Stations: 4 Stations, Manifold Type: FD0 (D-sub Connector 25 Pin w/o Cable), Manifold Mount Style: D (DIN Rail Mounting), Option: None, One-touch Fitting: 00T (N11 3/8" One-touch Fitting)

Stations: 5 Stations, Manifold Type: FD2 (D-sub Connector 25 Pin 3.0m), Manifold Mount Style: D (DIN Rail Mounting), Option: None, One-touch Fitting: 00T (N11 3/8" One-touch Fitting)

Stations: 5 Stations, Manifold Mount Style: D (DIN Rail Mounting), Option: None, One-touch Fitting: 00T (N11 3/8" One-touch Fitting)

Stations: 5 Stations, Manifold Type: D-sub Connector 25 Pin w/o Cable, Manifold Mount Style: DIN Rail Mounting, Option: None, One-touch Fitting: N11 3/8" One-touch Fitting, CE Compliant: -

Stations: 4 Stations, Manifold Type: D-sub Connector 25 Pin 5.0m, Manifold Mount Style: DIN Rail Mounting, Option: None, One-touch Fitting: N11 3/8" One-touch Fitting, CE Compliant: -

Stations: 4 Stations, Manifold Type: D-sub Connector 25 Pin w/o Cable, Manifold Mount Style: DIN Rail Mounting, Option: None, One-touch Fitting: N11 3/8" One-touch Fitting, CE Compliant: -

Stations: 5 Stations, Manifold Type: D-sub Connector 25 Pin 3.0m, Manifold Mount Style: DIN Rail Mounting, Option: None, One-touch Fitting: N11 3/8" One-touch Fitting, CE Compliant: -

Stations: 5 Stations, Manifold Mount Style: DIN Rail Mounting, Option: None, One-touch Fitting: N11 3/8" One-touch Fitting

4-channel Flow Monitor ( compatible)

(Display pattern for 3rd, 4th, 5th, 8th and 9th digit from the left) Characters Q, X, Z, /, or cannot be displayed. (Display patter for 1st., 2nd., 6th., and 7th digit) Characters A to Z can be displayed (the same as the 3 digits on the right).

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Pressure Relief 3 Port Valve With Locking Holes

3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 50 6.5 31 12 Model Optional Specifications With bracket Built-in silencer N Q R S T U V W X Y AA BB VHS20 5.4 8.4 27 40 75.4 31.3 25.3 53.3 30 2.3 3 12 VHS30 6.5 10 36.5 53 90.9 40 33 67 41 2.3 3 14 VHS40 8.5 19 43.5 70 119.4 53 44 79 50 2.8 3 19 VHS40-06 8.5 19 43.5 70 123.4 55 46 79 50 2.8 4 22 VHS50 11 27.5 49.5 90 152.3 71 60 108 70 3.2 4 22 1

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

SY1 4, SY1 4A only 1 2 1 2 4-3-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no. Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

VNH

Valve element becomes free to incline and it reaches valve seat o. q Description Note Plated No. Material Cast iron Undercover Body Plated Cast iron Aluminum alloy w e Cover Plate r Iron t Stainless steel Valve element A Valve element B Piston Return spring y Stainless steel u Aluminum alloy i Piano wire o Stainless steel Valve seat !0 Stainless steel Rod !

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-

Filter Regulator Stainless Steel 316 and Special Temperature Environment (–40°C) Specifications AW30/40-X2622

Example) AW30-03C-2R-X2622A y t r e w q Stainless steel 316 specification Symbol Description K q Body size 30 40 IP K w Thread type Nil Rc N NPT F G + IW 02 1/4 03 3/8 04 1/2 06 3/4 + 1301 K e Port size AW AW IL1 K r Option i a Float type auto drain Nil Without option C Note 1) Float type auto drain (N.C.

Note) CE compliant: Electrical entry is applicable only for the DIN terminal. [Option] 3 Port Solenoid Valve Direct Operated Poppet Type Series VT307 Rubber Seal

How to Order 307 5 F G 1 V T 01 Body type T O Body ported For manifold CE-compliant Valve option Nil Q None CE-compliant Nil E Y V W Standard type Continuous duty type Energy-saving type Vacuum specification type Electrical entry and light/surge voltage suppressor: D/DO/DZ/DOZ only Bracket Nil F None With bracket Energy-saving type, Vacuum specification type Semi-standard Pressure specifications

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Information

Information Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN http://www.smcworld.com 2011 SMC Corporation All Rights Reserved 10-E569 D-DN Printing PQ 12450SZ Circulating Fluid Temperature Controller Thermo-chiller Compact Type Series HRS 4700 W/5100 W (50/60 Hz) cooling capacity added!

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: N (NPT), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 4 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)