 2-wire

ISO Standard Hydraulic Cylinder ø 40, ø 50, ø 63, ø 80, ø 100 CHSD Series

Prewired connector Indicator light Lead wire length (m) Load voltage Port on the right, cushion valve on top Special function Type Electrical entry Wiring (output) Applicable load Auto switch model 0.5 (Nil) 3 (L) 5 (Z) 1 (M) AC DC D M9N M9P M9B M9NW M9PW M9BW M9NA 3-wire (NPN) IC circuit 5 V, 12 V Reed auto switch Solid state auto switch 3-wire (PNP) 2-wire 24 V Port on the right, cushion

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

Auto switch model Lead wire (m) Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Indicator light Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 3 (L) 5 (Z) 1 (M) 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9N M9P M9B M9NW M9PW M9BW M9NA 5 V, 12 V IC

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order CLQ B F D 30 40 30 40 M9BW CDLQ D F B With auto switch With auto switch (Built-in magnet) Made to Order Mounting style Refer to page 817

Indicator light Wiring (Output) Applicable load Pre-wired connector 1 (M) Type Special function Electrical entry In-line 3 (L) 5 (Z) None (N) AC DC 32 to 100 20, 25 40 to 100 20, 25 32 M9NV M9PV M9BV M9N M9P M9B 5 V, 12 V 3-wire (NPN) 3-wire (PNP) IC circuit Grommet 2-wire 12V 5 V, 12 V 12 V 5 V, 12 V 12 V Solid state switch J79C Connector M9NWV M9PWV M9BWV M9NAV M9PAV M9BAV M9NW M9PW M9BW M9NA

CM2 Series ø 20, ø 25, ø 32, ø 40 Air Cylinder: Standard Type Double Acting, Single Rod

Grommet 2-wire 12 V M9BV M9B V V V v v Connector H7C V V V V Terminal conduit 3-wire (NPN) 5 V, 12 V G39A V IC circuit 2-wire 12 V K39A V Solid state auto switch Relay, PLC Yes 3-wire (NPN) 5 V, 12 V M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v 24 V Diagnostic indication (2-color indicator) 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA

Cylinder with Lock Double Acting, Single Rod ø40, ø50, ø63, ø80, ø100 Series CNA2

Load voltage Wiring (Output) Indicator light Pre-wired connector Applicable load Auto switch model Lead wire length (m) Tie-rod mounting Band mounting 0.5 (Nil) 3 (L) 5 (Z) 1 (M) Type Special function Electrical entry DC AC M9N M9P M9B J51 G39C K39C M9NW M9PW M9BW M9NA M9PA M9BA F59F P3DW B54 B64 A33 A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G5BA G59F 3-wire (NPN) IC circuit

Compact Cylinder: Plate Type Double Acting, Single Rod Series CQU Size: 20, 25, 32, 40

Output) Pre-wired connector Applicable load DC AC Auto switch model Lead wire length (m) Indicator light Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 5 (Z) 3 (L) 1 (M) M9N M9NV 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit 5 V, 12 V 12 V M9P M9PV Reed switch Solid state switch M9B M9BV M9NW M9PW M9BW M9NA

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

function Electrical entry M9NV M9N V V V v v IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v Diagnosis indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA

Platform Cylinder Series CXT ø12, ø16, ø20, ø25, ø32, ø40

Lead wire length (m) 0.5 (Nil) 3 (L) 5 (Z) None (N) Applicable load Pre-wired connector 1 (M) Type Special function Electrical entry Wiring (Output) Perpendicular In-line DC AC 32, 40 12 to 25 32, 40 12 to 25 M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA M9NV M9PV M9BV 5V, 12V 3-wire (NPN) 3-wire (PNP) IC circuit Grommet 2-wire 12V Reed switch Solid state switch J79C Connector M9NWV M9PWV

Air Cylinder: Single Rod Series MB ø32, ø40, ø50, ø63, ø80, ø100, ø125

Indicator light Auto switch model Lead wire length (m) Tie-rod mounting Band mounting 0.5 (Nil) 3 (L) 5 (Z) Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Type Special function Electrical entry 1 (M) M9N M9P M9B J51 M9NW M9PW M9BW M9NA M9PA M9BA F59F P4DW 3-wire (NPN) 3-wire (PNP) G39 K39 IC circuit 5 V, 12 V 24 V Grommet 12 V 5 V, 12 V 12 V 2-wire 100 V, 200

Guide Table Series MGF ø 40, ø 63, ø 100

Load voltage Indicator light Auto switch model Lead wire length (m) Applicable load Pre-wired connector Type Special function Electrical entry 0.5 (Nil) 3 (L) 5 (Z) 1 (M) Wiring (Output) Perpendicular In-line AC DC M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9PAV M9BAV M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire

MHL2

Lead wire length (m) Auto switch model Electrical entry direction Load voltage Applicable load Pre-wired connector 5 (Z) Electrical entry Indicator light Wiring (Output) Special function Type 0.5 1 (M) 3 (L) (Nil) DC AC Perpendicular In-line M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9PAV M9BAV 12V 3-wire (NPN) IC circuit 5V,12V 3-wire (PNP) Solid

Plate Cylinder: Double Acting, Single Rod ø25, ø32, ø40, ø50, ø63 Series MU

Indicator light Load voltage Wiring (Output) Pre-wired connector Applicable load Auto switch model Lead wire length (m) Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 3 (L) 5 (Z) 1 (M) DC AC M9N M9P M9B M9NW M9PW M9BW M9NA M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 2-wire

RLQ

(Example) RDLQL40-50-B Locking direction F B Extension locking Retraction locking Indicator light Load voltage Auto switch model Lead-wire length (m) Type Special function Electrical entry direction Wiring (output) Applicable load Pre-wired connector 0.5 (Nil) 3 (L) 5 (Z) None (N) 1 (M) DC AC In-line Perpendicular M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA F79F M9NV M9PV M9BV J79C M9NWV M9PWV

Toggle Type Air Gripper ø 32, ø 40, ø 50, ø 63 Series MHT2

Lead wire length (m) Indicator light Load voltage Auto switch model Electrical entry direction Applicable load Pre-wired connector Wiring (Output) Type Special function Electrical entry 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) DC AC Perpendicular In-line M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP)