Digital Flow Switches

PF2D5--1 (With voltage output type) PF2D540-19 Display unit (PF2D30/31) 186 Sensor unit 78 86 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 56 8 4 Load + 12 to 24 VDC 15 White 7 3 Black 5 1 Blue Load is an analog input equipment such as a voltmeter.

Information

R A-phase pulse detector (Differential line driver) 9 PG0 LZ 8 5 LAR PG0 COM 10 LZR 9 6 LB B-phase pulse detector (Differential line driver) LG 3 7 LBR Control common SD Plate 34 LG Control common 10 m or less Note 5) 33 OP Z-phase pulse detector (Open collector) 1 P15R Plate SD 10 m or less 2 m or less Note 4) CN1 EMG Emergency stop 42 SON 15 Servo ON Note 4) CN6 RES 19 Reset 3 MO1 PC 17

High Vacuum L Type Valve

(Refer to Chapter 7, Parts Replacement Procedure (P. 15 to 19) for details.) 6 XL-OMV0003 3. Product Specific Precautions 3 Precautions 3 Be sure to read before handling Maintenance Parts Caution SMC specified parts should be used for maintenance service. Refer to Chapter 5, Construction and Dimensions" (P. 11) for the part indication numbers.

Silencer Metal Case Type Series 25

2508-010 129.6 1 57 54 22 19 2510-002 17.2 1 4 55 56 22 19 2511-003 17.2 3 8 0.05 0.02 0.01 0.005 0.002 Construction/Parts/Dimensions 50 100 200 500 1000 2000 5000 10 20 Port size Air flow (l/min (ANR)) Case (ZDC) Noise Level (Initial conditions) Hexagonal flats D (2507-006: Width across flats) 2504 to 2511 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement distance: 1 m

Micro-Mist Separator with Prefilter Series AMH

10 241 90 25 10 241 90 21 10 277 100 30 10 334 150 40 13 13 16 16 19 19 22 22 32 100 63 113 76 119 76 145 90 151 90 166 106 173 106 200 122 253 160 8 12 6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37 37 10 14 9 55 88 110 50 9 3.2 37

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.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w 0 5 10 ~ ~ , j .J; 2 0 ' o w 5 10 Needle revolutIOns (Revolutions) Needle revolutions (RevolutIOnS) 2 Series ASP Dimensions I tube outside dla, od Millimeter size l2 d Hl H2 11 R(PT}1/8 M5)(, 0.8 12 8 I h 12 19 12 24 17 ~ Rei erence dimenSions for A(PT) th readS aNal In stallation.

COQ2BP

J K l .. oN D P Q W X Z ..J (mm) 50 89 55.5 26 20 64 10.5 M1Bxl .5 B6 7 17 33.5 50 6.6 11 Depth 8 1/4 10.5 71 28.5 19 4" 80 112 68.5 32.5 25 98 12.5 M22xl .S 132 6 22 43.5 77 11 17.5 Depth 13.5 3/8 16 104 35.5 26 65.5 83 94.5 81 26 20 n 10.5 Ml8xl .5 103 7 17 33.5 60 90 14 Depth 10.5 1/4 15 84 28.5 19 55.5 High Magnetic Field Resistallce Sellies COQ2BP Foot Mount: COQ2LPO-OOM-OO H Thread

PFxx-OMU0002

Peak/ Bottom value reset: A function to clear the peak value or bottom value when an external input signal is applied. 41 No.PF-OMU0002-D Display [F_5] by pressing or button in function selection mode. Press the S button. Move on to select FUNC.

LUBRICATOR

Tightening torque AL30 0.4 0.1 Nm AL40 0.7 0.2 Nm Cross pointed driver 19 Applicable model Process Tool Check item Procedure Assembly 10. Mount the bowl assembly. Insert the bowl assembly into the body by using individual setting mark and rotate clock or anticlockwise by 30(until the lock button is released).

REGULATOR

M62X1.5 AR50K-B 1/8 90 125 43 43.3 43.3 3.2 28 44.3 42.5 80.8 42.5 80.8 1 M62X1.5 AR60K-B 1/8 95 130 46 43.3 43.3 3.2 28 44.3 42.5 80.8 42.5 80.8 Optional specifications Model Bracket mount dimensions Panel mount dimensions M N Q R S T U V W Y Z AR20K-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR25K-B 30 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 AR30K-B 41 40 45.8 6.5 8 53 2.3 31.1 38.5 19

Lubrication Equipment

1.17-6 AL1000 to 6000 Dimensions Metal bowl Option specifications/1000cm 3 tank Metal bowl with level gauge Model Metal bowl Metal bowl with level gauge B B AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 81.5 122 142 177 177 254 268 162 197 197 274 288 Model Port size A B C D LL M P E F G H J K Bracket mounting dimensions N 324(374) 334(384) 334(384) 336(386) 336(386) 38 41 39 45 45

180° Angular Style Air Gripper Series MHY2/MHW2

direction through-hole type 4 x 3.4 through (Hole for mounting attachment) 8 -0.005 -0.025 4 7 14 (Limted area for mounting attachment) Do not extend the attachment from limited area for mounting to avoid interference with the attachment or main body. 666 Series MHY2 180 Angular Style Air Gripper Cam Style MHY2-20D 2 x M5 x 0.8 thread depth 8 Pin hole positioning (Mounting thread) 14 5 19

Process Pump

Fluoropolymer Tubing Series TL/TIL Specifications TL0403 TL0604 TL0806 TL (Metric) TL1916 TL1210 TL1008 4 x 3 6 x 4 8 x 6 19 x 16 12 x 10 10 x 8 Model Tubing model O.D. x I.D. (Metric) TIL01 TILB01 TIL05 TIL (Inch) TIL13 TIL11 TIL07 1/8" Model Tubing model Nominal size (Inch) O.D. x I.D.

ZB-OM00301

No.ZB-OM00301 / ZB No.ZB-OM00301 2 9 12 13 15 16 16 V Assy 17 21 25 26 28 28 29 30 30 31 31 32 35 37 38 39 40 Assy 40 Assy 41 42 1 - No.ZB-OM00301 1) (ISO/IEC) (JIS) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

IDX-OM-W019

Conditi on Inlet Air Temperature 100 F (37.8C) Ambient Temperature 100 F (37.8C) Voltage 115V 60Hz Working Fluid Compressed Air Operating Range Inlet Air Temperature 41-122 F (5-50C) MIN.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 l28 l27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 l28 l27.8 42.5 35 45 74 50

Multistage Ejector (N)ZL Series

Fluid Air Operating pressure range Internal pilot type 0.2 to 0.5MPa (29 to 72 psi) 5 to 50C (41 to 122F) Ambient and fluid temperature Response time (for 0.5MPa) Note 1) 25ms or less Maximum operating frequency 5Hz Manual operation Non-locking push type, Slotted locking type With vacuum pressure gauge Pilot valve individual exhaust type, Main valve/Pilot valve common exhaust Pilot exhaust

LZ-OM004xx

A B C D 41 Directly mounts onto the rod cover Tightening torque of accessories (foot) Fix with 4 holes "D" as shown below. Fix with 4 holes "H" as shown below. 42 Foot m ounting 4. Mounting end for tightening so as not to apply a rotating force to the end. Wiring Avoid repeatedly bending or stretching the cable. Confirm proper wiring Do not wire while power applied.

Electromagnetic Digital Flow Switch

If stress, vibration and impact imposed on the product cannot be reduced, secure each pipe at multiple positions. 19 LFE Series Specific Product Precautions 3 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The