CNG

to 300 301 to 800 Bore size (mm) 20 25 32 40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230FM-M5-04 9.3 29.4 12 17.5 12.9 29.6 33.8 28.8 7.8 11.7 9.6 10 34.6 M5 x 0.8 8 30.1 25.1 6 ASD230FM-M5-06 11.6 32.5 13 13.7 20.6 34.6 6 ASD330FM-01-06S 14 39.6 11.6 29 13.7 38.5 22.9 36.1 31.1 10.6 14.2 11.8 12 32.1 27.1 R 1/8 15.8 33.9 8 ASD330FM-01-08S 38.9 15.2 31 18.5 44.8 28.2 6 ASD430FM-02-06S 12.8 53 17 43.5 25.2 18 8 ASD430FM-02-08S

SMC Pneumatic Clean Series

x 0.8 Relief port GC X 2-LD GB GA 2-P (Rc, NPT, G) H1 Y Width across flats B1 I NDh8 D B LH MM LX K AL L 3 NB N A NA H S + Stroke ZZ + Stroke (mm) H LD 7 5.5 5.5 5 K Bore size NB X Y B 138 109 107 103 1/8 AL MM NA I ZZ S P N L D A 52.3 42.3 36.3 30.3 ND 20-0.033 0 B1 H1 LH LX 22 22 GA GB GC 34 31 31 27 17 17 13 6 6 5 8 8 6 6 15 15 15 46.5 37.5 33.5 28 14 12 10 8 15 12 12 12 49 43 43 39 104

CNG

K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB 141 (149) 88 5.5 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 151 (159) M6 x 0.75 98 6 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M5 x 0.8 depth 7.5 154 (162) 99 6 M8 x 1.0 5.5 10 M10 x 1.25 35.5 Rc(PT) 1/8 26.5 2.5 73 11 10 (11) 15 (16) 28.5 25 3 12 M5 x 0.8 depth 8 169 (178

Cylinder with Lock Series CNG

K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB M5 x 0.8 141 (149) 88 5.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 M6 x 0.75 151 (159) 98 6 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M8 x 1.0 154 (162) 99 6 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc(PT) 1/8 26.5 2.5 73 11 10 (11) 15 (16) 28.5 25 3 12 M10 x 1.25

SZ3000

For DIN rail weight, refer to page 1-3-12.

CJ2X/CUX/CQSX/CQ2X/CM2X

size Vacuum port, Relief port Bore size (mm) 11(Vacuum type) +1.0 0 mm 12 16 20 25 M5 x 0.8, RC 1/8 Note) M5 x 0.8, RC 1/8 Note) Rc1/4 Rc1/4 Air 1.5 MPa 1.0 MPa Fluid Proof pressure Maximum operating pressure Minimum operating pressure M5 x 0.8 Note) Only 5 stroke comes with M5 x 0.8 in the case of no auto switch on 32. 0.03 MPa 0.025 MPa Without auto switch: 10 to 70C (No freezing) With

E-P HYREG ® Series VY1 1

0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

SZ3000

For DIN rail weight, refer to page 1-3-12.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

M5 x 0.8 1(P) port M5 x 0.8 3(R) port R 3 P 1 10.7 9 M5 X 0.8 external pilot port 32 (Only external pilot type (R)) For the One-touch fittings for P/R port and silencer model no., refer to page 4-14-3.

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

1

13 15.5 8 14 0 0.1 2 21 5 M4 x 0.7 depth 7 M4 x 0.7 depth 5.5 Width across flats 6 length 3.5 M8 x 1.25 24 20 8 6.5 M4 x 0.7 25 17.5 15 17 16.5 10 14 0 0.1 2 24 6 M5 x 0.8 depth 7.5 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5

SMC Pneumatic Clean Series

FC 4.5 5.5 5.5 FT 1.6 2.3 2.3 FX 24 33 33 FZ 32 42 42 S 9.5 9.5 7 T 3 20.5 20.5 24.5 5 5 12 28 28 28 17 17 20 16 10 6 15 15 15 18.3 15 15 18.3 12 20 14 5 4 8 8 8 55 54 57.5 83 82 85.5 5 5 M10 x 1.0 M4 x 0.7 M5 x 0.8 M12 x 1.0 With air cushion With air cushion type is not available for 21/ 22CJ2.

VFS

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

Compact 5-Port Solenoid Valve

25 pins) P/PC: Flat ribbon cable (26 pins) Straight Symbol Stations Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 12 12 stations 02 2 stations Specified layout*2 (Up to 24 solenoids available) 12 12 stations 02 2 stations Specified layout*2 (Up to 24 solenoids available) 24 24 stations 24 24 stations *1 Indicate the sizes on the manifold specification

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

75.4 70 10.6 29 18.5 14 5 12 50 32 84 37 6.5 33.5 65h9 67h9 32H9 9 22H9 10 4.5 3 6.5 17 8.6 14 8.5 85.4 80 14 38 22 19 6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 10 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M8 x 1.25 12 M5 x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9

51

2 Up to 200 14.5 17.5 17.5 23.5 29 29 38 45.5 54 63.5 79 96 13 17 17 19 27 27 14 16.5 20 26 32 38 8 10 12 14 16 18 8 10 12 14 18 18 12 14 18 25 30 32 12 12.5 11 10.5 15 15 6 7 7.5 7.5 12 12 5 6 6 8 11 11 26 31 38 47 58 72 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 Width across flats 6 length 3.5 14 16 20 22 25 30 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 JMB

MHK2

(Thread for mounting attachment) M5 x 0.8 (Finger closing port) 4-M5 x 0.8 MHC Adjustment needle for finger speed Auto switch mounting groove (2 positions) MHT S O 3 20 MHY 4 16 12 0 0.05 6 12 8 MHW Note) For single acting, one port is used as a breather port. 23 M5 x 0.8 (Finger opening port) MRHQ 2.3 Misc.

MHK2

Groove Dimensions 121 M5 x 0.8 (Finger closing port) 4-M5 x 0.8 (Thread for mounting attachment) Auto switch mounting groove (2 positions) Adjustment needle for finger speed 3 20 4 16 12 0 0.05 6 12 8 Note) For single acting, one port is used as a breather port.