Water-cooledThermo-chiller

HRW015-H 3 HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 15 2 HRW008-H 10 1 5 HRW002-H 0 10 20 30 40 50 60 70 80 90 0 0 10 20 30 40 50 60 70 80 Temperature difference t (C) (Circulating fluid temperature Facility water temperature) Circulating fluid temperature (C) When pump inverter is operating at frequency of 60 Hz (maximum).

100

30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 200 180 160 140 120 100 80 60 40 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 200 180 160 140 120 100 80 60 40 20 0 Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Suction flow rate Suction flow rate Air

HRX-OM-R016

-A-20-(BJMT)) 9.5.2 HRS030-W-20-(BJMT) 1000 1000 Ambient Ambient temperatur temperatur 800 800 Heating capacityW Heating capacityW e e 40 32 25 20 5 40 32 25 20 5 600 600 400 400 200 200 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz Fig. 9-6 Heating capacity(HRS030 W-20-(BJMT)) 9.4 Cooling capacity HRS Series 9-6 HRX-OM-R016

MHL2

MHL2-10D MHL2-16D MHL2-16D MHL2-10D 2 1 2 1 60 60 25 25 0.6MPa 0.6MPa Holding force (N) Holding force (N) Holding force (N) Holding force (N) 50 50 20 20 0.5MPa 0.6MPa 0.5MPa 0.6MPa 40 40 15 15 0.4MPa 0.5MPa 0.4MPa 0.5MPa 0.4MPa 0.4MPa 30 30 10 10 0.3MPa 20 20 0.3MPa 0.3MPa 0.3MPa 0.2MPa 5 5 10 10 0.2MPa 0.2MPa 0.2MPa 10 20 30 40 50 60 70 20 40 60 80 100 120 20 40 60 80 100 120 0 0 0 10 20

Valve Single Unit

For details, refer to pages 1-6-82 to 85, 112, 119, 124, and 127. 02 2 stations How to Order Valves 20 20 stations 5 LOZ SX 3 2 40 This also includes the number of blanking plate assemblies.

MGC

47 33 12 25 70 M8 X 1.25 40 38 188 Rc(PT)1/8 60 92 125 44 95 20 70 73 162 25 58 82.5 40.5 14 26 M8 X 1.25 45 50 241 Rc(PT)1/8 75 104 150 55 115 20 Without rear plate Long stroke Bracket mounting stroke Bracket mounting stroke Stroke range (mm) Bore (mm) Bore (mm) Bore (mm) Y R Z 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100st or more 250 to 400 88 14 119 125st or more 350 to 500 88 14

VFS

Description Material Return spring Gasket VF4000-18-1 VF4000-20-1 VF4000-20-1 VF4000-18-2A VF4000-20-1 Stainless steel NBR o !0 !1 Hexagon socket head screw Steel M4 x 40 M4 x 40 M4 x 40 !2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

CXT

15 10 2 pcs. 10 10 25 to 5 20 15 5 1 pc. 10 10 25 CXTl25 5 15 10 10 2 pcs. 10 15 20 CXTl 32 40 5 15 10 5 1 pc. 10 10 20 (mm) D-F7lW D-J79W D-F9BAL D-F7NT D-F79F Auto switch model D-A7l D-A8l D-A73C D-A80C D-A7lH D-A80H D-F7l D-J79 D-F7lV D-J79C Applicable model D-F7lWV D-A79W D-F7LF Number of mountings 2 pcs. 5 10 15 15 20 20 25 CXTl 32 40 1 pc. 5 5 10 15 15 20 25 3.8-10 Platform Cylinder

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

Information

temperature [C] [60 Hz] 0 10 20 30 40 50 Circulating fluid temperature [C] HRS050-A-20 8000 7000 6000 5000 4000 3000 2000 1000 00 10 20 30 40 50 Circulating fluid temperature [C] 8000 7000 6000 5000 4000 3000 2000 1000 00 10 20 30 40 50 Circulating fluid temperature [C] Cooling capacity [W] Cooling capacity [W] 25C 25C 32C 32C Ambient Ambient temperature temperature 40C 40C [50 Hz] [60 Hz

