VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

3 port valve Single Double Closed center Exhaust center Pressure center Dual 3 port valve 77.1 83.7 2 position C4 4 One-touch fitting SZ360--C4 3 position 87.6 4 position 84 73.5 80.2 2 position C6 6 One-touch fitting SZ360--C6 84.1 3 position 4 position 81 68.3 75 2 position SZ360--M5 M5 x 0.8 3 position 78.8 4 position 75 30 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60GD

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5

VXA21/22

20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 1 4 3 8 4.1-71 Direct Air Operated 3 Port Valve/Manifold Series VVXA31/32 For Air, Gas, Vacuum and Oil Compatible with a wide variety of fluids.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Series ZPT ZPX Related 25 50 75 100 Equipment Pad Material and Characteristics Characteristics Operating temperature range (C) Oil resistance gasoline Oil resistance benzol Base resistance Acid resistance Weatherability Ozone resistance Abrasion resistance Waterproof Solvent resistance (Benzene, toluene) Durometer HS (5C) Material 50C 50C 50C 60C 60C NBR 0 to 120 30 to 200 0 to 60 0 to 250 20

3 Port Solenoid Valve Metal Seal Series VZ200 1

fittings Applicable tubing O.D. 4 1 Common Common Top, Side Type 20, 30 and 50 20 20 stations C4 Manifold specifications/Single base type B mount (P/E port size) Built-in One-touch fittings Applicable tubing O.D. 6 C6 Applicable valve model Piping P, E port Port size Symbol VV3Z2-S50: Only C4 and C6 Body ported (Individual pilot exhaust) Body ported (Common pilot exhaust) Instruct by specifying

HRX-OM-W002

. 9-11 9.4.1 HRR012-A/W-10/20. 9-11 HRR Series HRX-OM-W002 Contents 9.4.2 HRR018-A/W-10/20. 9-11 9.4.3 HRR024-A/W-20. 9-12 9.4.4 HRR030-A/W-20. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT .

CNG

GR GQ H1 I 18 13 38 93 1/8 56.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 20 to 200 15.5 to 200 22 17 45 103 1/8 66 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 20 to 300 19.5 to 300 22 17 45 104 1/8 67.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 19.5 to 300 30 19 52 112 1/8 75 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 20 to 300 301 to 500 301 to 500 27 to 300 (mm) Bore size (mm) 20 25 32 40 P

Cylinder with Lock Series CNG

0.5MPaP 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) Note: 1kg = 2.2046lb 1MPa = 1450psi 1in = 25.4mm 20

Stopper Cylinder

Q D B 20 15 D L M9BW 20 to 50 y !

PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

1.63

25 20 20 20 1 1 10 100 50 51 200 10 100 50 51 200 Stroke (mm) Stroke (mm) (19) L = 50 mm, V = 400 mm/s (20) L = 100 mm, V = 400 mm/s 100 100 63 63 50 50, 63 50, 63 50 10 10 40 40 Load mass m (kg) Load mass m (kg) 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.1 0.1 10 100 50 51 200 10 100 50 51 200 Stroke (mm) Stroke (mm) 508 Model Selection MGPW Series L L m m Horizontal Mounting Ball

Sine Cylinder Series REC

I-020B I-032B I-040B 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 18 41 M8 x 1.25 14 10 11 66 46 16 20 36 M8 x 1.25 10 14 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 22 45 14 10 14 69 48 18 20 38 10 14 M10 x 1.25 M10 x 1.25 0.070 0 0.1 0.3 0.070 0 0.1 0.3 12 16 12 16 24 50 20 14 13 92 69 22 24 55 20 M14 x 1.5 M14 x 1.5 15.5 Double Knuckle Joint Mounting Y (Max.) hole H10 Shaft (mm) H L MM ND NX2

Sine Cylinder Series REC

I-020B I-032B I-040B 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 18 41 M8 x 1.25 14 10 11 66 46 16 20 36 M8 x 1.25 10 14 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 22 45 14 10 14 69 48 18 20 38 10 14 M10 x 1.25 M10 x 1.25 0.070 0 0.1 0.3 0.070 0 0.1 0.3 12 16 12 16 24 50 20 14 13 92 69 22 24 55 20 M14 x 1.5 M14 x 1.5 15.5 Double Knuckle Joint Mounting Y (Max.) hole H10 Shaft (mm) H L MM ND NX2

Thermo-chiller

Description (The gure shows the HRS-150-A-20.) q Hose (I.D.: 0.6 in [15 mm], Length: 27.5 in [700 mm]) Relief valve set pressure: 46 psi [0.32 MPa] (The relief valve starts to open when the circulating fluid discharge pressure reaches 46 psi [0.32 MPa] .)

HRX-OM-Y098

-A-20 .

Industrial Filters

Models (mm) Internal volume (L) Number of arranged elements Weight (kg) Element length (L) Model N (Port size) G W A B C D E F H J K P 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 250 20 70 15 330 216.3 230 490 660 965 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 500 20 80 24 330 216.3 230 490 905 1220 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4

IDG

10 0 10 20 30 40 50 60 50 60 40 30 20 10 0 10 20 30 Atmospheric pressure dew point ( C) 14-19-10 7 Membrane Air Dryer Series IDG Calculation of inlet air flow rate Q1, and confirmation of compressed air supply capacity.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L3 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [

MGQ

(Refer to page 8-20-3.)