Stations: 6 Stations (Note: 2 Stations are Required for Serial Unit Mounting), Port Size: C8 (ø8 One-touch Fitting), Mounting Base: S (U Side), Kit Type: R1 (Omron CompoBus/S 16 Output Points)

Stations: 9 Stations (Note: 2 Stations are Required for Serial Unit Mounting), Port Size: C8 (ø8 One-touch Fitting), Mounting Base: S (U Side), Kit Type: R1 (Omron CompoBus/S 16 Output Points)

Stations: 7 Stations (Note: 2 Stations are Required for Serial Unit Mounting), Port Size: C8 (ø8 One-touch Fitting), Mounting Base: S (U Side), Kit Type: R1 (Omron CompoBus/S 16 Output Points)

Stations: 8 Stations, Port Size: C8 (ø8 One-touch Fitting), Thread: Rc, S Kit: SDB (EtherCAT - 16 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option: S (Direct Exhaust)

Stations: 9 Stations, Port Size: C8 (ø8 One-touch Fitting), Thread: Rc, S Kit: SD0A (w/o SI Unit), SI Unit Polarity: Positive Common, Option: S (Direct Exhaust)

Stations: 10 Stations, Port Size: C8 (ø8 One-touch Fitting), Thread: N (NPT), S Kit: SDA (EtherCAT - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option: S (Direct Exhaust)

Stations: 6 Stations, Port Size: C8 (ø8 One-touch Fitting), Thread: T (NPT/NPTF), S Kit: SEA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option: S (Direct Exhaust)

Stations: 4 Stations, Port Size: C8 (ø8 One-touch Fitting), Thread: N (NPT), S Kit: SFB (PROFINET - 16 Outputs - Connector M12), SI Unit Polarity: N (Negative Common), Option: S (Direct Exhaust)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: Back, Connecting Tube Diameter: [8] 8(5/16inch), Liquid contact parts material: Resin + Metal, Mounting Hole: Presence

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

, C8, C10, 02 (35) 33 (11) 2-4.5Mounting holes DIN rail clamp screw (5.5) Grommet (G) (7.5) 24 (2.5) U side 02: Rc(PT)1/4 n Manual override 5 A A A A 4 2 2 2 2 (L4) (L3) L2 L1 3 2 P=19 1 21 6 Stations D side 1.8 (C6, C8) 17.5 3.5 20.5 10.5 300 75.5 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (C10) (02) 63 56 (11) PE port R 3 1 P (24) 9 2-Rc(PT)1/4 P(SUP) port 2-Rc(PT)1/4 R(EXH) port 21

5 Port Air Operated Valve SYA3000/5000/7000 Series

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated

SYA3000/5000/7000

110 2.5 4.3 [2.4] VFA Exhaust center Pressure center 0.23 [0.32] 0.97 [0.61] 2.2 0.39 0.58 P port: Single Double Closed center 100 106 2 position 3.2 0.26 0.77 3.2 0.37 0.82 1 4 C8 VFRA SYA720-C8 0.25 0.24 0.57 0.63 2.6 [1.9] 2.4 0.42 [0.46] 0.31 0.70 [0.56] 0.62 2.6 M5 x 0.8 One-touch ( ) 3 position 116 2.4 3.3 [2.4] Exhaust center Pressure center fitting for 8 EA, EB port : 1 8 VA 0.28

5 Port Air Operated Valve Series SYA3000/5000/7000 1

3 position 186 2.5 4.3 [2.4] Exhaust center Pressure center 0.58 0.23 [0.32] 0.97 [0.61] 2.2 0.39 P port: 1 4 Single Double Closed center 2 position 138 183 SYA720-C8 0.82 3.2 0.26 0.77 3.2 0.37 C8 ( ) 0.70 [0.56] 0.62 0.25 0.24 0.57 0.63 2.6 [1.9] 2.4 0.42 [0.46] 0.31 2.6 One-touch 1 8 3 position 192 2.4 3.3 [2.4] Exhaust center Pressure center fitting for 8 EA, EB port: 1 8 0.60 0.28 [

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

1.90 C8 1.80 0.16 0.23 0.45 0.44 SS5Y5-42 2 to 20 (1) 1/4 1.90 C8 1.90 0.12 0.20 0.43 0.46 Valve stations Location SS5Y7-42 1/4 3.00 C10 3.00 0.12 0.25 0.66 0.75 Base 4/2 (A/B) Porting spec.

Model: 10T (Side Ported), Type: None, Valve Stations: 3 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting)

Model: 10T (Side Ported), Type: None, Valve Stations: 3 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)