0.4

(Specify a model with 9 to 16 stations by means of the manifold specification sheet.)

VQ4000

VQZ SOL.A 8 8 () (+) Purple White SOL.A SOL.B 21 21 () (+) Brown White 8 stations SOL.B SOL.A 9 9 () (+) Gray Black SOL.A VQD SOL.B 22 22 () (+) Pink Red 9 stations Connector terminal no. SOL.B SOL.A 10 10 () (+) White Black SOL.A Double wiring (connected to SOL. A and SOL. B) is adopted for the internal wiring of each station, regardless of valve and option types.

VQ5000

Other models have conduit ports in two locations. 28 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Bottom port diagram 2-G1/2 Note) Conduit port 146 111 83.5 106 59.2 46.8 9 9 2n-1/2 (ports A, B) 55.5 M5 ground screw U side 32.5 34.5 n 12 X ... ... ... ... ... ... ...

Valve Single Unit

Common connector assy for manifoldRefer to page 1-6-9.

Valve Single Unit

Common connector assy for manifoldRefer to page 1-6-9.

Compact Manifold Regulator Series ARM5

Tightening torque recommended (M5: 1.5 to 2 Nm, R1/8: 7 to 9 Nm) For sealing, use a pipe tape.

VQZ1000/2000/3000

26.5 20.5 13.5 13.5 11.5 SMC 9 9 M5 x 0.8 (Not applicable to standard.)

Electric Slide Tables

9 !6 @8 @7 q !5 !7 w t !2 !4 !3 @9 @5 @6 Shipped together #0 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 10 11 12 No.

24

9 !9 !4 @7 @9 @9 @9 @8 @8 @6 !2 !1 o i y !6 t r q @5 e r r w @1 !9 u !0 !2 @4 63 or more 16 20 32 @0 @3@2 !5 16 to 25 25 stroke Cushion valve section 16 to 25 50 stroke or more 50 or more Component Parts Component Parts No.

Modular Design with Uniform Body Style

*9 *9 *9 6C With bowl guard (Nylon bowl) V *10 *10 *10 *10 + y Nil With drain cock V V V V V f Air filter drain port*11 J*12 Drain guide 1/8 V Drain guide 1/4 V V V V W*13 Drain cock with barb fitting (for 6 x 4 nylon tube) V V V V + g Lubricator lubricant exhaust port Nil Without drain cock V V V V V 3*14 Lubricator with drain cock V V V V V 9 Air Combination AC20-D to AC60-D Series AC

HEC_W-E

1 ALARM INDICATION IN THE EVENT ERR14 ARISES-9-2 FIG. 9-2 ALARM INDICATION IN THE EVENT ERR14 ARISES DURING PB RANGE SETTING INPUT -9-2 FIG. 9-3 ALARM INDICATION IN THE EVENT TEMP.

Cylinder with Lock

7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

&' 9 Electrical entry =$ 1 $ ! $ <@ G9 1 4 9 L9 4 5 9 * M9 4 5 9 * MN9 4 D9 R port P/E port DO9 MO9 LO9 LN9 4 H9 1 4 9 3 >1 ? >! ?

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

SV

Refer to Precautions 2 on page 1-2-9.

Title not found

28 {58) 1961 8.35 1212\ 2.05 ts2) 11.2\ 2.AO (66) 803 8 6 6 :220\ 4.O2 (l 02) 307 t7B) 0 9 3 (25) 2.05 (s2) 0.55 (14) 0.83 t 2 1 l n 1 2 t 1 7 a 1.43 i.B9 M2211.51.46 137) c 7 9 (201t 1 r 6 l 1 . 1 0 (24) 1 24 :8;li' 3 r . 5 : l i i I 2.80 (71) 9.25 (235) 1 0 0 9 (25s) 2.56 (65) 0.49 r 2 5 ) 3 . 1 5 (80) 9 6 1 1244\ t0.39 :264\ 1 5 7 t 1 1 6 ) 3 6 2 t92l 0 9 8 (30) 2.05 (52) 0.83 i21l n 1

0.4

(Specify a model with 9 to 16 stations by means of the manifold specification sheet.)

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

9 q r !5 y i !8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

9 are set. Note) When ordering spare parts, write 1 piece for 1 set of the parts for one actuator.

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing