SMC Corporation of America
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Connected sensor model Displayed flow range Rated flow range PFMV530 3.0L 0 to 3.0 [L/min] PFMV510 1.0L 0 to 1.0 [L/min] PFMV505 0.5L 0 to 0.5 [L/min] PFMV530F 3.0L 3.0 to 3.0 [L/min] PFMV510F 1.0L 1.0 to 1.0 [L/min] PFMV505F 0.5L 0.5 to 0.5 [L/min] : The set values of OUT1 and OUT2 will be reset when the flow range setting is changed. Press the button.

to 90 oC (No freezing and condensation) Operating pressure range 3 0 to 1 MPa Pressure spec.

0 0 5 10 15 20 0 20 40 60 80 100 Flow rate [L/min] Flow rate [L/min] LFE3 0.02 Pressure loss [MPa] 0.015 0.01 0.005 0 0 50 100 150 200 Flow rate [L/min] -68No.LFE*-OMZ0011 Straight pipe length (reference value) Straight pipe length Straight pipe length Change of accuracy [%F.S.]

3 @1 @0 !1 !0 !2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

0 @0 oi @3 u@4 @8@7@2r !9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Z (Example) F9NWZ Auto switches marked "" are produced upon receipt of order. 1 Series CRJ Specifications 05 1 Size/Type Basic type With external stopper Basic type With external stopper Fluid Air (non-lube) Max. operating pressure 0.7MPa Min. operating pressure 0.15MPa Ambient and fluid temperature 0 to 60C (with no freezing) +8 0 +10 0 +8 0 +10 0 +8 0 +10 0 +8 0 +10 0 90 , 100 90 , 100

0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530FG ASD630FG 1500 1000 Effective area (mm2) Effective area (mm2) 14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 12 Series ASD-FG

F: Angle adjustable range 5 E: Angle adjustable range 5 E: Angle adjustable range 5 Angle adjusting screw 0 0 8 0 1 e l g e n Allowable lateral load to the piston rod end gl a n ng a ti g us in j d st a Using friction fittings makes it easier to mount the load to the piston rod end. u m dj u m a ni Mi m F: Angle adjustable range 5 u m xi Ma 0 Mi 17 nim e um gl an ad g ju in st 0 M 19

Membrane element Absolute filtration accuracy: 0.2, 0.4m Material: PP (ED102S ... x 0) CA (ED111S ... x 0) n Tighten the drain plug. m When air release is completed, tighten the air vent plug. Note) PP: Poly propylene n Clean the inside of the case, gaskets, seals, holders, plugs, etc., with a pure fluid or solvent.

VR VH Body ported single solenoid Foot bracket VFA3122 F 02 VHS Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size For 50 type manifold VFA3 1 50 W/o sub-plate (Pilot port: Rc) Nil W/o sub-plate (Pilot port: Other than Rc) Thread type for pilot port 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil 00F 00N 00T Rc G NPT NPTF

) are the dimensions for rotations of 180 O and 190O SD BA BB CA CB SA SB SC SE H J K S* U W P A B C D F DD Model (NPTF) -0.000236 -0.000669 -0.000236 -0.000669 -0.000276 -0.000787 -0.000276 -0.000787 0 -0.00205 0 -0.00244 0 -0.00244 0 -0.00244 0.55 0.67 0.33 0.33 0.51 1.3 0.53 0.47 1.34 1.42 5/16-18UNC Depth0.31 0.2 5.67 (6.97) 3.86 0.62 1/8 2.44 1 7/8 1.81 9/16 0.1 1 NCDRA1BS_50-__-A__

0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

/150 Thermo-chiller Standard Type Pump Capacity HRS100/150-A -20/40HRS100/150-W -20/4073 [0.5] 164 [50] Circulating fluid pressure psi [MPa] Circulating fluid outlet (60 Hz) Usable range (50 Hz) 58 [0.4] 131 [40] Pump head ft [m] 44 [0.3] 98 [30] Usable range (60 Hz) Circulating fluid outlet (50 Hz) 29 [0.2] 66 [20] Circulating fluid return port 15 [0.1] 33 [10] 0 0 0 2.6 [10] 5.3 [20] 7.9

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

098) C RESET <> ON SVRE ON <> <> DRIVE ON(0-099) C RESET <> (0-149) RESET SVON <> D <> <> (0-901) E <> (0-902) E <> <> <> (0-910) E <> SDRAM SDRAM (0-911) E <> <> FROM FROM (0-912) E <> <> Modbus OFF Modbus (0-913) E <> <> (0-914) E <> 44 No.SFOD-OMT0011CN-A (3-2) code <> , [] (1) (2) =0 (3) (4) (5) (6) (7) (1-048) B RESET <> <> [] (1) -+ (2) (1-049) B RESET <> <

Z (Example) F9NWZ Auto switches marked "" are produced upon receipt of order. 1 Series CRJ Specifications 05 1 Size/Type Basic type With external stopper Basic type With external stopper Fluid Air (non-lube) Max. operating pressure 0.7MPa Min. operating pressure 0.15MPa Ambient and fluid temperature 0 to 60C (with no freezing) +8 0 +10 0 +8 0 +10 0 +8 0 +10 0 +8 0 +10 0 90 , 100 90 , 100

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)