Modular Type Lubricator Series AL

for maintenance With bracket B With float switch B 374 383 383 382 385 C E Model Port size H 25 18 16 35 35 P 47 47 AL30 AL40 AL40-06 AL50 AL60 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 324 333 333 332 335 38 40 38 41 45 53 70 75 90 95 54

Multistage Ejector (N)ZL Series

Optional Pressure Sensors Series (N)ZL Multistage Ejector Energy saving, high flow, 3 stage diffuser construction Suction flow rate increased 250% and air consumption reduced 20% with 3 stage diffuser construction (Versus 1.3, single stage model) 1 stage performance Air consumption l/min (ANR) (SCFM) Maximum suction flow rate l/min (ANR)(SCFM) Vacuum pressure Q1 Q2 Q3 (N)ZL112 100 (3.5) 200

Modular Style Regulator with Built-in Pressure Gauge Series ARG

For example, when using 2 auto-drains, the compressor capacity with 1.5 kW (200 l/min (ANR)) or greater is required. Operating pressure: 0.1 MPa or more Operating pressure for AD17/27: 0.1 MPa or more Operating pressure for AD37/47: 0.15 MPa or more 1.

ZSM1-115/121

Note) Auto shift input time Series PSE 200: 10 [ms] or longer Other series: 5 [ms] or longer Hi Auto shift input time Lo Note) Auto shift input time Series PSE 200: 10 [ms] or longer Other series: 5 [ms] or longer 885 Technical Information Auto shift function 12 2-wire pressure switch connections 13 A 3-wire type switch is a switch that has an output line other than the positive and negative

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

5 6 6 6 6 No. 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

13

-16 ZH20DL-12-16-16 12 12 12 12 114 40.95 30.5 15.8 3.5 15.8 20.95 20.95 114 40.95 30.5 15.8 3.5 15.8 26.75 124.6 45.95 32.7 15.8 3.5 17.2 26.75 124.6 45.95 32.7 15.8 3.5 17.2 I J K L M N O Model ZH18DS-12-12-12 ZH18DL-12-12-12 ZH20DS-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

7 HA GA 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 B-B A-A (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223 248 NA 4 4 4 4 4 4 8

Plug-in Unit

stations) 1 to 8 stations SDVB Serial kit for CC-LINK 1 to 8 stations (16 stations) AS-i, 8 in/out, 31 slave modes, 1 power supply systems 1 to 4 stations (8 stations) (16 stations) Serial kit for PROFIBUS-DP Serial kit for DeviceNet/PROFIBUS-DP/CC-LINK AS-i, 4 in/out, 31 slave modes, 1 power supply systems 1 to 2 stations (4 stations) 2-2-19 Base Mounted Series VQC4000 How to Order Valves

Multi-Axis Step Motor Controller

(Option) JXC-W1 p. 16 VUSB cable (Option) JXC-W1-2 Cable length: 3 m p. 16 VController setting software (Option) JXC-W1-1 p. 16 PC Provided by customer. *1 The connected actuators should be ordered separately.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Flow Rate and Sonic Conductance AS121F-M3 AS121F-M5 AS131F-M5 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS131F-M3 Model AS121F-M5-02 2, 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size Tubing O.D. 1/8" , 3/16" 1/8" , 5/32" 1/8" , 5/32" 3/16" , 1/4" , 1/4" , 5/16" , 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 1/4" , 5/32" 5/16" 3/8" Controlled

OMU0023

of read outputs: 16 bits (10h) 12 1 (Number of bits) 13 0 Calculated 14 value Checksum(LRC) 15 Calculated value 16 End code CR 17 LF Note 1: The maximum value is 456 bits.

Compact Cylinder

Mass of Cylinder Moving Parts: With Magnet for Auto Switch [g] 100 Allowable lateral load at rod end [N] 80 Bore size [mm] Cylinder stroke [mm] 63 5 10 15 20 25 30 35 40 45 50 50 40 32 12 6 7 8 9 10 11 10.0 16 7 8 9 10 11 12 20 16 17 19 21 23 25 27 29 31 33 25 25 25 28 31 34 37 40 43 46 49 53 20 32 43 48 52 57 61 66 70 75 79 83 16 40 69 75 81 87 93 99 105 111 117 123 1.0 12 50 127 137

CQM

Series Variations Series Bore size (mm) Standard stroke (mm) Cushion 5 10 15 20 25 30 35 40 45 50 75 100 12, 16 20, 25 Rubber bumper CQM 32, 40 50 7-5-1 2 Compact Cylinder: Guide Rod Type Double Acting, Single Rod Series CQM 12, 16, 20, 25, 32, 40, 50 How to Order Without auto switch B 20 10 CQM M9B S B 20 10 CDQM With auto switch With auto switch Courtesy of Steven Engineering, Inc.-230

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size 10 16 10 mm 16 mm Mounting style Basic style Axial foot style Rod side flange style Double clevis style B L F D Cylinder stroke (mm) Refer to Standard Stroke on page 835. CJ5 L 16 S R 60 CDJ5 L 16 S R 60 H7BAL With auto switch With auto switch (Built-in magnet) Made to Order Refer to page 835 for details.

Serial Transmission System Series EX250 Series EX500

layout (Up to 16 solenoids possible.) 16 16 stations Nil S R RS Internal pilot specification Internal pilot/Built-in silencer External pilot specification External pilot/Built-in silencer Note 1) Double wiring specification: Single, double, 3 position and 4 position solenoid valves can be used on all manifold stations.

VQ7-6/7-8

(initial value) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 18 Series VQ7-8 DIN Connector Type 2 position/Single : VQ7-8-FG-S Single (reverse pressure) : VQ7-8-YZ-S 154 56 (71) 82.5 71.5 154 49 (64) 49 (64) 82.5 56 (71) 31 (42) 31 (42) 2-7.5 Mounting hole 16 (20) (port A) 16 (20) (port B) R1 R2 P Manual override A B PB (22) 16 16 (23) 12 (16) (11) 10 75

Fieldbus system (PROFIBUS DP compliant)

No.4 No.5 No.6 Output point COM A COM B COM C COM D OFF OFF OFF 64 16 16 16 16 OFF OFF ON 0 OFF ON OFF 16 8 8 OFF ON ON 24 8 8 8 ON OFF OFF 32 8 8 8 8 ON OFF ON 48 16 16 16 ON ON OFF Reserve ON ON ON : It cannot be set to 0 simultaneously for input and output point. -23No.EX-OMI0032-G 3.

EXxx-OMW0014CN

SI 2 16 16 Valves32 32 Valves 2 4 D 012 31 Byte 16 Valves 32 Valves 0 Valve coils 0-7 Valve coils 0-7 1 Valve coils 8-15 Valve coils 8-15 2 Valve coils 16-23 3 Valve coils 24-31 . 6-3 39 No.EX-OMW0014CN-A 6.4.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional for CX2) No rubber bumper

Fieldbus system PROFINET compatible SI Unit

Module parameters Module parameters for valves The "16 Valves" has the following module parameters.