Oscillation Angle A: 100°, Torque (Range)(N⋅m): 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100 / 100 or More, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Provided

Oscillation Angle A: 100°, Torque (Range)(N⋅m): 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100 / 100 or More, Type: Rotary Actuator Both Sides Shaft Outputs, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves

Oscillation Angle A: 100°, Torque (Range)(N⋅m): 10 to Less than 20 / 20 to Less than 50 / 50 to Less than 100 / 100 or More, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Operation Method: Single Rack, Rigidity Accuracy: Standard, Environment, Applications: Standard, Allowable Kinetic Energy (Range)(J): 0.1 to Less than 1, Tube Nominal Diameter: 100, Valves: Provided

AL800/900

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B C D E F G H I J A , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3-M5 x 0.8 x depth 6 3-M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 14-13-5

Specifications Port Size (Applicable Tubing O.D.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration

Specifications Port Size (Applicable Tubing O.D.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration

Specifications Port Size (Applicable Tubing O.D.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration

Specifications Port Size (Applicable Tubing O.D.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration

44

Material Fluid Air, Water, Steam Note 2) Note 3) KFG204-P01 KFG206-P01 KFG208-P01 KFG210-P01 KFG212-P01 KFG216-P01 4 Operating pressure range Note 1) 100 kPa to 1 MPa Note 4) 6 Proof pressure 3.0 MPa 8 Bulkhead nut Stainless steel 316 10 65 to 260C (No freezing) Note 4) [Swivel elbow and with sealant types: 5 to 150C] Ambient and fluid temperature 12 16 Lubricant Grease-free specification

Speed Controller: Standard Type Series AS In-line Type 1

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

EX500-DX_e

(M3 thread) (It is recommended to ground with resistance of 100 ohms or less) Power supply (0 VDC) 3 6 4 4 3 20 m or less total extension per branch Branch cable length Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result. This product is not designed to be explosion proof.

PF2D5.eng

Zero or more Output for PF2D3 + Analogue (4 to 20 mA) type: PF2D5 -2 Flow direction Sensor Monitor PF2D3 CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

Soft Start-up Valve AV2000/3000/4000/5000

A start-up valve that gradually increases supply pressure during start up and rapidly exhausts system air when the supply air is shut off Large effective area (mm) Manual supply/exhaust function AV2000/ 20 (Body size: 1/4) AV3000/ 37 (Body size: 3/8) AV4000/ 61 (Body size: 1/2) AV5000/113 (Body size: 3/4) AV5000/122 (Body size: 1 ) Low power consumption Modular with F.R.L. combinations F.R.L

Air Cylinder NCQ7 Series Compact Cylinder

Series NCQT Male Rod End NGOQTOOO-OOM Threaded Mounting Holes (Both Ends) NCOQTOAO'OOO f. 056 (s16") #a-32 07s (31) *10-32 106 (11/re") 5/rc-24 150 (11/r-) 3la-24 200 (2) 1/z-20 250 (21/z\ 1/z-20 300 (3) 5/e-18 ,100 (4') e/+-16 MThreaded r06 (r-rlr6") i50 (r.r/2) M-Threaded 25O (2-1f2'l 3(xr (3') 4OO {4') 150 (11/r) Series NCDQT Constnrction / Autn Suitch Capable Double Acting Spring Return

Electro-Pneumatic Positioner NIP600.NIP610

Mmoo Type Lever type $ Speeifica tions NlP610 NtP600 Cam type Single acting Double acting Single acting Double acting 4 to 20 mADC (standard) Input current 3580Q (1 -smA), 884Q (2 -lonA), 235n (4 to 20mA). 155n (5 25mA), 38Q (1050mA) Input resistance Supply air pressure 20 to 100 PSI (1.4 to Tkgt/cmi) Stroke* Sensitivaty l2o1o or less :L2o1o or less + 1olo or less Linearily 1olo or less 1olo

Large Type Vacuum Unit Series ZR

Refer to CAT.E824A "Pressure Switch" Series ZR How to Order Ejector Systems ZR1 20 S 25 M Z 1 5 K1 D1 Ejector unit nozzle size 1.0mm 10 Digital vacuum switch specifications (D1, D2, D3) 1.3mm 13 Symbol Lead wire length 1.5mm 15 Applicable switch Output specifications 25 (L) Lead wire length 0.6 (3.0) m 1.8mm NPN output 18 D1 D2 26 (L) Lead wire length 0.6 (3.0) m Analog output 2.0mm 20 65

IDX-OM-W053

T 4-2-3 100 2 () 100 4 1 4 0 OFF 501015 OFF OFF IN/OUT ( ) 4 2 4 ) 30 () 30 O 4 3 4 AD48-A 1 ) 2019 3 2019 2 SERIAL No.XP AD48 SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S1933 1 2 4 4 5 5 5-1 3 ON OFF 600mm 1 10% () ( ) 60cm 1 10% 3 5 1 5 () 60cm 1 2 INOUT INOUT () 5 2 6 6 6 1 IDFA6E-2050Hz 0.75 m 3/h (ANR) 1 60Hz 0.82 0.7MPa 35 32 10 oC 550 0.15MPa 1.0MPa

PSE5xx.eng

When piping, apply a spanner to the piping section of the sensor. 5 6 Safety Instructions PSE5 #-28 Current output: 4 to 20 mA Allowable load impedance: 500 or less (at 24 VDC) 100 or less (at 12 VDC) Wiring Warning Attaching the connector to the sensor wire Strip the sensor wire as shown below. Do not cut the insulation.

AP500

Changes from the standard type are: AP501mmA AP501 AP502 AP506 0.1 0.4 psig (0.0028 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Option Other Parameters AP510 HF Cv Supply pressure effect Wetted Parts Material Flow Characteristics AP500 100 psig (0.69 MPa) Inlet pressure: 30 psig (0.21 MPa) Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat S SH 316L

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

type y Stroke [mm] Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 50 50 to to 1200 1200 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) o Actuator cable length [m] !