SMC Corporation of America
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See pages 19 through 21 for safety instructions and actuator precautions.

Mount the valve so that the arrow comes to IN port position. 19 VCC Series Replacement Parts VVCC1: Manifold Tighten on a flat surface (e.g. holding plate) so that the end plates on both ends are not twisted. Valves must be inserted in the right direction. Refer to page 657.

MPC Default Parameters . 19 9. Ethernet/IP Network Parameters . 19 10. Network Specifications . 19 10.1. DLR (Device Level Ring) . 19 10.2. Hold on Connection Loss . 19 10.3. Hold Till Connection . 19 10.4. Quick Connect . 19 10.5. Daisy Chaining Power and Ethernet . 20 11. Connecting MPCs for Daisy Chaining . 20 11.1. LED Indication . 21 12. Studio 5000 Setup . 23 13.

(LEC)7.1 OUT Data n+21(LEC) (IN Data.n+19[bit 0]=1) INP(IN Data n+1[bit 3])1 INP(LEC*6)6.3IO OUT Data n+20( IN Data n+19[bit 0])0 () INP 30 - 11.4 (LEC) IONo(LEC*6)IO IO(LEC) OUT Data n+30 OUT Data n+4n+18 (LEC)7.1 OUT Data n+2(063) OUT Data n+3(LEC*6) (IN Data.n+19[bit 0])1 Out Data n+30(IN Data.n+19[bit 0])0 31 - 12. 12.1 [IN] IN Data / Bit No.

/See 4.3Step data setting on p.19 9) The step data position is not Check the step data. changed correctly after the return to origin direction is /See 4.3 Step data setting on p.19 changed. /See 4.4 Parameter setting on p.30 10) Because the operation of the Check the step data.

3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 50 6.5 31 12 Model Optional Specifications With bracket Built-in silencer N Q R S T U V W X Y AA BB VHS20 5.4 8.4 27 40 75.4 31.3 25.3 53.3 30 2.3 3 12 VHS30 6.5 10 36.5 53 90.9 40 33 67 41 2.3 3 14 VHS40 8.5 19 43.5 70 119.4 53 44 79 50 2.8 3 19 VHS40-06 8.5 19 43.5 70 123.4 55 46 79 50 2.8 4 22 VHS50 11 27.5 49.5 90 152.3 71 60 108 70 3.2 4 22 1

22 22 26 46.6 52 58 58 76 33.6 38 44 44 61 28 30 36 44 53 37.5 49 63 63 81 24 30 38 43 50 4.5 4.5 5.5 5.5 6.5 14.8 19 24 26 31 9 9 10 10 12 VHS20 VHS30 VHS40 VHS40-06 VHS50 1/4, 3/8, 1/2 3/4 3/4, 1 Options specifications Model Built-in silencer With bracket N Q R S T U V W X Y AA BB 5.4 6.5 8.5 8.5 11 8.4 10 19 19 27.5 27 36.5 43.5 43.5 49.5 40 53 70 70 90 75.4 90.9 119.4 123.4 152.3 31.3

(At this stage, O-rings 23 and 24 are attached to the groove.) (8) Mount the O-ring 25 to the solenoid valve 17 and fix with hexagon socket head cap screws to the sub-plate 19 . 23 18 24 17 25 19 20 24 23 (9) After assembly is completed, perform an operation test and check that there is no air leakage. -36- Troubleshooting Refer Problem Possible cause Solution ence page 16 Supply pressure

Product Specifications . 17 3.1 Basic specifications . 17 3.2 Parts description. 18 3.3 Outside dimension diagram. 19 (1) Screw mount type (LECPA-) . 19 (2) DIN rail mount type (LECPAD-) . 19 3.4 How to install . 20 (1) How to install . 20 (2) Ground wire connection . 20 (3) Installation location . 21 4.

