VS7-6

6, 8, 10 Piping SYJ F.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Enable Generates an error. 1 Unit Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 2 Analogue input range Sets the analogue input device range. Selects the analogue input range. -10..10 V Channel 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary.

MONOSASHI-KUN WITH BRAKE CONTROLLER

Data Name P1 Cylinder Stroke No.1 OFF ON P2 Tolerence No.2 OFF ON P3 Retries No.3 OFF ON P4 Bore Size No.4 OFF ON P5 Load Rate P6 No. of Brake Operation P7 Origin Confirmation Time P8 Err12's Confirmation Time Program 5 6 7 8 1 2 3 4 Step 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 Program 9 10 11 12 13 14 15 16 Step 1 2 3 4 5 6 7 8 9 10 11 12

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

PSxx-OMV0003CN

IO-Link 1.0 IO-Link -81No.PS-OMV0003CN-G ISE70 ISE71 01.000 MPa 01.600 MPa / -0.1051.050 MPa -0.1051.680 MPa / 0.001 MPa 1.5MPa 2.4 MPa DC1224 V10(p-p)10 IO-Link DC1830 V (p-p)10 35 mA 2% F.S.1 digit(253 ) 0.5F.S. 2%F.S.(25 ) PNP NPN OFF 80 mA 30 V(NPN ) () 1.5 V (80 mA ) 1 1.5ms (060 s/0.01 ) 2 0 3 MPakPakgf/cm 2barpsi LCD 3 (X2) / 4 (7 ) 4 (1 11 7 ) ON OUT1OUT2

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 63 17 46 25 350 531 50 7 46 13 350 345 32 7 21 5 200 166 40 6 21 7 200 198 25 7 10 3 100 153 12 13 16 32 20 6 10 2 100

Magnetic Rodless Cylinder Series CY1

15 20 25 32 40 50 63 CY1B Basic type Non-integrated guide 6 10 15 20 25 32 40 50 63 Basic type Direct mount CY1R Magnetic rodless cylinder 6 10 15 20 25 32 40 Slide bearing type CY1S 6 10 15 20 25 32 40 Ball bushing type CY1L Integrated guide 10 15 20 High precision guide type CY1H 25 (1 shaft) 25 (2 shafts) 32 Bilateral piping Centralized piping The piping type for CY1R6 is bilateral piping

Series VS

43 W X 2 42 Y Z 133 AA BB SIZE 1 1 73 56 35 53 2 20 150.5 4 68.5 71 30 45 2 20 175.5 n= NUMBER OF STATIONS (MIN. 2,MAX.10) LENGTH FORMULA L1= 43n + 72 L2= 43n + 84 LENGTH FORMULA L1= 56n + 90 L2= 71n + 90 L1= 71n + 66 LENGTH FORMULA L2= 56n + 106 LENGTH DIMENSIONS LENGTH DIMENSIONS LENGTH DIMENSIONS SIZE 1 SIZE 2 SIZE 3 n 3 2 n n 2 3 4 5 6 7 8 9 10 7 5 4 6 9 8 10 5 4 3 2 9 8 7 6 10 L L L

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Mechanically jointed rodless cylinder Basic type With Slide bearing guide type With cam follower guide type With linear guide type With High rigidity/ Linear guide type With Protective Cover type

(mm) 10 0.4 20 H 1.2 16 0.7 0.7 25 L 1.2 20 1.8 1.8 H 3.3 25 3.5 1.8 32 L 3.3 32 5.8 3.5 H 10.0 40 13.8 5.8 40 L 3.3 50 13.8 H 10.0 63 27.5 Table-3 List of Tightening Torque Stroke adjustment of the shock absorber (Lock plate type) Adjust the stroke by rotating the shock absorber after loosening the two lock plate retaining screws.

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

4.7 3 18 33.5 (36.5) 11.4 2 2 10 M3 x 0.5 thread depth 4 Auto switch mounting groove 5 15 Open: 11, Closed: 8 Vacuum suction port 3e8-0.028 -0.014 8-0.05 0 12 4 4 3 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 940 Rotary Actuated Air Gripper MHR3 1122Without Auto Switch: MHR3-15R 1122120 120 3 x M3 x 0.5 thread depth 6 25 M3 x 0.5 Finger closing port P.C.D.29 25 (Mounting thread

reduces flow setting time

Model AS1ll1FS-M5l AS2ll1FS-01 AS2ll1FS-02 AS3ll1FS AS4ll1FS Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

AIR FILTER

Groove of housing 30 rotation Lock button Bowl assembly 27 10.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Model AS1ll1FSGl-M5 AS2ll1FSGl-01 AS2ll1FSGl-02 AS3ll1FSGl AS4ll1FSGl Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

SYJA3000

SYJ3000-21-2A1 pc. 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) 3.1-16 Series SYJA3000 Body Ported Base Mounted 2 position single: SYJA3120-M3(-F) 2 position single: SYJA3140-M5 10 10 28.4 (Mounting holes) 3.5 25 2.5 5 5 10 22 16.4 3.2 210 SlA 22 4 (Mounting hole) Manual override M3 X 0.5 (Pilot port) M3 X 0.5 (Pilot port) (Non-locking) A B 11 17.5 VlA 1 (Bleed port) 1.5 A B 1.5 1.5 5

Cylinder with Lock Series CLS

Refer to pages 23 through 25 for auto switch precautions.

VXD21/22/23

DC AC, DC 60 40 1 80 60 10(1) 40 60 60 40 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

7.4

Dual 3-port valve S07 A B C6 0.58 0.39 0.16 0.67 0.37 0.18 25 or less 49 2-position Single S0712 0.51 0.40 0.15 0.64 0.33 0.15 22 or less 34 Double S0722 0.51 0.40 0.15 0.64 0.33 0.15 10 or less 42 Manifold 3-pos. Bar Base 3-position closed center S0732 0.54 0.37 0.10 0.46 0.38 0.08 45 or less 42 Page 745 4-pos.

KT10

) 2) 1) 14 to 194F (10 to 90C) for Vespel and PEEK seat.