When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

EX260-SEC-A_eng

Designation Description 2 Fieldbus interface connector (BUS IN) EtherCAT connection (M12 4-pole socket, D-coded) 4 5 2 *1: Blinking pattern SV24 V +24 V for solenoid valve 1 Power supply connector Power supply with load voltage for valves and operating voltage for SI unit (M12 5-pole plug, A-coded) 3 2 SV0 V 0 V for solenoid valve 200 ms 200 ms 1 SI24 V +24 V for SI unit operation 3 4 Ground

EXxx-OMU0020CN

EX245-EA2-1/2 9.1. . 9-1 EX245-EA2-1 . 9-2 EX245-EA2-2 61 No.EX-OMU0020CN 9.2. . 9-1 EX245-EA2-1 (WLH) mm 28.612061.5 200 g . 9-2 EX245-EA2-2 (WLH) mm 1412061.5 200 g EX245-EA2-2 P 36, 0.80.05Nm) 62 No.EX-OMU0020CN 10. 10.1. (EX245-DX1EX245-DY1) 88 EX600-ZT1 . 10-1 (EX600-ZT1) 63 No.EX-OMU0020CN 10.2.

PROFINET Compatible Fieldbus System

. -42No.EX-OMT0009 Specification Specifications Basic Specifications Item Specifications Power supply voltage range Power supply for input and control: 24 VDC 10% Power supply for solenoid valve: 24 VDC +10%/-5% Power supply for input and control: 6.2 A (GW unit internal current consumption: 200 mA or less) Power supply for solenoid valve: 4 A Rated current Number of inputs and outputs

PFxx-OMP0001CN

kpa [kpa] [kpa] 200 kpa 400 kpa 400 kpa [L/min] [L/min] PFMB7202(2000L/min) 200 kpa [kpa] 400 kpa [L/min] -65No.PF-OMP0001CN-F IN 3F.S.8 cm IN OUT [cm] -66No.PF-OMP0001CN-F PFMB7501/7102/7202 2x A B D E F H K L N PFMB7501/7102 70 30 43.7 37.2 15 14 26 18 13.6 PFMB7202 90 35 49.2 42.7 17.5 24 31 28 16.8 S T U V W PFMB7501/7102 24 22 32 40 50 PFMB7202 30 30 42 48 58 -67No.PF-OMP0001CN-F

PFxx-OMX0002

(Page 82) H_1 (Setting of OUT1 hysteresis) Setting of OUT1 hysteresis (Hysteresis) 2 R/W U16 200 Y Setting range Refer to "Settable range list". (Page 82) P1L (n1L) (Lower limit of window comparator) Setting of OUT1 output set value (Lower limit of window comparator) 3 R/W S16 1200 Y 1220 0x04C4 Setting range Refer to "Settable range list".

Digital Flow Monitor

(Custom range) Relationship between analogue input and digital display Set value A B 200 0 L/min 200 L/min 500 0 L/min 500 L/min 1000 0 L/min 1000 L/min 2000 0 L/min 2000 L/min 3000(Default) 0 L/min 3000 L/min 6000 0 L/min 6000 L/min 12000 0 L/min 12000 L/min 16000 0 L/min 16000 L/min 20 0 L/min 20 L/min USEr Input value (setting) Input value (setting) -31No.PF-OMU0007-D Press

Digital Flow Switch (Integrated display type)

Max. 1 NL/min 10 NL/min PF2A710 3.5 CFM x 10-2 35.0 CFM x 10-2 5 NL/min 50 NL/min PF2A750 18 CFM x 10-2 176 CFM x 10-2 10 NL/min 100 NL/min PF2A711 3.5 CFM x 10-1 35.5 CFM x 10-1 20 NL/min 200 NL/min PF2A721 7 CFM x 10-1 71 CFM x 10-1 50 NL/min 500 NL/min PF2A751 18 CFM x 10-1 176 CFM x 10-1 : Analogue output is based on the rated flow range at normal condition.

LV50-OMQ0002

. *1 Applicable fluidconductivity *1 5S/cm or more (micro Siemens/cm) Detecting method Electro static cupacity Ground*10 Negative ground Rated flow range 0.5 to 20 L/min 2.5 to 100 L/min 5 to 200 L/min Display range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Set point range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Zero-cut flow *2 0.4 L/min 2.0 L/min 4 L/min Min. setting unit

LFE-OMY0008

[%F.S.] 2.0 1.5 1.0 0.5 0.0 0 1 2 3 4 5 [s] [S] [MPa] [MPa] [MPa] [MPa] [ [ [ [ ] ] ] ] 2 69 No.LFE*-OMY0008 / / / / A B C 1 V 1.1 V 5 V 4 mA 4.4 mA 20 mA [L/min] LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 70 No.LFE*-OMY0008 2x )M12 () 1.6mm A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67

LFE-OMZ0011

The proof pressure is double the operating pressure range. -70No.LFE*-OMZ0011 Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow [L/min] Model B Minimum Maximum A LFE1 0.5 20 LFE2 2.5 100 Flow rate 0 Minimum Maximum rated flow LFE3 5 200 rated flow Out of range -71No.LFE*-OMZ0011 Dimensions Note) The electrical entry

LFE-OMZ0012

. (5) Any fluid which corrodes the internal fluid contact parts cannot be used. -25No.LFE*-OMZ0012 Characteristics Chart Flow rate characteristics (pressure loss) LFE1 LFE2 0.02 0.02 Pressure loss [MPa] Pressure loss [MPa] 0.015 0.015 0.01 0.01 0.005 0.005 0 0 0 5 10 15 20 0 20 40 60 80 100 Flow rate [L/min] Flow rate [L/min] LFE3 0.02 Pressure loss [MPa] 0.015 0.01 0.005 0 0 50 100 150 200

XLDV Series

Specifications Model XLDV-25 XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100 XLDV-160 Flange (valve) size 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Main pumping 14 45 80 160 200 300 800 Conductance l/s Note 1 Initial pumping 0.53 28 2.511 48 418 6.531.5 6.531.5 Internal 1.3

K35-OMW0031

The available bore sizes are 125, 160, 200, 250, 320 and 400. 2-3. No signal operation With No signal operation (Menu Tree No.1-3-5-3-3), the piston rod operation can be set when the input signal of 3.5mA or less is input. The available operation is Retracted end. Calibration position and Stay. 2-4.

Electric Actuator / Rod Type Dust-tight / Water-jet-proof (IP65 Equivalent / IP67 Equivalent)

Scraper (piston rod) 1 million full strokes or 200 km. Ball screw shaft Approximately 6 months Grease pack order number (Arrange separately) GR-S-010 (10g), GR-S-020 (20g), GR-S-400 (400g) Please contact us for the Maintenance Manual. 3. It is recommended that apply the appropriate covering to the electric actuator in the environment of splashing the liquid other than water.

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

100 400 200 400 200 Actuator specifications Pushing speed[mm/s] 20 to 30 10 to 30 5 to 30 20 to 30 10 to 30 20 to 30 10 to 30 Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion[mm] *4 0.1 or less Screw lead[mm] 10 5 2.5 12 6 16 8 Impact/Vibration resistance[m/s2] *5 50/20 Actuation type Ball screw (In-line) Ball screw + Belt (parallel) Guide type Linear