MLGC

70 4 104 Rc 1/8 Rc 1/8 62 7 7 40 125 60 32 M8 x 1.25 13 38 M12 x 1.75 depth 21 115 11 82.5 4 115 67 8 8 45 150 75 38 M8 x 1.25 14 47 WH W X Y T U V W Z Bore size (mm) 20 25 32 40 30 23 30 112 146 182 16 53 50 30 25 37 132 167 199 20 63 60 25 28.5 37 132 167 202 60 20 63 20 33 44 162 210 227 25 73 70 Without Rear Plate Stroke range (mm) Long Stroke Bore size (mm) 20 25 32 40 Bore size (mm

MLGC

70 4 104 40 7 7 32 38 Rc 1/8 Rc 1/8 62 60 13 125 M8 x 1.25 M12 x 1.75 depth 21 115 11 82.5 4 115 45 8 8 38 47 67 75 14 150 M8 x 1.25 WH W X Y U W T V Z Bore size (mm) 20 25 32 40 30 23 30 50 112 146 182 16 53 30 25 37 60 132 167 199 20 63 25 28.5 37 60 132 167 202 20 63 20 33 44 70 25 162 73 210 227 Without Rear Plate Stroke range (mm) Long Stroke Bore size (mm) 20 25 32 40 Bore size (mm

Digital Flow Switches

50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Parts list Material ADC

Large Size Vacuum Module: Series ZR

(l/min (ANR)) Air consumption 80 80 80 80 Vacuum pressure Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Air consumption 70 70 70 70 60 60 60 60 50 50 50 50 40 40 40 40 Suction flow 30 30 30 30 Suction flow 20 20 20 20 10 10 10 10 Supply pressure (MPa) Suction flow (l /min (ANR)) Supply pressure (MPa) Suction flow (l/min (ANR)) ZR1

Digital Flow Switches, Series PF2A, Series PF2W

50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Parts list Material ADC

Tamper Proof and Flat Head Screw

In-line type AS1001F AS2001F AS2051F AS3001F AS4001F 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 Dual speed controller ASD230F ASD330F ASD430F ASD530F ASD530F ASD630F 6 to 20 20 to 32 20 to 40 20 to 40 40 to 63 63 to 100 M5 1/8 1/4 1/4 3/8 1/2 Applicable cylinder bore size (mm) Piping side port size Cylinder side port size Model AS1200 AS2200 AS3200 AS4200 M5 1 2 1/8 1/4 3/8 1/2 3/4 1 1

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series Average speed (mm/s) 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VFS1120-01 Conditions It is when the cylinder

End Lock Cylinder Series CBG1

63 35 32 27 38 20 16.5 32 2 14 14 58 11 45 59 72 M10 x 1.5 depth 16 to 1400 80 40 37 32 50 25 19 40 3 20 20 71 13 53.5 68 89 M10 x 1.5 depth 22 to 1500 100 40 37 41 60 30 20 50 3 20 20 71 16 64.5 79 110 M12 x 1.75 depth 22 Bore size (mm) K KA MM MO NA P RF S TA TC TDH9 TE TF TG WL ZZ 20 +0.08 0 5 6 M8 x 1.25 15 24 1/8 11 81 11 M5 x 0.8 8 4 0.5 5.5 15 118 25 5.5 8 M10 x 1.25 15 29 1/8 11

Cylinder with Lock Series CNS

40 40 90 63 43 14 18.5 215 35 35 Up to 1200 (mm) Bore size (mm) GR J K KA L M MA MM N P Q R RR S T U V VA H Z ZZ 125 140 160 30 M14 x 1.5 15 31 65 19 M12 x 1.75 M30 x 1.5 35 1/2 85.5 25 29 303 87.5 35 20 23 110 478 507 30 M14 x 1.5 15 31 75 19 M12 x 1.75 M30 x 1.5 35 1/2 93.5 25 32 343 95 40 20 28 110 528 560 35 M16 x 1.5 17 36 80 22 M12 x 1.75 M36 x 1.5 39 3/4 104 25 36 396 109 45 25 35