Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

E-MY2_E_D

0.49 to 4.90 m/s2 0.98 to 9.80 m/s2 1.96 to 19.6 m/s2 Nominal size:16 5kg 1.25kg 10kg 2.5kg Maximum load weight NOTE2) Nominal size:25 20kg 5kg 10kg 2.5kg Acceleration and deceleration method Trapezoidal drive Moving direction Horizontal direction Positioning points Both ends (mechanical stoppers), 1 intermediate position Both ends 0.01mm Repeated Positioning stopping precision Intermediate

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Unrestricted 300/50 m/s2 VZ Fluid Ambient and fluid temperature Response time (at the pressure of 0.5 MPa)(1) VF Manual override Lubrication Mounting orientation Impact/Vibration resistance(2) VFR VP4 Enclosure Note 1) Based on dynamic performance test, JIS B 8375-1981.

Series VQ Metal Seal/Rubber Seal Body Ported

Kit/Electrical entry/Cable length F P Kit (Dsub connector) Kit (Flat cable connector) Connector location Top (vertical) Side (horizontal) Connector location Top (vertical) Side (horizontal) P .1.10-40 P .1.10-36 Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 stations Max.16 (2) Max.16 (2) F kit P kit P kit F kit With cable (1.5m) With cable (3m) With cable (5m

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Component Parts 06 10 No. 1 Description Material Note Plug-in VFS6000-PSub-plate Body Aluminum die-casted Aluminum die-casted Platinum silver Platinum silver 06 10 Non plug-in VFS6000-S2 3 Aluminum die-casted Stainless steel Mounting bolt and gasket are not included.

4/5 Port Solenoid Valve

Lubrication Not required Mounting orientation Unrestricted 300/50 Note 2) Impact/Vibration resistance (m/s2) Note 1) In case of single type, be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.

E-MY2B_E_A

0.49 to 4.90 m/s2 0.98 to 9.80 m/s2 1.96 to 19.6 m/s2 Nominal size:16 4(5)kg 1.25(1.25)kg 6(10)kg 2.5(2.5)kg Maximum load weight NOTE 1) Nominal size:25 11(20)kg 4(5)kg 8(10)kg 2.5(2.5)kg Acceleration and deceleration method Trapezoidal drive Moving direction Horizontal direction Positioning points Both ends (mechanical stoppers), 1 intermediate position 0.01mm Both ends Repeated Positioning

Digital Flow Switches Series PF2A

Insulation resistance 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller. Vibration resistance 490 m/s2 in X, Y, Z directions 3 times each Impact resistance 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Noise resistance 200 g 240 g Weight Note 3) Port size (Rc, NPT, G) 1/8, 1/4 3/8 1/2 Note 1) The system accuracy when combined with PF2A2/3.

High performance type Step Motor Controller (Servo/24 VDC)

reach to the Speed (Unit: mm/s2) The setting to define the pushing operation or the positioning operation.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

reach to the Speed (Unit: mm/s2) The setting to define the pushing operation or the positioning operation.

Electric Actuator / Guide rod Slider

Acceleration Deceleration Can be set in units of 1mm/s2.

Table of Contents

S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light/surge

PC Wiring System

Dimensions 4-3.2 circuit board mounting hole Circuit board type DC24V MADE IN JAPAN + PCW-EC16Z00 4 4 YMX-F4 42 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 2 3 4 4 4 (28.5) 3 130 With cover (DIN rail mount compatible) With cover (DIN rail mount compatible) 16.7 DC24V MADE IN JAPAN + PCW-EC16Z01 28.3 YMX-F4 45 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 4.1 2 3 4 (48.5) 5.1 (50) 133 10.5 10.5

90

Without release valve Without pressure sensor/switch for vacuum With pressure sensor 30 m/s2 Vibration resistance Note 1) Pilot operated dual 2 port Pilot operated 2 port Valve configuration 20 m/s2 0.3 to 0.6 MPa Operating pressure range With switch for vacuum Poppet seal Valve construction Without pressure sensor/switch for vacuum With pressure sensor 150 m/s2 Impact resistance Note 2)

Step Motor Controller (Servo / 24 VDC)

to the Speed (Unit: mm/s2) The setting to define the pushing operation or the positioning operation.

Water-cooledThermo-chiller

-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

Auto Switch Guide

Do not drop, bump, or apply excessive impacts (300 m/s2 or more for reed switches and 1000 m/s2 or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 2. Do not carry a cylinder by the auto switch lead wires. Never carry a cylinder by its lead wires.

AIR CYLINDER

Parts list * is different from standard type (C(D)S2) No.

3 Port Air Operated Valve Series SYJA300 1

Impact/Vibration resistance (m/s2) Note) 150/50 Enclosure Dustproof Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.