SMC Corporation of America
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DXT060-27A Flow Characteristics/Weight Weight (kg) Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Valve model b Cv Grommet Port size b Cv b Cv C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] b Cv 0.63 0.30 0.16 0.59 0.30 0.15 0.59 0.32 0.15 0.65 0.30 0.16 0.11 (With bracket: 0.13) 0.66 0.28 0.16 0.60 0.29 0.15 0.61 0.32 0.15 0.66 0.30 0.16 0.34 0.26 0.084

Weight (g) Model D-A90 6 30 D-A90V 6 30 D-A93 6 11 30 47 D-A93V 6 30 47 D-A96 8 41 D-A96V 8 41 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-A90/D-A93/D-A96 D-A90V/D-A93V/D-A96V 2 2.8 4.5 2.7 Slotted set screw M2.5 x 4 L 4 24.5 (22) 22 2 6 Slotted set screw M2.5 x 4 L D-A90 without indicator light Indicator light 2.7 D-A90V without indicator light Indicator

Order SMCs Global Service Network 17-6-1 17-6-2 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

A ddress setting Data Rate setting Address Data Rate Communication speed Node Address x10 x1 0 125 kbps (Default setting) 0 0 0 (Default setting) 1 250 kbps 0 1 1 2 500 kbps 0 2 2 3 PGM : : : : 6 2 62 9 6 3 63 6 4 PGM : : 9 9 : When PGM is set, the data rate is set via DeviceNet TM network.

C MS-5AU-3 MS-5AU-4 4.5 5 11.5 12 1.7 2.1 1.4 1.5 1.6 1.8 MS-5AU-6 7 2.5 14 4.0 1.7 Barb elbow for soft nylon: MS-5ALHU-3, -4, -6 Effective orifice(mm 2) Weight (g) MS-5ALHU-3, -4 D L Part No. C A MS-5ALHU-3 MS-5ALHU-4 4.5 5.0 11.8 12.6 1.1 1.4 3.0 3.1 1.6 1.8 8 8.8 10.8 2.5 14.6 2.4 3.7 MS-5ALHU-6 7.0 MS-5ALHU-6 Hose nipple: MS-5H-4, -6 Effective orifice(mm 2) Weight (g) F E Part No.

IR30-OM04-F PRODUCT NAME Precision Regulator MODEL/ Series IR3120 Contents Safety Instructions 2~3 1. Specifications 4~5 2. Construction and operation principle 6 3. How to order 7 4. Marking on product 7 5. Precautions for handling 8~11 6. Warranty 12 7. Troubleshooting 13 8.

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 33 25 10 10.5 10.5 12 8.5 13.75 4 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 30 10 18 11.6 19.5 23 20 29 53.2 9.1 14.1 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 34 14 22 15.6 23.1 27

tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K AA BB H J M N P1 P2 A B Note 1) C D 10-/21-AR20K-B 2 Note 2) 1/8, 1/4 20.5 30 1/8 11 34 40 43.9 44 67.4 5.4 65.5 26.5 15.4 28.5 55 M28 x 1 2.3 28.5 24.7 28.5 14 6 10-/21-AR25K-B

Contents Safety Instructions 2 1. Product Specific Precautions 1 4 (Precautions on Design, Selection, Mounting, Piping, Wiring, Maintenance) 2. Product Specific Precautions 2 6 (Maintenance parts) 3. Specifications 8 4. Construction and Outer dimensions --10 5. Period and scope of warranty 12 6.

Remarks Bracket A ZS-46-A1 Rear piping Self tapping screws: Nominal size 3 x 8L (2 pcs) Bracket C ZS-46-E Bottom piping Self tapping screws: Nominal size 3 x 10L (2 pcs) ZS-46-B Rear piping Panel mount adapter ZS-35-B Bottom piping ZS-46-D Rear piping Panel mount adapter + Front protective cover ZS-35-E Bottom piping Lead wire with connector ZS-46-5F 5 cores, 2 m, waterproof ZS-27-01 Rear

Accuracy [%F.S.] 50% 50% 50% 40% 40% 40% With 1 1/4" connected With 1 1/2" connected 30% 30% 30% With 3/4" connected Elbow piping (2") Elbow piping (1 1/2") 20% 20% 20% Elbow piping (1") 10% 10% 10% 3% 3% 3% 8 7 6 5 4 3 2 1 0 0% 0% 0% 8 7 6 5 4 3 2 1 0 8 7 6 5 4 3 2 1 0 Straight section [d] Straight section [d] Straight section [d] Straight When piping with diameter smaller than the straight

2 @5 Nickel plated Carbon steel Conical spring washer Chromate treated Rod cover Aluminum alloy !3 Bumper Urethane rubber !4 Clip Stainless steel spring wire !5 Rubber magnet Synthetic rubber Replacement Parts MHL2-40 Main parts Seal kit @6@7@8@9#0 <10> !1!3!6@6 <16 to 25> eo!0!4!6@6#0 <32, 40> ei!4!

1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 6-5 . 6-4 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 (ADH4000-04) . 9-2 9-4 . 9-2 10 R 10-1 . 10-1 10-2 . 10-1 10-3 . 10-1 10-4 . 10-2 10-5 . 10-2 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4

. 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5 5-1 . 5-1 5-2 (IDFB55E,75E) . 5-3 -1 6 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 6-5 . 6-4 7 K 7-1 . 7-1 7-2 . 7-1 8 L 8-1 . 8-1 8-2 . 8-1 8-3 . 8-2 8-4 . 8-2 9 R 9-1 . 9-1 9-2 . 9-1 9-3 . 9-1 9-4 . 9-3 9-5 . 9-3 10 S 10-1 . 10-1 10-2 . 10-1

P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) C 5.4 8.6 A 8 12 B 9.5 14 E 4H9 6H9 ED 9.5 13 EK 4 6 F 12.5 25 G 6.5 8.5 H 45 75 HA 19.5 39 HB 8.5 19 HG 8.5 19 HI

[White] Blue [Black] Black [White] Load Switch 1 Switch 1 Switch 1 Relay Load Relay contact Blue [Black] Blue [Black] Brown [Red] Brown [Red] Brown [Red] Relay Black [White] Black [White] Blue [Black] Black [White] Switch 2 Switch 2 Switch 2 Blue [Black] Blue [Black] The indicator lights will light up when both switches are turned ON. 2 wire with 2 switch AND connection 2 wire with 2 switch

[White] Blue [Black] Black [White] Load Switch 1 Switch 1 Switch 1 Relay Load Relay contact Blue [Black] Blue [Black] Brown [Red] Brown [Red] Brown [Red] Relay Black [White] Black [White] Blue [Black] Black [White] Switch 2 Switch 2 Switch 2 Blue [Black] Blue [Black] The indicator lights will light up when both switches are turned ON. 2 wire with 2 switch AND connection 2 wire with 2 switch

J C A B DFull stroke -X 20Data eEntire stroke extension by pressurizing A, B and C ports. 10-10-1 2 3 Position Cylinder Series RZQ 32, 40, 50, 63 How to Order RZQ 32 200 100 A M9N Mounting style Number of auto switches A B L F G D Nil Both ends tapped 2 pcs.

/2 70.5 ( 40 stroke) /2 75.5 ( 50 stroke) /2 75.5 ( 65 stroke) /2 80.5 ( 75 stroke) /2 78 ( 90 stroke) /2 83 (100 stroke) /2 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 12.5 3 15 20 32 15 17.5 20 4 25 30 30 12.5 15 3 (mm) L Max