Refer to pages 14-21-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 8 for Precautions on every series. Selection Piping Warning Warning AD402 AD600 1.
Sends a monitor command to acquire the INP signal 14 :01_MO :01MOOK information. Acquires the information repeatedly until the received information shows that the INP is "1". 15 Repeat No. 14-15 (INP = 1 indicates that the target location has been reached.)
Product Specifications .11 3.1 Basic specifications .11 3.2 Parts description .12 3.3 Outside dimension diagram .13 (1) Screw mount type (LECA6-).13 (2) DIN rail mount type (LECA6D-) .13 3.4 How to install .14 (1) How to install .14 (2) Ground wire connection .14 (3) Installation location.15 4.
26 15.5 1.5 1.4 10 4 2.5 6 4 14 10 15.2 3 5 25.7 19 12 5 4 9.4 17 20.5 16.2 12 27.2 14 8 6 5 14 17 6.5 5.5 18 22 10 19 21.5 18.8 14 28.8 17 17 7.5 6.5 25 22 17 7 30 8 22 12 22 23.5 19.3 17 30.3 19 17 9 8 38 22 Reference dimensions after R(PT) thread installation.
25 36 16 25 37 16 24 36 32 40 65 31 39 64 33 41 65 31 39 64 30.5 34.5 30.2 34.2 35.2 30.2 34.2 35.2 30.2 34.2 35.2 35.8 36.8 39.8 35.8 36.8 39.8 36.3 37.3 40.3 36.3 37.3 40.3 23.8 26.5 28.5 26.2 28.2 28.9 26.2 28.2 28.9 26.2 28.2 28.9 29.8 30.5 31.6 29.8 30.5 31.6 30.3 31 32.1 30.3 31 32.1 4 2.5 14 10 14 17 12 14 17 12 14 17 27.8 23.5 27.5 28.5 23.5 27.5 28.5 23.5 27.5 28.5 28.5 29.5 32.5
Operation Examples (Timing Chart)" of this instruction manual. 14 3-2.
40 10.5 14 17 20 22 22 24.5 24.5 40 48 62 66 21 <22> 28 33.5 42 57 70 71 95 28.5 37.5 38.5 49.5 85 (91.5) 93 (99.5) 104 (110.5) 110 (116) 35 35 33 37 10 14.2 15.2 17.2 M5 M5 M6 M6 Bracket mounting a b f g h i Port size P Model j 37 41 46 48 a1 Note) d e 2.3 2.3 2.3 2.3 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 56 56 70.5 70.5 52 60 68 73 75 75 92 92 30 34.5 39 41 6.5 6.5 6.5
F A A MXH Lr MXF16 MXU Lr = 40 mm 0.07 0.07 0.20 MXS Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.06 0.06 MXF16-75 MXQ 0.16 MXF16-75 MXF16-75 MXF16-50 MXF16-30 0.05 0.05 MXF 0.12 0.04 0.04 MXF16-50 MXW MXF16-50 0.03 0.03 0.08 MXF16-30 0.02 0.02 MXJ MXF16-30 0.04 0.01 0.01 MXP 0 0 20 40 60 80 100 20 40 60 80 100 120 60 0 40 80 100 20 MXY Load
Recommended tightening torque Unit: N m Thread size 18 14 38 12 34 1 1 1/4 1 1/2 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 40 to 42 48 to 50 (4) Do not apply a spanner to the pressure switch body during piping. Otherwise, the product may be damaged. (5) Do not apply torsion or bending moment other than the weight of the product itself.
50 Stroke[mm] Origin 50mm Motor side End side 10 20 30 40 50 60 Stroke[mm] Origin 50mm Motor side End side -50 -40 -30 -20 -10 0 Stroke[mm] Origin 50mm Motor side End side -40 -30 -20 -10 0 10 Stroke[mm] Origin 50mm Motor side End side -60 -50 -40 -30 -20 -10 Stroke[mm] -29- 4.
L=100mm L=100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.06 0.02 0.02 0.04 0.01 0.01 0.02 0 0 0 80 20 40 60 80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L=100mm L=100mm L=100mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05
-40 40 40 -40 -40 Suction flow rate Suction flow rate 20 20 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 0 10 20 30 40 50 5 10 15 20 25 0 0 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) Viewing the flow rate characteristic graphs The flow rate characteristics indicate the relationship between the vacuum
Maintenance unit Table. 14 Model Unit part no. MSUA1-*S P402070-2A MSUA1-*SE P402070-2B MSUA3-*S P402090-2A MSUA3-*SE P402090-2B MSUA7-*S P402060-2A MSUA7-*SE P402060-2B MSUA20-*S P402080-2A MSUA20-*SE P402080-2B Table. 15 Model Unit part no.
Dimensions Foot type: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke 10, 16, 20, 25 LY LH X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT (mm) Bore size (mm) LS LC LT LH LX LY S Z LZ ZZ Y X 10 5.5 83 2.3 14 33 25 65 19 42 108 9 6 16 5.5 92 2.3 18 42 30 74 21 54 119 9 6 20 6.8 137.5 3.2 25 40 40 97.5 20.5 55 166 20 8 25 6.8 142.5 3.2 28 40 47 102.5
Wiring . 12 3.1 Power Supply Wiring . 12 3.2 I/O signal connection . 13 3.2.1 Connection example (Sink I/O interfaces) . 13 3.2.2 Source I/O interfaces . 14 3.3 Wiring of PLC and driver . 15 4. Parameter list (Driver side) . 17 5.
Consumable parts Fig. 14 Replaceable seals 4-1-1. Seal kit Bore size (mm) Order No. Operation 32 C96N32-PS 17 Rod seal 1 pc 40 Rod seal 1 pc 41 Piston seal 1 pc 42 Large cushion seal 2 pcs 43 Small cushion seal 1 pcs 45 Cylinder tube gasket 2 pcs 40 C96N40-PS 50 C96N50-PS 63 C96N63-PS 80 C96N80-PS 100 C96N100-PS Lock part is replaced as an entire unit.
Grease (10g): 1 bag 40 CG1Y40Z-PS When only grease for maintenance is required, order it by the following numbers.
Valve model Port size VCL2l VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included
L1=(14 x n)+36 10 16 14 10 14 Y W Pressure gauge (Accessory) V X 2 x 4.3 L3=50+R+V L4=50+T+X H H L L S S O O M4 thread hole U U C C P P K K 50 SMC 25 S T R L2=(14 x n)+29 29 55 (Max. 58) Note) U IN IN IN 33 15 14 Note) Max. dimension is the size when the knob is unlocked.
(mm) Applicable tubing KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S M5 x 0.8 M6 x 1 36.5 9 12 37 33 8 10.4 16 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 12 8 6 12.8 14 17