Valve; Stop Valve: None, Return Port Size: 3/8, Flow Switch Output Specifications: Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes, Lead Wire: w/o Lead Wire and M8 Connector, Flow Switch Unit Specifications: -

Valve; w/Stop Valve, Return Port Size: 3/8, Flow Switch Output Specifications: Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes, Lead Wire: -, Flow Switch Unit Specifications: -

Stations: 4 Stations, Piping: U Side: Open; D Side: Open, Thread Type: NPT, Flow Switch Type: Integrated Display, Rated Flow Range: 0.5 to 4 L/min, Return Unit Components: w/Flow Adj.

AL800/900

123128PA 123321A 12318 123111 113136 JIS B 2401G90 123128PA 123321A 12318 123111 113136 JIS B 2401G90 y u i o !

VXA31/32

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

Digital pressure switch for energy-saving control ejector

U Function to change the unit in which the value of pressure is indicated. Only a product with this function can change the unit. A product with unit-changing function cannot be purchased if it is used within Japan. Pressure is indicated only by SI units in Japan. Unit selection function W A measure of the products resistance to a voltage applied between the electrical circuit and case.

Digital pressure switch for energy-saving control ejector

U Function to change the unit in which the value of pressure is indicated. Only a product with this function can change the unit. A product with unit-changing function cannot be purchased if it is used within Japan. Pressure is indicated only by SI units in Japan. Unit selection function W A measure of the products resistance to a voltage applied between the electrical circuit and case.

VG342

5 W (With indicator light) Power consumption Note) N.C.

Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

PA300/500/700

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

TUS Series Soft Polyurethane Flat Tubing Multi-core, Multi-color Specification

Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions. 0 Operating temperature (C) 0 20 20 40 60 MS How to Order KKA Please contact SMC for delivery. KP TUS 0425 12345 A X172 LQ Caution Multi-core, multi-color specification Tubing model Tubing size 1.

Stations: 04 (4 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Air cooled Thermo-con (Compact type)

used STX ETX ACK NAK ASCII code 30H 31H 32H 33H 34H 35H 36H 37H 38H 39H Number used 0 1 2 3 4 5 6 7 8 9 ASCII code 2DH 20H Number used SP Space Minus ASCII code 41H 42H 43H 44H 45H 46H 47H 48H 49H 4AH Character used A B C D E F G H I J ASCII code 4BH 4CH 4DH 4EH 4FH 50H 51H 52H 53H 54H Character used K L M N O P Q R S T ASCII code 55H 56H 57H 58H 59H 5AH Character used U V W X Y Z HEF002

Air cooled Thermo-con (Compact type)

V W X Y Z INR-244-831 3-9 Troubleshooting 4 Troubleshooting The table below shows the solutions for the problems.

Stations: 05 (5 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 06 (6 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 06 (6 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 06 (6 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 10 (10 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 10 (10 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.