S

P I S T O N R O D A I R H Y D R O TYPE P I S T O N R O D D E F L E C T I O N (REFERENCE FACTOR) P I S T O N R O D D E F L E C T I O N (REFERENCE FACTOR) For a concentrated load at the center of the housing. For a concentrated load at the center of the end plate.

LX Series Compact Electric Actuators

o"o+ oeep 3 o 3 l "!l Cross section C-C Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

Digital Flow Switch (Integrated display type)

CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1 to 25 L/min 2 to 50 L/min Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 48 6 22 22 6 25 25 43 15 15 M5 leakage detection port 23 30 22 Part number for sub-base VCC12-S02 02F [Rc1/4] [G1/4] 60 0.5 to 2 Sub-base material is aluminum + hard anodized containing PTFE.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

For detailed specifications, refer to page 9-15-1. Data Electrical entry Type Model Features D-E80A Grommet Reed switch Without indicator light 9-14-11

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

For detailed specifications, refer to page 9-15-1. Data Electrical entry Type Model Features D-E80A Grommet Reed switch Without indicator light 9-14-11

P

ZF Flat with ribs (C) Flat style (U) ZP ZP02Ul to 08Ul ZP10Cl to 50Cl ZCU Vacuum related Model Nom.size C10 A 10 B 12 C 4 D 13 E 7.7 F 12 Y 1.7 ZP10Cl ZP13Cl ZP16Cl ZP20Cl ZP25Cl ZP32Cl ZP40Cl ZP50Cl C13 13 15 4 13 7.7 12 1.8 ZP10Ul to 50Ul C16 16 18 4 13 8.2 12.5 1.2 C20 20 23 4 15 9.5 14 1.7 C25 25 28 4 15 9.5 14 1.8 C32 32 35 4 15 10 14.5 2.3 C40 40 43 7 18 13.7 18.5 3.3 C50 50 53 7 18

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6

Vacuum Manifold for fieldbus system

Suction flow [L/min(ANR)] With exhaust sealing valve 30 48 57 Without exhaust sealing valve 31 51 60 68 High-noise reduction silencer exhaust Note 2) 3) With exhaust sealing valve 30 45 54 Air consumption [L/min(ANR)] Note 2) 26 48 68 102 Supply pressure range [MPa] 0.3 to 0.5 Type of actuation Supply valve: N.C., Release valve: N.C. (ZKJ-JSY3A) Supply valve: N.O., Release valve: N.C.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

For detailed specifications, refer to page 9-15-1. Data Electrical entry Type Model Features D-E80A Grommet Reed switch Without indicator light 9-14-11

Digital Flow Switch (Remote type monitor unit)

28 50% of max. rated flow [ 2.00] 2.00 L/min (4 L type) [ 8.0] 8.0 L/min (16 L type) [ 20.0] 20.0 L/min (40 L type) [ 50] 50 L/min (100 L type) [ 126] 126 L/min (250 L type) [ P_1] Set value (OUT1) [F 1]/[ oUt1] Page 29 5% of max. rated flow [ 0.20] 0.20 L/min (4 L type) [ 0.8] 0.8 L/min (16 L type) [ 2.0] 2.0 L/min (40 L type) [ 5] 5 L/min (100 L type) [ 12] 12 L/min (250 L type) [ H_1]

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Booster Regulator/Air Tank

min (ANR)) Outlet air flow rate (L/min (ANR)) Outlet air flow rate (L/min (ANR)) Pressure Characteristics Pressure Characteristics Pressure Characteristics Inlet pressure: 0.7 MPa Outlet pressure: 1.0 MPa Flow rate: 20 L/min (ANR) Inlet pressure: 0.7 MPa Outlet pressure: 1.0 MPa Flow rate: 20 L/min (ANR) Inlet pressure: 0.7 MPa Outlet pressure: 1.0 MPa Flow rate: 20 L/min (ANR) (Representative

Digital Flow Switch

mim 10 to 1000 L/mim 20 to 2000 L/mim Instantaneous flow 5 to 525 L/mim 10 to 1050 L/mim 20 to 2100 L/mim Set flow rate range Accumulated flow 0 to 999,999,990 L Instantaneous flow 1 L/min Flow Minimum setting unit Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse 10 L/pulse Accumulated value hold 2 Every 2 minutes or every 5 minutes Rated pressure range

Flow Sensor Series PFMV

0.0 to 1.0 l/min 0.0 to 3.0 l/min 0.5 to 0.5 l/min 1.0 to 1.0 l/min A 3.0 to 3.0 l/min Mounting screw Analog output (1 to 5 V) Output specification 1 2 L-type brackets (with 2 mounting screws) are included.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Voltage Monitor for PFMV5

min 0 to 3 L/min 0.5 to 0.5 -0.05 to -1 to -1 L/min -3 to 3 L/min L/min L/min Display flow range Set flow range -0.025 to -0.05 to -0.15 to -0.525 to -1.05 to -3.15 to Flow 1 0.525 L/min 1.05 L/min 3.15 L/min 0.525 L/min 1.05 L/min -3.15 L/min Minimum setting unit 0.001 L/mim 0.01 L/mim 0.001 L/mim 0.01 L/mim Indication unit Voltage : V Instantaneous flow : L/min, CFH(ft 3/h) 2 Repeatability

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

consumption Suction flow rate Suction flow rate Suction flow rate (l/min (ANR)) Supply pressure (MPa) Suction flow rate (l/min (ANR)) Supply pressure (MPa) ZH10S Max. vacuum pressure: 88 kPa Exhaust Characteristics Flow Characteristics ZH10L Max. vacuum pressure: 48 kPa Exhaust Characteristics Flow Characteristics Vacuum pressure Suction flow rate (l/min (ANR)) Air consumption (l/min (ANR

IZS30_eng

for ajusting I/B 2-Pipefitting with check valve AKH04B-M5-X275 2X4-M4X0.7 Depth 5 (For mounting) Switch for selecting frequency Electrode cartridge wx0y0i0h z{)| hSnpo qsrtd_u v 8P Modular jack (For power supply cable plug) g)l m i)i dl n (Number of Cartriges) 6P Modular jack (For sensor cable plug) Model n L (mm) IZS30-300** 3 300 IZS30-780** 9 780 IZS30-1260** 15 1260 IZS30-1500** 18 1500

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Dimension table n: Stations n L L1 L2 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 7