SMC Corporation of America
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(Refer to Copy function on page 8.) 3 Series ZSE10(F)/ISE10 Dimensions ZSE10(F)/ISE10 M5 6.4 (7.7) (30) 2 x 3.3 M5 x 0.8 (12) 1.2 25 13 3.5 9.8 51.8 4.2 ZSE10(F)/ISE10 M5R 1.2 6.4 25 51.8 4.2 9.8 4.5 M5 x 0.8 4 Digital Pressure Switch Series ZSE10(F)/ISE10 ZSE10(F)/ISE10 01 6.4 2 x 3.3 1.2 Width across flats 10 Width across flats 12 11 13 13 25 3.5 8 R1/8 9.8 12.5 51.8 4.2 ZSE10(F)/ISE10

Communication data 5.1 Process data map PD OUT (to ITV) 15*1 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Set pressure value.(13 BIT) Disabled*2 Value 100% F.S.is indicated using 12 BITs, from the 3rd BIT to the 14th BIT. *1 Setting up to 120% F.S is possible by using the 15th BIT (However this is out of warranty). *2 Either 0 or 1 will have no effect.

Piping 5 13 13. Operating Environment 6 15 14. Speed Control 15 15. Troubleshooting 7 16 16. How to exchange seals 8 17 17. Construction 21 18. Auto Switch 25 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Circuit examples 24 13. Exhaust Characteristics and Flow Characteristics of Ejector 25 14. Troubleshooting 26 15. Non-conformance Examples 27 1 - 1. Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

A [Tightening torque] L[]ZB[]3 8 14 Across f l at 13 21 L[]ZB[]5 10 22 Across f l at 21 33 Model no. B C D E L[]ZB[]5 M 10 x 1. 25 x 12 deep [24.5Nm ] L[]ZB[]3 M 6 x 1. 0 x 8 deep [5.2Nm ] Model no. [Tightening torque] apply rotating force to the rod.

For details of each setting, refer to page 13 of this manual. Please refer to the PLC manufacturer's manual etc. for details of programming and addresses. For the PLC protocol and programming refer to the relevant manufacturer's documentation.

53 2.3 30 AF40-A 50 52 26 8.5 12.5 70 2.3 35 AF40-06-A 50 52 25 8.5 12.5 70 2.3 34 AF50-A 70 66 35 11 13 90 3.2 47 AF60-A 70 66 35 11 13 90 3.2 47 Dimension:B of auto-drain and optional bowl assembly Optional C D Semistandard 2 6 8 C 6C J 2J 6J 8J CJ 6CJ W 6W 2 6 8 C 6C 2 6 8 AF10-A 59.3 59.9 77.9 77.9 77.9 AF20-A 87.4 87.6 87.6 87.6 91.4 93.9 91.4 91.4 91.4 104.9 104.6 104.9 104.9

L1 L2 Number of spacers IZN10E-ES2 37.8 45 4 IZN10E-ES3 55.2 60 6 IZN10E-ES4 72.6 76 8 13 Nozzle Type Ionizer IZN10E Series Functions 1. Maintenance warning Constantly monitors lowered static neutralization performance due to contamination or wear of the emitter. The maintenance LED lights up and maintenance signal is generated. 2.

(Refer to page 13.) condition, but there is no problem in use. Wiring 3. Do not use in locations subject to vibration or impact. Warning 4. Do not use in locations where radiated heat will be received from nearby heat sources. 1. The controller starts its output the moment the power switch is turned ON.

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

18 10 13 18 12 15 20 Internal capacity (L) 14 21 29 14 21 29 11.5 18.5 26 Note 1) Cannot be used with gases.

Element Hole for fluid release Basket Lock mechanism Lightweight 32% lighter than the current model Weight: 13 kg (Current model: 19 kg) Band Applies to FGF1A Piping operations are a breeze. With a removable leg system, carrying out piping operations at the fluid release port is easier.

90 3.2 1 3.2 43.3 1/8 44.5 95 4.5 129.6 44 46 80.3 70 43.3 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

(170) Motor cable (6) 106 60 Body mounting reference plane Note 1) 74 58 6H9 ( ) depth 7 7 +0.030 0 +0.030 0 6H9 ( ) depth 7 13 L (3.1) A (Table traveling distance) Note 2) 86 86 (223.5) Stroke (88) (90) 61 90 Encoder Z-phase detecting position Note 3) 48.5 (4) 21 68 53.8 85.5 8 31 8 12.9 Vacuum port Rc1/8 M4 x 0.7 thread depth 8 (F.G. terminal) +0.030 0 6H9 ( ) depth 6 n x 6.6 7 76 150

274 292 B 162 196 196 270 288 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 512 Lubricator Series AL10 to AL60 Dimensions Semi-standard specifications: 1000 cm3 tank AC-A 106 2 x P (Port size) AF-A 90 A 106 AF-A 66 70 Bracket (Option) 13 3.2 AR-A 11 AL-A B C V Q OUT IN AW-A AC OUT AF AF AR With float switch Specifications AL AL Contact capacity: 15 VA (AC) 15 W (DC) Contact point: 1a, 1b AW AG

ASG22F-M5-04 ASG22F-M5-06 ASG32F-01-04S ASG32F-01-06S ASG32F-01-08S ASG42F-02-06S ASG42F-02-08S ASG42F-02-10S ASG52F-03-08S ASG52F-03-10S ASG52F-03-12S ASG62F-04-12S 4 10.6 23 28.8 11.6 25.2 18.2 M5 x 0.8 8 15.8 37.2 33.7 33.7 30.2 6 13 23.6 30.6 14 34.4 18.8 4 10.6 24.8 32 14.3 39.4 18.2 1/8 12 18.6 44 39 40 35 6 13 25.4 32.6 14.3 42.4 18.8 8 15 27.5 35.5 16 52.4 20.9 6 13 27.3 36.2 17.9

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

M1 Weight (g) 4 6 6 8 6 8 10 8 10 8 10 10 12 Applicable tubing O.D. d T H D1 D2 L1 L2 L3 Model AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS221-02-F10S AS321-02-F08S AS321-02-F10S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3

Metric size Inch size 0 1 Meter-out Meter-in 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 23 04 06 08 10 12 4 6 8 10 12 With One-touch fitting Stainless steel specifications (SUS303) Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Use 1/8" tube.

Inch size Metric size 3.2 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 With One-touch fittings Use 1/8" tube. 2 Speed Controller with One-touch Fittings Panel Mount Type, In-line Type Needle Valve/Flow Characteristics AS1001F AS2001F AS2051F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Flow rate