PSxx-OMG0001CN

V80 mA 1 V Max.30 V80 mA 1V :15 V 1 k :420 mA 300 (DC12 V) 600 (DC24 V) 50 DC+ DC+ OUT1 OUT1 OUT2 OUT2 DCDCPSE32(T) PSE33(T) NPN 2 PNP 2 Max.80 mA 1 V Max.30 V80 mA 1 V 15 V 1 k DC+ DC+ OUT1 OUT1 OUT2 OUT2 DCDCPSE34(T) PSE35(T) PNP 2 PNP 2 Max.80 mA 1 V Max.80 mA 1 V 420 mA 300 (DC12 V) 600 (DC24 V) 50 DC+ DC+ OUT1 OUT1 OUT2 OUT2 DCDC-15No.PS-OMG0001CN-H 1 M [S_J

MHS

DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710 3,040 MHSHJ3-DA 550 800 1,380 2,360 4,120 MHSHJ3-DB 520 770 1,340 2,310 4,120 5 3. 3-1. 1 2 3 3-2. 1 .

Compact Electric Actuator Series LG1

+10% 15% Single phase 200 to 230VAC (50/60HZ ) For 100V Single phase 100 to 115VAC (50/60HZ ) R T 1MCCB Equipment Connection Example Noise filter External noise is prevented by the noise filter.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

PSxx-OMT0001CN

No.PS-OMT0001CN-E // ISA3-A/B2 OUT1 OUT2 or 2 7 8 14 15 (ISA3) 15 () 17 (2 ) 17 18 21 27 27 30 35 39 42 43 45 OUT1 OUT2 45 OUT1 45 OUT2 46 47 47 48 48 48 () 62 63 64 65 66 67 -1No.PS-OMT0001CN-E 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

High Power Cylinder:

2500 3000 30 1/4 1/4 h=0.7 6 10 1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500 2000 2500 3000 1,000 2,000 3,000 Max. speed Vmax (mm/s) Graph 3:40 40 8 10 1/4, 3/8 h=0.7 6 500 30 0.5 40 (3/8) 12 18 24 30 36 1000 1500 2000 2500 3000 3/8 12 3/8 12 3/8 12 3/8 12 3/8 12 0.1 0.3 20 10 Note) Refer to p.4.10-5 for max. absorbed energy since cushioning

Peltier-type Chiller Thermo-con/ Compact Type

Water bath Q = T x V x x C h x 60 x 1000 10 x 2 x 1 x 103 x 4.2 x 103 20C V = 15 x 60 x 1000 After 15 min, = 93.3 W cool 30C down to 20C.

MHL2

15 0.4 MP 0.4 MPa 0.4 MPa 0.5 MP 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.5 MPa 0.4 MPa 0.5 MPa 30 30 0.4 MP 0.4 MPa 0.4 MP 0.4 MPa 10 10 0.3 MP 0.3 MPa 0.3 MPa 20 20 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MP 0.2 MPa 5 5 10 10 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0 10 20 30 40 50 60 70 0 20 40 60 80 100 120 0 20 40 60 80 100 120 10 20 30 40 50 60 70

Compact Cylinder with Air Cushion and Lock Series RLQ

Model C D Mounting bolt M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l M6 x 130l M6 x 140l M6 x 165l M6 x 190l M8 x 125l M8 x 135l M8 x 145l M8 x 170l M8 x 195l RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75

Dedicated Controller

Description RUN 15 +24V Common The positive common of the input terminal. 1, 14 HOLD 3 The terminal that performs setup operations (actuator starting preparation). 2 Starting preparation STOP 16 SET-UP ALARM RESET 4 The terminal that performs program start. RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed.

0.01

Specifications ISA2-G1 ISA2-G5 ISA2-H1 ISA2-H5 Model Detection distance Fluid Operating pressure range Recommended detection nozzle 0.01 to 0.25 mm 0.03 to 0.50 mm Dry air (filtered to 5 m) 30 to 200 kPa 1.5 5 or less 8 or less 12 or less 50 to 200 kPa 2.0 10 or less 15 or less 22 or less 50 kPa 100 kPa 200 kPa Supply pressure Consumption flow rate L/min (ANR) 12 to 24 VDC 10%, Ripple (p-p

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Response time (ms) (0.5 MPa) Type of actuation 52-SY5000 26 or less 22 or less 38 or less 52-SY7000 38 or less 30 or less 56 or less 52-SY9000 50 or less 50 or less 70 or less 2-position single 2-position double 3-position Note 1) According to dynamic performance test JIS B8375-1981. Note 2) Response time when barriers were combined with a valve.

JXCx-OMT0034CN

/TB . 20 .CN4 . 21 6.1 . 21 1 - 6.2 . 21 6.3 . 22 . 23 7.CN3 . 24 8.CN1IF (CONT) . 25 8.1 . 25 8.2 . 27 9.CN2TB/PC . 28 9.1 . 28 10.LED . 29 10.1 LED . 29 10.2 IF LED . 29 11. . 30 11.1 . 30 11.2 . 30 11.3 . 30 11.4 . 32 12. . 33 12.1 . 33 12.1.1 . 39 12.2 IF ( ) . 40 12.3 (IO ) . 41 12.4 . 43 13.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

ZQ-OM01601

ZQ-OM01601 // ZQ-ZSV 2 9 10 11 14 14 15 16 16 19 19 19 F0 21 F1 OUT1 22 F2 OUT2 24 F3 26 F4 27 F6 29 F11 30 F80 31 F81 32 F90 33 F96 35 F98 36 F99 38 39 42 43 44 50 51 51 1 - *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Slide Unit/Double Rod Type Series CX2 Slide Bearing: 10, 15, 25 How to Order Port thread type Symbol Bore size 10, 15 Type M thread Rc 1/8 NPT 1/8 G 1/8 Nil TN TF 25 CX2 N 15 100 B C X2 N 15 B 100 J79W DB With auto switch Made to Order Cylinder with auto switch Refer to page 465 for Made to Order specifications.

LMU100/200 Series Mist Spray Unit

35 200 mm 250 mm 300 mm 350 mm LMV220 1 2 Flexible tubing Copper tubing Mixing valve 1 2 Available Not available Construction Dimensions LMV10/With air blow circuit LMV10L 45 41 15 1 (24) Air adjusting needle for mist 4.3 8 2 4.3 Oil adjusting needle 21.8 8.5 (37) 4 AIR Mixing valve (LMV10-) OIL B B 12 SMC Double pipe nozzle A A Cross section BB 3 (Max.)54 37 22 BLOW AIR 29 15 12 OIL AIR

I

re 3up9aasor circdl yoltage suppae66or ckcuit (cromfte'tlype) (Gromm6tterminal) (olN cmnector] (Conduit teminal) NVF5000 # NW5F5-20 Manifold NVF3000 NW5F3-30 Type CYL port Exhaust B mount Common, lndividual o Siltr 15 Port Pilot TyPe/Rubber Seal L,lSeries NVFSOOO symbol Body Ported Doubr.

PFA/PFW

Proper tightening torque Nm 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 Nominal size of threads 1/8 1/4 3/8 1/2 3/4 Load operating voltage Power supply voltage Switch's internal voltage drop > [When used for air] 6. Be certain to observe specifications for the measured flow rate and maximum operating pressure. Operation at a flow rate exceeding the prescribed range can cause damage.