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Troubleshooting 41 -2No.EX-OMY0014-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of "Caution", "Warning" or "Danger".

How to order HF2BFB 30 02 (1) (2) (3) (4) (5) (2) Symbol Details Body size 30 40 BFA Antibacterial Filter (5m) BFB Antibacterial Filter (0.1m) (1) Filter type BFC Odor Removal Filter BFD Bacteria Removal Filter Nil Rc N NPT (3) Thread type F G 02 1/4 (4) Port size 03 3/8 04 1/2 Nil Flow direction: left to right (5) Semi-standard R Flow direction: right to left 10 5.

Switch with left hand mounting A t r t fit gI Switch with right hand mounting t[ n-r ffi I+l+| + t 2 switches With right hand moun0ng D6A&1 D-8G&2 Rotation Speed Range Model 20--{.03-0.3sec/90' Model 30-O.04-0.3sec/90" lf a rotation speed is used slower than 0. 3sec/90" sticking may occur. _n_ | d l l"l l l n , t d .

06 6kgticnf 11 30psi 12 45 psa 13 150 psi 22 23 24 26 41 I t al (Silicon) Low Temperatufe L Porl Connection NIL PT Thr6ad PF Parallel Pip Thread t l{PT Amarican National Standard Pioe Thread Acceesoris t l{ll Standard Lever Control Lengrth (0.25 to 3.35 inches) (6lo 85mm) D High Pressure Signal Spring K 1/2 Split Range Spring E Longsr Lever Control Length (2.35 to 4.33 inchss) (60 lo 11omm

With multiple pressures IRV 000 1 01 Work piece Vacuum regulator Body size 1 2 3 IRV1000 type IRV2000 type IRV3000 type Leak tester Pressure transducer Solenoid valve Solenoid valve Work piece Vacuum pump IRV Filter Thread type Nil N F Rc NPT G Optional Inspection equipment Port size Solenoid valve Application IRV Work piece Tank Vacuum pump Filter Symbol Bore IRV1000 IRV2000 IRV3000 01 02 03

position N 3 4 2 1 VH422-N02 to N06 VH432-N02 to N06 2 (Position) Flow direction 2 Flow direction 4 Flow direction 2 Flow direction 4 90 45 45 3/4" 185(10.2) 1 2 21.34 (9.7) VH6 VH600-N06,N10 3 (Closed center) 3/4", 1" 1" 194(10.5) 3 4 2 How To Order Series VH How to Order VH 2 0 1 02 N Options Hand valve R In/Out Reverse Valve model (Cv) Port size (NPT) 2 3 4 6 (0.4) (1.1) (3.2) (10.5) 02 03

OJ 1A22x1.5 2. 1I 1 8 --g07D 28-03 ~ , Y-G08 80 71 23 038 SO r.122x15 21 27 lS'g.070 28 ~ 3 ~, 56 84 IV -GOS ~iTt .1 , m_ , m , L , CQ2 Double Rod Clevis Pin (mm) C02 Jam Nut J r ,..,. No. AppI_ bon~.. Dd9 L d I m 1 Soap ring ly-(l05 50,63 14

range (-X215): 0.05 to 0.69 MPa Rc1/8, Rc1/4 NPT1/8, NPT1/4 Port size: Rc1/8 Port size: Rc1/4, 3/8, 1/2 Series WF300 14-E628 Series WF300 Dimensions 25 25 A A 14 41 54 29 66.5 Construction A-A Component Parts q e w r No.

Width across flats of attachment 3/8 20.9 mm 1/2 23.9 mm 3/4 29.9 mm 1 41 mm 11/4 54 mm 11/2 54 mm After hand tightening the piping, apply a spanner of the correct size to the spanner flats on the product, and tighten it for 2 to 3 rotations. The tightening torque is shown in the table below.

Enabling/Disabling of AL27: CH2 electric conductivity increase alarm function (1) (2) (3) (4) Electric conductivity and alarm (AL27) setting HRL Series 5.4 Description of Screen 5-41 HRX-OM-W060 Chapter 5 Display and Setting of Various Functions Table 5.4-14 Settings of electric conductivity (AL27) No.

25 TEMP READY alarm (AL12) of TEMP READY function .5-27 Offset (TEMP OFFSET) function .5-30 Pump operation mode .5-32 Discharge pressure alarm (AL18/AL19/AL20) .5-34 Electric conductivity and alarm setting (AL28) .5-36 5.4.8 CH2 setting screen .5-37 Temperature rise/drop alarm (AL14/AL15) setting .5-38 TEMP READY alarm (AL16) and TEMP READY function .5-39 Offset (TEMP OFFSET) function .5-41

of TEMP READY function .5-26 Offset (TEMP OFFSET) function .5-29 Pump operation mode .5-32 Discharge pressure alarm (AL18/AL19/AL20) .5-33 Electric conductivity and alarm setting (AL28) .5-35 5.4.8 CH2 setting screen .5-36 Temperature rise/drop alarm (AL14/AL15) setting .5-37 TEMP READY alarm (AL16) and TEMP READY function .5-38 Offset (TEMP OFFSET) function .5-40 Pump operation mode .5-41

55 41 84 20 15 XYD-50 178 128 79 2 53 75 52 95 20 17.5 XYD-63 209 163 100 3 61 87 95 70 121 20 19.5 XYD-80 268 193 117 3 80 114 110 83 144 20 26.5 10 XL-OMP0003-A 7.

Description Material Note 40 Auto switch 41 Magnet 42 Switch spacer Resin 22 - Basic circuit for using rotary actuator Circuit configuration The basic circuit for operating the rotary actuator using an air filter, regulator, solenoid valve, and speed controller is shown in Fig. (4).

42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

Fluid Air Operating pressure range Internal pilot type 0.2 to 0.5MPa (29 to 72 psi) 5 to 50C (41 to 122F) Ambient and fluid temperature Response time (for 0.5MPa) Note 1) 25ms or less Maximum operating frequency 5Hz Manual operation Non-locking push type, Slotted locking type With vacuum pressure gauge Pilot valve individual exhaust type, Main valve/Pilot valve common exhaust Pilot exhaust

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 1.5

-M5-06SA VM132-M5-06SA VM-06BS 45 g Cross roller plunger Polyacetal roller VM120-01-07A VM130-01-07A VM120U-01-07A VM130U-01-07A VM122-M5-07A VM132-M5-07A VM-07B 43 g Hard steel roller VM120-01-07SA VM130-01-07SA VM120U-01-07SA VM130U-01-07SA VM122-M5-07SA VM132-M5-07SA VM-07BS 45 g Toggle lever VM120-01-08A VM130-01-08A VM120U-01-08A VM130U-01-08A VM122-M5-08A VM132-M5-08A VM-08B 41 g Red

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB