Vacuum Unit Series ZK2

With exhaust interference prevention valve Note 23, 25) W Exhaust interference prevention valve Note) Refer to page 31 when mounting single unit to DIN rail. 2

VFS4000-OMY0001

0.450.6 Nm M3 0.81.2 M4 1.42.5 13 No.VFS4000-OMY0001 11 1 2 3 14 No.VFS4000-OMY0001 EXH.

EXxx-OMP0004CN

SI () SI SI SI () ()SI SI SI IP67 M12/M8 SI ( ) SI SI ()SI CE -6No.EX-OMP0004CN-I SI SI PLC PLC SI IP -7No.EX-OMP0004CN-I EX260-SMJ 1 1 M12 32 /PNP() 2 M12 32 /NPN() 3 M12 16 /PNP() 4 M12 16 /NPN() MJ CC-Link -8No.EX-OMP0004CN-I 1 (BUS OUT) CC-Link () 1 (M12 5 A code) 2 (BUS IN) CC-Link (IN ) 1 (M12 4 A code) 3 SI 1 (M12 5 B code) 4 (M3

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

200 0.1MPa 0.1MPa 0 0 20 20 40 40 60 60 Gripping point L mm Gripping point L mm 4 Series MHS2 2 Finger Air Gripper Dimensions (mm) 1in = 25.4mm MHS2-16D to 25D 2-3.4, counter bore dia. 6.5 Counter bore depth SC (mounting hole) WA, depth 1.5 AA RA 3 AB RA VA, depth VB B NA RB NB RB XA, depth XB O Q 2-M4 x 0.7, thread depth 8 (mounting threads) 20 20 (Open DO) (Closed DC) FX FY FZ CB 7 4-M3

Stopper Cylinder Adjustable Mounting Height Type Series RSG

Correct mounting Incorrect mounting Auto switch Auto switch mounting screw M3 x 0.5 x 14l Auto switch mounting band (with brackets) 1. Wrap the mounting band around the cylinder tube, and place it in the approximate auto switch mounting position. 2.

High Vacuum L Type Valve

Step 7 Reassembly of bonnet assembly (No.2) 3 Bolt 1 2 4 Bonnet assembly Port 1(P) Bolt size, Tool, Tightening torque of bolt (Nm) valve Bolt size Hex Tightening torque size wrench XLFV-16 M3 3 0.7 -25 M5 4 1.5 -40 M6 5 2.5 -50 M8 6 6.1 Body -63 M10 8 15 -80 Turn ON the solenoid valve to supply air pressure of 0.4MPa (G) to the port 1(P).

Wireless System

Round head screw (M3 x 8) 4 pcs. r Seal Cap (10 pcs.) Enclosed parts Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs. Be sure to mount a seal cap on any unused I/O connectors. Otherwise, the specified enclosure cannot be maintained.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

RSH/RS1H

How to change the positional relationship between the transfer and piping directions The positional relationship between the transfer and piping directions can be changed in 90 increments (or 180 increments in case of 20). 20 Loosen the fixing screw (M3) beside the rod cover and pull up the guide rod.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF 1.3 1.3 ASV220F-U10/32 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations D side U side 1 2 3 4 5 n Body material Brass Symbol D H Seal material FKM FKM 02 : 10 2 stations : 10 stations All IN ports are 3/8. Stainless steel Refer to the L dimensions on page 6 regarding the maximum number of stations.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

OUT port size Material D side U side 1 2 3 4 5 n Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Body material C37 Symbol Nil H Seal material FKM FKM 02 : 10 2 stations : 10 stations Stainless steel All IN ports are 3/8. Refer to the "L" dimensions on page 6 regarding the maximum number of stations.

S070

-www.stevenengineering.com VT 20.5 19 3 2 VP 1 9.5 6.5 5.5 4.5 VG 12.3 10 10 25 VP M3 x 0.5 3 (EXH) port M3 x 0.5 1 (SUP) port M3 x 0.5 2 (OUT) port S070 VQ VKF S070B-C-M3 Plug lead type VQZ VZ VS 0.1 W with power saving circuit 150 (Lead wire AWG#26) 3.5 27 6 VFN 26 23.5 20.5 3 9.5 28.5 3.5 4-11-5 6 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-

VDW

C37 Series 200 Symbol Port size PB 300 SUS M5 01 02 M5 1/8 (6A) 1/4 (8A) Thread type Nil F N Rc G NPT Piping to 3 Port Valve N.O. Port Caution Socket Electricity 1. Surge voltage A high voltage which is momentarily generated in the shut-off unit by shutting off the power. Cover Others 1. Material NBR: Nitrile rubber FKM: Fluoro rubber = FPM Trade names: Viton, Dai-El, etc.

EXxx-OMO0027

5 6050:01 Channel 0 6050:02 Channel 1 6060:0 (No input data allocation) Slot 6 60A0:0 Diag.

Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Series VS 8-2/VS 8-4 S R S R

slave modes, 2 power supply systems 1 to 12 stations (24) 1 to 12 stations (24) AS-Interface, 4 in/4 out, 31 slave modes, 2 power supply systems EtherNet/IP AS-Interface, 8 in/8 out, 31 slave modes, 1 power supply systems SDTD Note 1) AS-Interface, 4 in/4 out, 31 slave modes, 1 power supply systems S F P kit (Serial transmission: EX126 integrated type (Output)) kit (D-sub connector) kit

25

X14 1 1 1 1 2 2 3 3 4 5 7 7 IZD IZE IZH Drop prevention cover When attached to the body Transition wiring cable Remote controller/IZS41-RC IZS41 CF Transition wiring cable 02 05 08 Full length 2 m Full length 5 m Full length 8 m AC adapter For IZS40 IZF10 C AC adapter G1 G2 AC adapter + AC cord AC adapter (without AC cord) AC cord is only for use in Japan.

0.01

(C04) C08 (C06) 02 (C06) 02 (C08) Port size w C10 (C08) 02 (C08) C12 (C10) 02 (C10) 02 (C12) Model Port size q C04 (C06) C04 (02) C06 (C08) C06 (02) C08 (02) Model Port size q C08 (C10) C08 (02) C10 (C12) C10 (02) C12 (02) SFD100SFD200326 Related Products Mist Separator AM Series Refer to pages 223 to 230 for details.

Series SYJA300 3 Port Air Operated Valve

3 Port Air Operated Valve Series SYJA300 Model Compact/Lightweight Copper free Effective area (mm2) (Cv) Valve model Actuation Port size Weight (g) Pilot port size SYJA312-M3 N.C. M3 X 0.5 Body ported 0.9 (0.05) 18 There are no copper parts that come in contact with the media; suitable for copper free applications SYJA322-M3 N.O.