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

MGZ MGT (mm) Bore size (mm) B C DA FA FB FC G GA GB GC H HA HB J K L MM ML NN NL OA Standard stroke (mm) 63 80 100 10 12 15 78 91.5 15 15 20 103 12 18 25 M10 M12 M14 16 22 25 162 202 240 20 25 30 16.5 14.5 18 49 56.5 66 13.5 15.5 19 39 45.5 55.5 77 96.5 116 16.5 19 23 M6 x 1.0 M8 x 1.25 M10 x 1.5 22 26 32 58 54 62 39 46 56 8.6 10.6 12.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 25, 50, 75, 100, 125,

Cable connector (4 wire) Right angle type Cable connector (4 wire) Straight type n50 4-7 Mounting hole 31 SMC PREGULATOR E SMC PREGULATOR E RESET 40 52 ITV2090 ITV2090 SET UNLOCK LOCK 84 100 12.5 M12 X 1 Cable connecting threads 1.6 12 (99) (11) SMC PREGULATOR E ITV2090 Rc(PT)1/4 VAC port OUT 2 G ATM (Atmospheric pressure) OUT (Set pressure) VAC (vacuum pressure) 19 n36 Flat bracket P3020114

Series VM400 P.3.5-25 Series VZM500P.3.5-40 Series VZM400P.3.5-34 Series VFM300P.3.5-47 Series VFM200P.3.5-53 Series VM800 P.3.5-31 Related Products Page Relay Valve P.3.5-59 Shuttle Valve P.3.5-62 Time Delay Valve P.3.5-61 Pneumatic-Electric Relay P.3.5-63 Pneumatic Indicator P.3.5-64 3.5-3 Series VM Precautions Be sure to read before handling.

0 1 0 0 1 1 19 0 1 0 0 1 1 20 0 1 0 1 0 0 20 0 1 0 1 0 0 21 0 1 0 1 0 1 21 0 1 0 1 0 1 22 0 1 0 1 1 0 22 0 1 0 1 1 0 23 0 1 0 1 1 1 23 0 1 0 1 1 1 24 0 1 1 0 0 0 24 0 1 1 0 0 0 25 0 1 1 0 0 1 25 0 1 1 0 0 1 26 0 1 1 0 1 0 26 0 1 1 0 1 0 27 0 1 1 0 1 1 27 0 1 1 0 1 1 28 0 1 1 1 0 0 28 0 1 1 1 0 0 29 0 1 1 1 0 1 29 0 1 1 1 0 1 30 0 1 1 1 1 0 30 0 1 1 1 1 0 31 0 1 1 1 1 1 31 0 1 1 1 1 1 32

ZQ-OM01501 Contents Safety Instructions 2 How to order 9 Summary of Product parts 10 Definition and terminology 11 Electrical Connection 14 Wiring 14 Internal circuit and wiring example 15 Easy Setting 16 Measurement mode 16 Function Setting 19 Function selection mode 19 Default setting 19 F0 Unit selection function 21 F1 OUT1 22 F2 OUT2 24 F3 Response time 26 F4 Auto-preset 27 F6 Fine adjustment

ZQ-OM01601 // ZQ-ZSV 2 9 10 11 14 14 15 16 16 19 19 19 F0 21 F1 OUT1 22 F2 OUT2 24 F3 26 F4 27 F6 29 F11 30 F80 31 F81 32 F90 33 F96 35 F98 36 F99 38 39 42 43 44 50 51 51 1 - *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

Stroke Against Lateral Load D RS H A 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 RZQ Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 MI W S 52 66 75 81 0.7 50 CEP1 33 43 49 53 0.3 23 31 36 39 T 0.5 10 CE1 5 18 25 29 31 0.7 REC40 REC32 REC25 REC20 CE2 Rod side flange style: F Head side flange style: G 182 167 148 118 0.3 Foot style : L 1 L ML2B 140 128 114

WIN PLS ACCUMU HYS 2. 1_P/1_N(29 ) Add/dEC (31 ) 3. P1L/n1L P1H/n1H H1 (30 ) P1AH/n1AH P1AL/n1AL P1dH/n1dH P1dL/n1dL P_1/n_1 H_1 (30 ) (31 ) 4. SoG/SoR/REd/GRN(33 ) 5. [F 1] OUT1 -28No.PF-OMM0004-D 1. [F 1] [oUt1] 2. ON-OFF -29No.PF-OMM0004-D 3. a. ([n_1]) (33 ) b.

19 19 22 24 24 27 Spare parts Rod end nut The basic type has one rod end nut attached, it is possible to order additional pieces by the above order numbers.